SMC Corporation of America
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The flow rate characteristics correspond to the standard supply pressure (0.5MPa). -90 -80 -70 Vacuum pressure [kPa] -60 -50 -40 -30 -20 -10 0 0 5 10 15 20 25 Suction flow [L/min(ANR)] Flow rate characteristics Exhaust characteristics * The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.

40 60 80 100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 8-9-10 10 Air Slide Table Long Stroke Type Series MXY Construction @3 y w q r u #0 MX MTS !

42 4 4.5 3 6 M8 x 1.25 16 21 97 140 20 12.5 55.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 6 11 49 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm) (mm) E A HN (Max.)

Applicable stroke table Stroke [mm] Size 30 50 100 150 200 250 300 350 400 450 500 Manufacturable stroke range 25 15 to 400 32 20 to 500 25 - .

/100 50/100 50/100 50/100 50/100 50/100 55.0 46.0 47.0 50.0 55.0 55.0 46.9 40.2 40.9 41.9 46.9 46.9 *Dimension A reference after installation. ** Non-Standard Product, consult factory for lead time. 14 Series KV2 Bulkhead Union KV2E_ _-_ _ Mounting Plate Max.

8 to 500 30 to 1200 20 to 1000 10 to 500 401 to 500 20 to 1100 12 to 750 6 to 400 24 to 1300 16 to 950 8 to 500 30 to 1200 20 to 1000 10 to 500 501 to 600 20 to 900 20 to 540 20 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 1000 10 to 500 601 to 700 20 to 630 20 to 420 20 to 230 24 to 930 16 to 620 8 to 310 30 to 1200 20 to 900 10 to 440 Speed [mm/s] Stroke 701 to 800 20 to 550 20

Output impedance: 1 k DS: Analogue output 4 to 20 mA Max. load impedance 600 Min. load impedance: 50 NPN (1 output) + External input type PF3A7H--CS/DSMaximum applied voltage: 28 VDC Maximum load current: 80 mA Internal voltage drop 1 V max. External input: Input voltage of 0.4 V max.

12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5 39 23 14 35

Note 6) The flow rate unit is based on 0C and 101.3kPa. 2 For Air Digital Flow Switch Series PFA How to Order PFA5 Remote Type Sensor Unit 10 01 Wiring specification Flow rate range 3m lead wire with connector Without lead wire Nil N 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min Nil N F 10 50 11 21 51 Port size Thread type Size Applicable model Flow rate (l/min)

With Rod Boot Bore size (mm) e f h ZZ Stroke range (mm) l 40 50 63 80 100 20 to 500 43 11.2 59 1/4 stroke 154 20 to 600 52 11.2 66 1/4 stroke 167 20 to 600 52 11.2 66 1/4 stroke 178 Dimensions of the mounting brackets are the same as those of the standard double acting single rod type.

(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I

5% ON OFF [F 2] OUT2 36 ON OFF 50% 5% OUT1 ON OFF 50 5 -26No.PF-OMM0004-D / [F3] 42 1 [F10] 43 [F20] 47 [F22] 48 OFF [F30] 50 OFF[] [F80] 51 [] [F81] 52 OFF [F82] 53 [*] [F90] 54 OFF [F98] 55 OFF [F99] 56 OFF 30 [F10](43 ) (4 L/min ) OUT2 -27No.PF-OMM0004-D [F 1] OUT1 OUT1 1.

Hygienic Design Cylinder Round Type 20, 25, 32, 40, 50, 63, 80, 100 Series HYB How to Order 20 R 50 F HYB H7BAL 20 R 50 F HYDB With auto switch Number of auto switches With auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc. n pcs.

: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

HECR008-W HECR012-W 1 Unused BUS + 0 0 Operation temp. range 10.0 to 60.0 C (No dew condensation) 5 4 3 2 1 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 During operation or maintenance of the product, do not disable the Communication Indication temp. range -9.9 to 80.0 C 2 RXD (RD) Unused Circulating fluid temp. deg.C Circulating fluid temp. deg.C connector Temp: 10 to 35 C Humidity : 35

Port size (A port) Rated voltage Option M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil None With bracket (Not assembled) P, R port: M5 4 5 6 24 VDC 12 VDC F Thread type 7 240 VAC, 50/60 Hz 9 Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No. L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.

ANR)] Air consumption [L/min(ANR)] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 Suction flow 60 40 20 Air consumption 0 0 10 20 40 50 60 30 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-12 ZHP-12 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 100 90 80 70 60 50 40 30 20 10 0 Suction flow [L/min(ANR)] Air consumption [L/min

Specifications Model MGQAction Double acting Fluid Air Proof pressure 1.5MPa Maximum operating pressure 1.0MPa 12, 16 0.12MPa Minimum operating pressure 20 to 100 0.1MPa Ambient and fluid temperature -10 to 60o C(No freezing 12 to 63 50 to 500mm/s Piston speed 80, 100 50 to 400mm/s Cushion Rubber bumper on both ends Lubrication Not required (Non-lube) Stroke length tolerance + 1 . 5