3 Port Solenoid Valve Rubber Seal Series SY100 1

Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

VVXA21/22

Tightness of Valve (Leak rate) 0" " " $'" ( 2 A NBR, FKM, EPDM )* +, " $ % 1 % 1 $ " /3 $'" ( , " , " # Pilot Pressure 4 " 4 " VXA21 VXA22 4 $ " < . q B 6 "5 !" $6" " 6 " " " w 0C4,D 4 e B 6 !"

Series SY100 3 Port Solenoid Valve Rubber Seal

SY114/SY124, SY114A/SY124A only. 2.1-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) 1 (P) q y e r w i SY SYJ VK VZ VT VT VP A R P o u t !0 !1 VG VP VQ VQZ Part No.

Series VS

K G M12 CONNECTOR (OPTIONAL) L 1 5 3 M M H SIZE 2 1/2 SIZE 3 3/4 2 PORTS EA, EB PORTS N N ALL DIMENSIONS ARE IN MILLIMETERS R S T EA EB P SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 P PORT Q P O * 3/8 14.5 1/2 16 3/4 18.5 A B C D E F G H I J 29 8.5 ** 22 * 28 48.5 36 32.5 52 32.5 47.5 SIZE 2 SIZE 3 22 27 47 45 40 65 40 71 SIZE 3 SIZE 2 K L M N O P Q R S 41 39 T 57 65 19 17.5 15.5 27 187.5 174.5

3 Port Solenoid Valve Rubber Seal Series SY100

SY1 4, SY1 4A only 1 2 1 2 4-3-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

3 Position Cylinder Series RZQ

GR-L-010 (10 g) D-X Individual -X 1225 Series RZQ Dimensions Basic style (Double end tapped): RZQA 3 x P (Port size: Rc, NPT, G) FA Q FB H effective thread depth C G I D E M K Z a a A + Full stroke L B + Full stroke M K J E W T RA 4 x O1 effective thread depth RB 4 x O1 Section a-a Basic style (Through-hole): RZQB 32, 40 Washer 2 x RR 2 x RH Flat washer: 2 positions (Included) b 2 x N 2 x

Turntable Cylinder Series MGT

XAH7 XC XL (mm) X X0.02 a b c d e Bore size (mm) XX section detail drawing 63 80 100 11 17.8 10 7 18.5 13.3 20.3 12 8 22.5 2-R3 15.3 23.3 13.5 10 30 8 6+0.05 0 6 WB Z WA XX section T groove dimensions QQ section detail drawing Notch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counter bore depth OL B-NN depth NL XX section Z WA Q 45 RA X0.02 RB RC T VB U

AMX-OM-F005-C

Ref erence t abl e product i on no. show i ng product i on m ont h and year of a f i l t er. LX2007. 10 SYM BO L J K L M N o P Q R S T U Year 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016 SYM BO L o P Q R S T U V W X y Z M ont h J an Feb M ar Apr M ay J un J ul Aug Sep O ct N ov D ec 4-

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

0 -0.1 L Cylinder tube outer circumference: TC Hard chrome plated + special treatment WP X F GW GP 4-LD D QW PW 2 x 4-MM thread depth M W K G G Q + Stroke Z + Stroke (mm) Model B C CB D F G GP GW H HA HC HP HB HT K J x E A 10.5 181. 16.6 181. 5 33 31.5 32 30 171. 31 171. 2 4.2 171. 14 M5 x 0.8 x 7 12-CY3R15 19.5 19.5 21.6 191. 6 39 37.5 39 36 211. 38 241. 3 5.2 241. 11 M6 x 1 x 8 12-CY3R20

5 Port Solenoid Valve Series VQZ1000/2000/3000

SZ 75 VP4 39.5 S0700 VQ VQ4 Individual SUP spacer VVQZ1000-P-5-M5 (-Q) (for VQZ1000) VVQZ2000-P-5-01 (-Q) (for VQZ2000) VVQZ3000-P-5-02 (-Q) (for VQZ3000) VQ5 + Rc1/8:VQZ2000 M5:VQZ1000 VQC Rc1/4:VQZ3000 VQZ D Supply port can be installed individually by mounting an individual supply spacer onto the manifold block.

Fieldbus system IO-Link Master Unit

IOL_Autostart DI_C/Q Digital input only. DO_C/Q Digital output only. -23No.EX-OMY0026 IO-Link master unit parameters (continued) No.

CV/MVGQ

CM-T020B 10-15-34 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVM3 Construction Spring return RE A B REC CX CY MQQ M Spring extend RHC MK(2) RS Q G Built-in One-touch fitting RS H A RZQ MI W S CEP1 CE1 CE2 DIN terminal ML2B Component Parts C J G5-S Note Material No. Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Series KV2 Fittings

Union 90 Elbow KV2L_ _-00 D2 D1 Applicable Tube M L Q D1 D2 M L App. Tube OD (inch) Q M Min. Flow Dia.

HEC-OM-S019

B Display/Operation panel G RemoteAlarm output connector D Compressed air INOUT I Temperature sensor connector D C Heat radiating air suction port H Communication connector D A Power switch F ACDC connector C E Power connector 6 Outline Dimensions (mm) Controller Heat exchanger G H I 8 Maintenance 7 Key Parts C E F A C B

MHK2

P. 12-6-17 12-6-5 5 Series MHK2 Construction Double acting Single acting @0 e !8 !7 w o Open condition Normally open !9 t y !5 !6 i u q r !1 !0 Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

w e r t y u i o !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

w e r t y u i o !

MHK2

4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly