LJ1H

mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB Scale: 15% 10 6 Work piece mounting reference plane LJ1 LG1 LX LC6D/LC6C Switches LC1 80 5H10 depth 8 8-M5

CQM

NN OA Bore size (mm) 32 40 50 V W HB IA IB J KA KB L M N OB RA RB S U Z , TN, TF , TN, TF 38 10 5 60 58.5 4.5 28 19.8 7 34 5.5 9 7 58.5 31.5 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66 35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 8 80 41 14 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7-5-8 9 Series CQM Compact

Series MLGP

51.5 49.5 57 80 40 43 71.5 45 74 41 70 49.5 84 48 78.5 61 84.5 100 50 53 83 55 85.5 51 81.5 60 95 58 90 71 96.5 11-4.

Slider Type Ball Screw Drive/11-LEFS Series

) [39] 39 [(41)] Stroke (2.4) 7 65 [Origin] Note 4) Origin Note 3) 27 4 [2] 2 [4] 9.2 Motor cable (2 x 5) 46 6 20 33 40 Vacuum port M5 x 0.8 x 5 6.5 5.5 M4 x 0.7 thread depth 7 (F.G. terminal) Motor option: With lock Step motor Servo motor Cable length 250 (152) 15 15 65 20 20 20 24 20 Lock cable (3.5) 24 ( ) +0.025 0 3H9 depth 3 n x 3.5 4 34 100 D x 100 (= E) 8 F B Note 1) When mounting

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

Type: ZSE2Grommet type: ZSE2-15 01 T1 Connector type: ZSE2-15C 01 T1 Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 Indicator light (Red) Indicator light (Red) 20 20 600 (3000) 600 (3000) 48.5 41 39 39 3.5 3.5 8.5 8.5 2 x 3.5 Mounting hole Piping port M5 x 0.8 depth 5 2 x 3.5 Mounting hole 01: R 1/8 T1: NPTF 1/8 Piping port M5 x 0.8 depth 5 13 13 01: R 1/8 T1: NPTF

High Vacuum L Type Valve

XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.

Compact Guide Cylinder

x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Model Bolt Proper tightening torque N.m L1 MGZ/MGZR20 MGZ/MGZR25 MGZ/MGZR32 MGZ/MGZR40 MGZ/MGZR50 MGZ/MGZR63 MGZ/MGZR80 L2 11 11 16 16 16 16 20 10 10 12 12 15 15 23 2.5 to 3.1 2.5 to 3.1 4.1 to 6.4 4.1 to 6.4 8.8 to 13.8 8.8 to 13.8 30.4 to 47.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 L2 L1 2.

MU

X 0.8Depth11 M6 X 1Depth11 AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8Depth7.5 M6 X 1Depth12 M8 X 1.25Depth13 M8 X 1.25Depth11 M10 X 1.5Depth15 M10 X 1.5Depth14.5 M12 X 1.75Depth18 M12 X 1.75Depth15 Rod end female thread (mm) (mm) P M5 X 0.8 Rc(PT)1 /8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 MM M6 X 1Depth12 NY 26 28 36 42 46 H 14 14 15 18 21 NX 6 6.5 8 10

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Thread type 20 25 32 40 50 63 80 M5 x 0.8 Rc NPT Stroke (mm) Refer to Standard Stroke on page 8-25-21.

Digital Pressure Switch

Otherwise, chattering will occur. 2: If analogue voltage output is selected, the analogue current output cannot be selected. 3: If analogue current output is selected, the analogue voltage output cannot be selected. -61No.PS-OMM0007-I Piping specifications Model No. 01 N01 W1 WF1 M5 C4 C6 NPT1/8 R1/8 Rc1/8 G1/8 M50.8 One-touch fitting 4 One-touch fitting 6 (with M5 female thread) (with M5

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

MHC2

When auto switches are used, through hole mounting is not available. 4-M3 x 0.5 (Thread for mounting attachment) Adjusting needle for finger speed M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger closing port) 12-8-4 5 Angular Style Air Gripper Standard Type Series MHC2 Double Acting: Size 10, 16, 20, 25 MHC2-20 2-M5 x 0.8 thread depth 8 (Mounting thread) MHZ MHF 4-M5 x 0.8 thread depth 10

MHC2

When auto switches are used, through hole mounting is not available. 4-M3 x 0.5 (Thread for mounting attachment) Adjusting needle for finger speed M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger closing port) 12-8-4 5 Angular Style Air Gripper Standard Type Series MHC2 Double Acting: Size 10, 16, 20, 25 MHC2-20 2-M5 x 0.8 thread depth 8 (Mounting thread) MHZ MHF 4-M5 x 0.8 thread depth 10

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

and Japanese NPT1/4 (M5 female threaded) N02 Option 1 G1/4 (M5 female threaded) Rc1/8 URJ1/4 TSJ1/4 Note) Fixed unit ISE80H: MPa Others : MPa, kPa With unit display switching function Fixed SI unit Note) F02 Nil C01 A2 B2 M P Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) Nil None 02L With bracket NPT1/4 (M5 female threaded) N02L A C01L A2L B2L Rc1/8 ZS-24-A ZS-35-A URJ1

Rotary Table

M5. 2 180 Standard tyoe Number of auto switches 3 90 4 180 2pcs.

Digital Pressure Switch

M5 M5R 01 N01 Port size M50.8 M50.8 R1/8 NPT1/8 M5(0.8) M5(0.8) Wetted parts Pressure sensing part Silicone Material of Piping port C3602 (Electro less nickel plating) O-ring: HNBR With lead wire and connector attached (5-core, 2 m) 55 g 63 g Weight Without lead wire and connector 15 g 23 g Analogue output Voltage output Range Rated pressure range A B C Vacuum 0.0 to -101.0 kPa 0 -101 kPa

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5