VZ3000

Stations Black White 8 station (18 stations) A side coil B side coil Black White 9 station (19 stations) A side coil Note) When there are 10 or fewer manifold block assemblies, and more are added to make a total of 11 or more, a supply/exhaust block assembly must also be added.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(Rc, NPT, NPTF) 5 5 Hexagon width across flats 19 25 G 28 Width across flats 24 28 3 x M3 x 0.5 3 x M3 x 0.5 G 10 E 10 Width across flats 24 ZA F F E ZX Y Y 6 3 ZR 18 18 C C ZM A A B D B D ZMA Dimensions A Dimensions A ZQ B C D E F G Y Model B C D E F G Y Model ZPT40HB-B 8 ZPT40HB-A14 ZH 40 41 28 43 20.5 32 62 13 M8 x 1.25 40 41 28 43 20.5 32 13 ZPT50HB-A14 -B10 50 52 36 54 24 35.5 65.5

RB/RBL/RBQ

With cap SR 6.8 8.7 12 18 25 B 6.5 9 12.5 16 21 A MM h M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 B 4 4 6 6 6 C 12 14 19 27 36 MM B M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 C h1 h2 d f RBC08C RBC10C RBC14C RBC20C RBC27C RB08J RB10J RB14J RB20J RB27J RB08S RB10S RB14S RB20S RB27S 6 7.5 10 20 25 12 14 19 27 36 13.9 16.2 21.9 31.2 41.6 6.5 8 11 16 22 23 23 31 40 51 9 11 15 23 32

Modular F.R.L. Unit

E Octagon Port size C T-interface B Center of F.R.L. body D A C 12 D 14 E 8 B 19 A 11 Port size M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 Model Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 Applicable model AC10, AC10B AC20, AC20B AC20C AC25, AC25B AC25C, AC30 AC30B, AC30C AC40, AC40B AC40C 32 28 19 42 15 39 30 19 53 15 44 36 24 62 19 Caution

RB/RBL/RBQ

With cap SR 6.8 8.7 12 18 25 B 6.5 9 12.5 16 21 A MM h M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 B 4 4 6 6 6 C 12 14 19 27 36 MM B M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 C h1 h2 d f RBC08C RBC10C RBC14C RBC20C RBC27C RB08J RB10J RB14J RB20J RB27J RB08S RB10S RB14S RB20S RB27S 6 7.5 10 20 25 12 14 19 27 36 13.9 16.2 21.9 31.2 41.6 6.5 8 11 16 22 23 23 31 40 51 9 11 15 23 32

Rotary One-touch Fittings Manifold Series KM

-06-08-01S-3 33 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5 76.5 77 78 41 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 44 45 67 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 10 8 KM14-08-10-02S-3 48 88 89 90.5 94 95 98.5 19 71 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19

HRL

Laser optical system Laser oscillator Optical system CH2 Oscillator CH1 Oscillator Optical system CH1 CH2 Cooling capacity [kW] 9, 19, 26 1 (Max. 1.5) Temperature stability [C] 0.1 0.5 Set temperature range [C] 15 to 25 20 to 40*1 *1 CH2 CH1 Space saving, Reduced wiring Dual thermo-chiller Thermo-chiller 1 unit 2 units Footprint 22% reduction To oscillator To optical system CH2 To optical

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

SZ3000

solenoids possible) Specified layout (Up to 9 solenoids possible) 19 09 19 stations 9 stations Note 1) Double wiring specifications: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.

NAAMS Standards Compliant

+0.028 +0.013 D 8F7 through +0.028 +0.013 D E E 200.03 F G F 10 200.03 10 G 300.025 300.025 11 through H 300.025 300.025 I 11 through H 250.05 J 250.05 I M6 x 1.0 45 R45 500.05 6.5 18 M6 x 1.0 10 750.05 3 R25 10 R6 1 1 6.5 R25 19 18 19 R25 19 [mm] R6 19 [mm] Model NAAMS code A B C D E F G H I Weight [kg] CKZ-50A010 ACA216M 80.0 65.0 50.0 90.0 56.0 0.5 CKZ-50A011 ACA217M 110.0 95.0 80.0 65.0

90

Release valve 20 19 4 Supply valve Supply valve 17 18 17 5 stations 5 Release valve 5 stations Release valve 18 Supply valve Supply valve 16 15 6 6 stations Release valve 6 stations Release valve 19 14 13 Supply valve 7 Supply valve 20 7 stations Release valve 7 stations Release valve 12 11 8 Supply valve Supply valve 21 8 stations Release valve 9 10 8 stations Release valve 9 22 Supply

MLGP

= 100mm, V = 400m/s MLGPL20, 25 MLGPL20, 25 4 4 25 25 25 25 25 25 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 20 20 20 20 20 1 10 30 31 100 101 1 10 30 31 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 20 20 63 50 50, 63 50, 63 Load weight m (kg) 50, 63 10 10 50, 63 40 40 40 40 50, 63 40 40 32 32 32 32 32 32 4 10 50 51 100 101 4 10 50 51 100 101

MLGP

= 100mm, V = 400m/s MLGPL20, 25 MLGPL20, 25 4 4 25 25 25 25 25 25 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 20 20 20 20 20 1 10 30 31 100 101 1 10 30 31 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 20 20 63 50 50, 63 50, 63 Load weight m (kg) 50, 63 10 10 50, 63 40 40 40 40 50, 63 40 40 32 32 32 32 32 32 4 10 50 51 100 101 4 10 50 51 100 101

MLGP

5 50 10 20 30 40 50 Transfer speed: (m/min) 9-11-18 18 Compact Guide Cylinder with Lock Series MLGP CL CL1 MLGC CNG MNB CNA CNS CLS CLQ MLGP RLQ MLU ML1C D-X 20Data 9-11-19 19 Compact Guide Cylinder with Lock Series MLGP 20, 25, 32, 40, 50, 63, 80, 100 How to Order M F 32 50 Y7BW MLGP Number of auto switches Compact guide cylinder with lock Nil S n 2 pcs. 1 pc. n pcs.

MLGP

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA CNS CLS CLQ MLGP RLQ MLU ML1C D-X 20Data 9-11-19 19 Compact Guide Cylinder with Lock Series MLGP 20, 25, 32, 40, 50, 63, 80, 100 How to Order M F 32 50 Y7BW MLGP Number of auto switches Compact guide cylinder with lock Nil S n 2 pcs. 1 pc. n pcs.

Compact Cylinder with Air Cushion Series RQ

K ( across flats) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB-08 80 18 depth 12 52 13 38 11 16 d1 d2 YB-10 100 21 depth 14 62 17 50 14 19 L UT Mass (g) Bore size (mm) RS W T1 V T2 Part no. C UA DMaterial: Chrome molybdenum steel (Nickel plated) YB-03 32, 40 9 50 80 18 6.5 10 Part no.

RHC

D-X 20Data 10-6-19

High Power Cylinder Series RHC

Applicable bore size (mm) M22 x 1.5 M8 x 1.25 SOR-20 NT-02 20 20 5 13 8 30 26 15 12.5 26 M24 x 1.5 M10 x 1.25 SOR-25 NT-03 25 25/32 6 17 8 36.9 32 19.6 16.5 32 M30 x 1.5 M14 x 1.5 SOR-32 NT-04 32 40 8 22 9 43.9 38 25.4 21.0 38 M33 x 2.0 M18 x 1.5 SOR-40 NT-05 40 50/63 11 27 11 47.3 41 31 26 41 M22 x 1.5 NT-08 80 13 32 37 31 M26 x 1.5 NT-10 100 16 41 47.3 39 1210 High Power Cylinder Series

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19 27 27 32 41 0 0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 20 25 32 40 50 63 80 100 Up to 200 201 to 1500 18 22 22 30 35 35 40 40 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 23 23 20 20 20 163 173 175 187 218 218 264

3

MK MK Body option Bore size Nil N Standard (Female thread) 12 16 20 25 32 40 50 63 12 mm Port thread type MK2T With arm 16 mm M thread 12 to 25 Arms are shipped together, (but not assembled). 20 mm Nil CK1 Rc NPT G 25 mm TN TF 32 to 63 32 mm Rotary direction (Unclamp Clamp) CLK2 40 mm Port side 50 mm Counterclockwise R L Clockwise CLKG During unclamping (Extension end) R type (Clockwise