Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

Digital Gap Checker

When the product is mounted using the bracket, fix with M5 screws (2 pcs.) or equivalent. The Bracket thickness is approx. 1.6 mm.

IC

VBA VE VY1 SW round head Phillips screws G M3 x 8 Panel PPA Gasket A AL Display protective cover Tighten screws by 1/4 to 1/2 turn after the heads are flush with the panel. 14-8-41

PFxx-OMK0003CN

PF-OMK0003CN-E / / PFMV5## 2 10 12 13 14 14 16 17 18 19 19 20 22 -1No.

XM, XY

FKM (Standard seal material) Principle materials Pilot pressure (MPa)(G) 0.3 to 0.6 0.4 to 0.6 Pilot port size M5 Rc 1/8 XMC 6.30 0.62 1.40 (1.76) 2.10 3.80 (5.16) 0.36 (0.40) Weight (kg) Note 2) XYC 7.80 0.67 1.42 2.50 4.50 Note 1) Conductance is the value for the molecular flow of an elbow having the same dimensions.

IR1000/2000/3000

(set of above items 1 through 14) KT-IR2120 KT-IR2000 KT-IR3000 Note 1) IR1000 uses P36201020-1 and IR1010/1020 use P36201020. Note 2) Use mini-flick type.

AN

.: AN200-N02) AN600-10 270 1 1 1 AN700-12 440 1 4 AN800-14 590 1 2 AN900-20 960 2 Note) NPT thread is also available. Specify N after ANm00-.

PSE530/200

Specifications Model PSE530-M5 PSE531-M5 101 to 101 kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1 MPa 0 to 101 kPa 0 to 101 kPa Proof pressure 1.5 MPa 500kPa Air/Non-corrosive gas Fluid 12 to 24 VDC (Ripple 10% or less) Power supply voltage Current consumption 15 mA or less Output specification Analog output (1 to 5 V, Output impedance: Approx. 1 k) Accuracy 2% F .S. or less (Within

VER2000/4000

6: VER4001 (Outer pilot) 14-9-21 6 Series VER2000/4000 Dimensions VER2000-: With sub-plate With flow control interface With B port regulator Hex. socket head cap screw M5 x 45 With SW (Max. 45) (Max. 45) (Cable: 6.8 to 9.6) Pressure gauge Interface regulator Flow control interface Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

PSxx-OMG0005CN

) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) ripple -8No.PS-OMG0005CN-E 20 mm A PSE56 PSE56-28 1 (DC+) (LINE(+)) 2 3 (DC-) 4 (IN15 V) (LINE(-)

With Factory Installed

~ ( 0 '" co; Port size 1/8' 1/4 Gauge '" U'" ~N Drain 45 40 M5 X O .8 With differential pressure type auto drain Optional Specification yJ Metal bowl 45 IN-OUT reversal mounting (-R) specification 9 Filter I Regulator Series AW it (mm) AW3001 .

The KJ series has been discontinued, please see the New KQ2 series , Miniature, One-touch fitting , Inch threads , Tube OD: 1/8, 5/32, 1/4 , Maximum operating pressure: 1.0MPa , Material: nylon, soft nylon, polyurethane, FITTING *LQA, CONNECTORS, KJ MINI ONE TOUCH, GE, KJ 14, .01012 lb

PF3W7.eng

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Rev.A Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009-2011 SMC Corporation All Rights Reserved 4. Press the button to finish the setting.

PF3W5.eng

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Refer to the outline dimension drawing for mounting hole size. Refer to the product catalogue or SMC website (URL http://www.smcworld.com) for more detailed information.

PF3W7x-X445.eng

Fire, explosion, damage or corrosion can result. 3/4 32 mm Selects the switch output type for fluid temperature from either hysteresis or window comparator mode.

The KJ series has been discontinued, please see the New KQ2 series , Miniature, One-touch fitting , Inch threads , Tube OD: 1/8, 5/32, 1/4 , Maximum operating pressure: 1.0MPa , Material: nylon, soft nylon, polyurethane, FITTING, MALE CONN SPL, CONNECTORS, KJ MINI ONE TOUCH, GA, KJ 14, .01391 lb

The KJ series has been discontinued, please see the New KQ2 series , Miniature, One-touch fitting , Inch threads , Tube OD: 1/8, 5/32, 1/4 , Maximum operating pressure: 1.0MPa , Material: nylon, soft nylon, polyurethane, FITTING, MALE ELBOW, CONNECTORS, KJ MINI ONE TOUCH, GG, KJ 14, .02059 lb

The KJ series has been discontinued, please see the New KQ2 series , Miniature, One-touch fitting , Inch threads , Tube OD: 1/8, 5/32, 1/4 , Maximum operating pressure: 1.0MPa , Material: nylon, soft nylon, polyurethane, FITTING, CONNECTORS, KJ MINI ONE TOUCH, GA, KJ 14, .01254 lb

Air Cylinder RSQ Series Stopper Cylinder

Example) Boll M5 x 65L frzr,r 4 bolts Diagram 1 D agram 2 Lever (with shock absober) Roller/round bar/non-rotaling Mounling bolt 50 40 30 25 20 15 ' 2 0 E 6 6 B r n 10 5 1 0 2 0 Load speed v (m/m n) Lateral load and operating pressure at Flush piping thoroughly beiore connection in orderlo preventdustorchipsf rom entedng the cylinder. Do not mark or damage lhe piston rod.

SY3000-OMH0002

No.SY3000-OMH0002 () (E) () () (PE) 15 No.SY3000-OMH0002 No. 1(ISO VG 32) (R) E 16 No.SY3000-OMH0002