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Fan Type Ionizer IZF21/31 Series RoHS How to Order IZF 21 B Air suction side lter Model Nil None U With lter1 Symbol Max. air ow 21 1.8 m3/min 31 4.4 m3/min 1: Filter + Filter holder Automatic cleaning unit, Louver (Refer to page 12 for detail.)

Mounting screw(M3) Tightening torgue 0.5 to 0.7Nm A DIN rail mount bracket fig. 3 When setting to DIN rail, place A of fig. 3 into DIN rail. While pushing it, fix it by the clamp of screw in fig. 4. Inadequate pushing may cause falling of parts.

Spanner nominal size: 7 Tightening torque: 0.5+/-0.05 N m Product Possible to apply spanner (7) Element Assembly -31- Applicable model Work category Tool Criteria Procedure AWD30 AWD40 Disassembly 1) Remove the bowl assembly referring to the section [11-2. Bowl Assembly Replacement] (P29-30).

Proper tightening torque M1.4 : 0.06Nm M2 : 0.16Nm M3 : 0.8Nm 1. Leakage between valve and base. (Base mounted type) Leakage between body and PE plate.

Display (PF2D30/31) 40 Sensort 15 Brown 6 2 Analog output Switch output or Pluse output Main circuit Main circuit Main circuit Main circuit 8 4 Load + 12 to 24VDC White 7 3 Black A 62 52 42 5 1 Blue Model A PF2D5--1 PF2D520 12.7 PF2D504 4-4.5 9.52 Display (PF2D30/31) Sensor Brown 52 1 2 6 Analog output Switch output or Pluse output 4 8 Load + 12 to 24VDC White 3 7 Black 1 5 Blue 18 PF2D5

XLG/XLGV (O-ring seal, Double acting) Low gas entrainment with employment of O-ring seal system. 2 High Vacuum Angle Valve Flange size Options Application Switch Heater Indicator Leakage Pa m3/sec Valve type Operating pressure Pa Service life (Million cycles) Shaft seal system Models Actuation High temp. specification Internal External 16 25 40 50 63 80 XLA Single acting (N.C.)

Lead wire and M12 connector (31) (24) (45) Brown Cable Specifications (3000) (30) White Conductor Nominal cross section area AWG21 External diameter Approx. 0.9 mm 3: Blue 4: Black Blue Insulator Material Non-lead heat resistant PVC Pin no.

Terminal cover 2 (, +) 2 (, +) Round head combination screw M3 Tightening torque 0.5 to 0.6 Nm With surge voltage suppressor Without electrical option A DIN terminal, Conduit terminal Varistor + Mark Mark 2 1 + 1 (+, ) A SOL.

REA REC 32, 50, 63, 80 20 RHC MTS Guide rod CC Mounting Set screw (M3) Caution qDo not apply rotational torque to the cylinder rod. Install so that the cylinder's contact surface will be parallel to the pallet's contact surface to prevent rotational torque from being applied on the cylinder rod.

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Symbol M5 01 02 03 04 06 Symbol 23 04 06 08 10 12 16 Symbol 50 60 65 80 85 110 167 Series KK Flow Characteristics Air (0 to 1 MPa) Water (0 to 0.4 MPa) KK2 KK2 0.007 0.50 Series KK2 (KK2S-M5M + KK2P-M5M) Series KK2 (KK2S-M5M + KK2P-M5M) 0.45 0.006 0.40 0.005 0.35 Flow rate m3/min (ANR) Flow rate m3/min Flow rate m3/min 0.30 0.004 0.25 0.003 0.20

AS2001F-03 AS2001F-06 13 28.7 33.7 6.3 44.8 11.6 6 13.5 11.8 18 28.6 33.6 6.2 50 11.4 16.5 3/16" AS2001F-05 AS2051F-06 26 30.2 35.2 6.7 53.2 12.8 6 17 14.8 21 29.5 34.5 7.1 52.2 13.2 17 1/4" AS2001F-07 AS2051F-08 31 31.5 36.5 8.1 59.8 15.2 8 18 24 29.6 34.6 6.2 52.2 11.4 16.5 3/16" AS2051F-05 AS3001F-06 18 33.3 38.3 7.4 59 12.8 6 17 14.8 26 30.5 35.5 7.1 54.4 13.2 17 1/4" AS2051F-07 AS3001F

For International inquiries: www.smcworld.com Pressure relief Spacer with bracket P/N Applicable air Interface P/N 3-port valve preparation equipment Y200 Y300 Y400 Y500 Y600 Y200T Y300T Y400T Y500T Y600T VHS20 VHS30 VHS40 AC20 AC25, AC30 AC40 AC40-06 VHS40-06 Note) AC50, AC60 VHS50 Note) Although connection to AC60 is possible, the flow rate may decrease due to the mounting position. 2015

Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

A 4(A) port 2(B) port 14 12 1 5 3 4 2 30 45 24.6 A B 2-5.6 Mounting hole Manual override 38 48 B A 14 5 3 1 12 30 45 2-5.6 Mounting hole Manual override 14.5 27 30.5 32 41.5 91.5 129 G1/2 Electrical entry 79 PE X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5 R2 R1 P 15.5 Rc 1/8 External pilot port 19.5 (21) 19.5 (21) Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4, 3/8 31 G1/2 31

15 31 100 26 depth 17.5 132 106 26 56 50 M39 x 4 45 21 106 17 146 3/8 36 15 36 Note) Body dimensions are the same with or without auto switches.

A59W Yes F59 3 wire (NPN) IC circuit 5V, 12V 24V F5P 3 wire (PNP) 100V, 200V J51 2 wire 12V J59 Auto switch mounting brackets/Part Nos. 3 wire (NPN) F59W IC circuit 5V, 12V Diagnostic indicator (2 color) Relay PLC Mounting bracket part no. 32, 40 BT-03 50, 63 BT-05 80, 100 Applicable bore size (mm) 3 wire (PNP) F5PW Yes Grommet J59W BT-06 12V 24V 2 wire Improved water resistance (2 color

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

M3 screw is used for the connection part. Make sure to use round crimped terminal.

Applicable shaft types: S, W, Y X = Q1 = M L1 = L2 = L1 Q2 = M Q1 [mm] [mm] Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 [

It is calculated using the following formula: 1 x 105 Kv = Q (8) P 1000 Kv : Flow coefficient [m3/h] Q : Flow rate [m3/h] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the practical units. Also, the flow rate characteristics are shown in Graph (2).