HRX-OM-T002

Required facility water system Table 3-3 Heat radiation Model Heat radiation kW Facility water specifications HRS090-W-20/40/46 Approx. 17 Refer to [9.1 Specifications].

Series LQ3 High Purity Fluororesin Fitting

M L K J H E t W1 W2 M 14 20 25 29 37 49 58 69 89 100 117 136 14.5 20.5 24.5 30.5 36.5 48.5 6 7 7 9 9 10 11 16 21 24 32 41 10 17 22.5 24.5 27 30 16 21 26 32 41 50 17 24 28 36 43 55 8 8 8 8 13 13 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3P1A LQ3P2A LQ3P3A LQ3P4A LQ3P5A LQ3P6A 1/4 (E) (E) L Panel Aperture (K) Straight Union : LQ3U (mm) Inch Size H Model Tubing O.D.

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

Air Pilot Operated

:lar r'll TO ORDER FON FIELD REPLACEMENT Kit Numtbr Comprising of SPA OlOO itxt a3l-17 (^S-s"tzo1 TT I I t l l l E H 1 #AXT 392 Speed Control Btock. 1 *AXT 335-12'2 Gasket. 2 #NXT 333-17 Hotd Down Botrs (#8.32 x 1 7t [ux] 'dJmfo rO OFDEA AS PAFT OF VAIVE'}IANIFOLD ASS'Y ADD Sutlix "M" to part numbr.

Air Pilot Operated Series NVSA

:lar r'll TO ORDER FON FIELD REPLACEMENT Kit Numtbr Comprising of SPA OlOO itxt a3l-17 (^S-s"tzo1 TT I I t l l l E H 1 #AXT 392 Speed Control Btock. 1 *AXT 335-12'2 Gasket. 2 #NXT 333-17 Hotd Down Botrs (#8.32 x 1 7t [ux] 'dJmfo rO OFDEA AS PAFT OF VAIVE'}IANIFOLD ASS'Y ADD Sutlix "M" to part numbr.

13

19.95 99.5 54 39 14 4.2 17 19.95 116.5 58.5 41 17 4.2 19 ZH15DS-02-03-03 22.45 116.5 58.5 41 17 4.2 19 ZH15DL-02-03-03 22.45 (Mounting hole) Model I J K L M N O P Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-

IP8001 Series

Mode button 1s Set button 1s or Mode button 1s Set button 1s Fig. 41-1 No.IP8S-OM09 57 Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 41-2 Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 41-3 Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant

155

17 17 17 17 17 17 17 29.5 27.7 41.3 31.2 40.1 38.4 45.6 43.9 17 17 19 19 24 24 27 27 14 14 17 17 22 22 26 26 D H2 H1 L2 L1 Nozzle with Male Thread / KN (mm) Model Nozzle diameter D Connection size L1 A With across flats H1 Connection thread KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04-600 KN-R06-600 KN-R06-800 KN-R10-800 6 4 6 4 6 6 8 8 21.1 25.4 23.7 33.6 31.8 40.1 38 52.3 27 32 30

•

BT-IS 10 10 BT-12 BT12 10 ;J;lA5EJ1A60 17 17 , . ' 0A59W .. 17 0 0 I: C" iD :IJ 0 a. ~ [,lrH5901Y690 I' D-V7P/Y7PV ; ", BSI-1 60 8S'-140 881-125 7 13 12 , D-Y7f:jWIY7OWV .' . 0Y7BAL ' .. 0Z7IJIZ80 D-Y591J1Y690 0.V7P/Y7Pi/ . 8$4125 !

High Purity Fluoropolymer

Model E M H W L 1/8 LQ1U11 LQ1U12 LQ1U21 LQ1U22 LQ1U31 LQ1U32 LQ1U33 LQ1U41 LQ1U42 LQ1U51 LQ1U52 LQ1U61 LQ1U62 4 3 6 4 10 8 6 12 10 19 12 25 19 10 11.5 29 10 Class 1 14 41 14 15 16.5 H W M 17 17 20 54 23 1/4 28 21 21 24 63 (E) (E) Class 2 to 5 77 26 26 29 39 L 102 39.5 36 49 36 M Inch sizes H Applicable tubing O.D.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

19.95 99.5 54 39 14 4.2 17 19.95 116.5 58.5 41 17 4.2 19 ZH15DS-02-03-03 22.45 116.5 58.5 41 17 4.2 19 ZH15DL-02-03-03 22.45 (Mounting hole) Model I J K L M N O P Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-

JXCx-OMU0004

CN . 17 5.1 . 17 5.2 . 17 (1) . 17 (2) . 18 (3) . 18 6.

CV/MVGQ

85 85.5 41 93 91 93.5 91 41 80 59 55.5 50 54 50 51 48.5 93.5 94 48.5 101.5 107 102 107 49.5 100 69.5 63 57.5 62 57.5 59 56 104 104 56 112 121 112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 11 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 13 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 20 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 19 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 14 Stations, A B Port Size: M5 (Base Mounted M5X0.8)