PFxx-OMU0002

Window comparator mode An operating mode in which the switch output is turned on and off depending on whether the flow is inside or outside the range of two set values 13 No.PF-OMU0002-D Mounting and Installation Mounting Never mount the product in a place that will be used as a mechanical during piping.

A

06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

46 46 T D H1 A L1 VMG Low noise nozzle with male thread: KNS (mm) Model Nozzle size D Connection thread L1 A Width across flats H1 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/4 R 1/4 R 1/4 R 1/4 14 14 14 14 20 20 20 20 14 14 14 14 D 2 A Connection thread H1 L1 Copper extension nozzle: KNL (mm) Model Nozzle size D Outside diameter L1 Outside

Membrane Air Dryer

Note 4) Refer to the Piping Precautions (Piping material for low dew point air) on page 46. Note 5) ANR indicates the flow rate converted to the value at 20oC, under the atmospheric pressure and the state of relative humidity 65%. Note 6) Includes 1 L/min [ANR] of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator.

Soft Start-up Valve AV2000/3000/4000/5000

06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

S Couplers

Fluorine coated KKA3 KKA4, 6, 7, 8, 9 KQG2 Plated with fluorine-contained material Fluorine coated Fluorine coated Fluorine coated Fluorine coated KKA3, 4, 6 KKA7, 8, 9 Equivalent to Stainless steel 304 Stainless steel 304 6 Plug valve spring KG KFG2 Equivalent to Stainless steel 304 Stainless steel 304 Stainless steel 304 Stainless steel 304 Stainless steel 304 10 Collar spring MS 11 12 13

High Vacuum L Type Valve

Period and Scope of Warranty 13 7. Parts Replacement Procedure 14 1 XL-OMS0001-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

High Vacuum L Type Valve

Not adhering to these specifications, can result in damage to the product. 13 XL-OMV0016 7-2.

REGULATOR

90 3.2 AR60K-B 70 66 65.8 11 13 90 3.2 Note 1) B dimension is a size in the state to unlock the handle.

Clean Gas Filter

0.7 MPa 65 0.001 0.5 MPa 0.0001 100 SFB302-02: TSJ 1/4 (Tube Swage Joint) 0.1 1 10 Flow rate L/min (ANR) 2 x 4.5 (Mounting hole) Bracket 2 x 1/4 TSJ 21.5 50 40 IN 19 1 13 22.5 69 SFB305-02, SFB315-02: URJ 1/4 (Union Ring Joint) 2 x 4.5 (Mounting hole) Bracket 2 x 1/4 URJ 21.5 50 40 IN 19 1 22.5 13 A Model A 79 84 SFB305-02 SFB315-02 308 Clean Gas Filter: Disposable Type/Multiple Disc Type

LG1H

Manufacturer M4 x 0.7 M3 x 0.5 Thread size 32.5 21.5 Effective thread length (mm) 8 6 Quantity 2 4 P.C.D. 46 45 Motor mounting area When mounting a coupling on the motor, mount it within the dimensional range shown on the left. A A B Section BB P.C.D.

Speed Controller with One-touch Fittings Series AS In-line Type 1

34.1 39.1 8.2 64.4 15.2 18 5/16" AS3001F-09 AS4001F-10 36 43.6 51.1 18.5 10 21 82 11.3 26.5 53 35.3 40.3 9.5 70.8 17.9 21 3/8" AS3001F-11 AS4001F-12 40 44.6 52.1 20.9 12 22 97 43.5 51 10.3 76.9 17.9 21 3/8" AS4001F-11 26.5 106 44.9 52.4 11.6 83.1 21.7 22 1/2" AS4001F-13 15-9-12

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

3 Port Air Operated Valve Series SYJA300 1

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P 27 30 (2) 7 12.7 VR A 9.2 VH 2 15 (Bracket) 10 VHS 11 Base mounted: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Type of actuation C (dm3/(sbar)) b Cv C (dm3/(sbar)) b 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Cv P, EA, EB A, B 35 37 Single Double 2 position 0.44 0.61 0.16 0.64 0.45 0.18 0.46 0.13 0.47 0.43 0.48 0.13 Closed center Exhaust center Pressure center SA SYA320-M5 M5 x 0.8 0.42 0.47 0.13 0.47 (0.44) 0.41 (0.37) 0.13 (0.12) 3 position 39 VA 0.50 (0.41) 0.48 (0.35) 0.15 (0.11) 0.47 0.43 0.13 44 46

Compact Slide Series MXH

8 18 21.5 46 47 20 20 23 5 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4 x M4 x 0.7 Depth 6 5 + Stroke 12 LT NS LB J LA Stroke (mm) 5 14 49 4 10 10 14 10 49 4 15 59 24 20 4 20 59 24 4 20 25 30 69 4 30 30 30 30 69 4 40 20 79 45 20 6 50 89 55 25 6 25 60 60 99 6 30 30 26 Compact Slide Series MXH Dimensions: 16 LT MXH 24 16 MXU LA LB 14 J x M4 x 0.7 Depth 9 MXS MXQ 3

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Series SYJA300 3 Port Air Operated Valve

holes) 22 SlA 16.4 10 VlA Manual override (Non-locking) M3 X 0.5 (Pilot port) 3-M3 X 0.5 (P, A, R port) 1 (Bleed port) 1.5 SlA VlA R P 30 2 27 7 A 12.7 9.2 VM/VR 2 15 Bracket 10 VH 11 Base mounted: SYJA3l4-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot style) (Mounting holes) 17 3 (For solenoid valve) M3 X 0.5 2.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Bleed port) 13

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Item CH2 measured value: 16-bit signed integer Bit offset 47 46 45 44 43 42 41 40 39 38 37 36 35 34 33 32 Item CH32 measured value: 16-bit signed integer Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item CH4 measured value: 16-bit signed integer Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Error diagnosis CH4 diagnosis CH3 diagnosis CH2 diagnosis CH1 diagnosis Reservation

NARM Series

0.05 to 0.7) Ambient and fluid temperature 23~140F (5 to 60C) (No freezing) Fluid Air Cracking pressure (Valve) psig (MPa) 3 (0.02) Construction Relief style Port size/Weight Model Porting Port size Weight lb (g) Small Size Pressure Gauge 15mm Reverse flow function available on the standard model IN OUT Total weight (n: stations) Regulator (Except manifold) (80 X n) + 23 Common IN 1 8 1 8 .13