Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) Refer to Manifold Option on page 100.

ZP

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103

Possible to transfer a workpiece at low-speed.

mm apart from the center of rotation, where the load is applied. 100 Load Arm A Displacement MSQXB10A MSQXB20A 300 400 Displacement (m) Displacement (m) 250 350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed

LEC-OM02704CN

-(A534G) CT160-3-TMH5B () LE-CSB-RA LE-CSB-RB 13 8 13 (2) LE-CSB-RA LE-CSB-RB LE-CSB-SA LE-CSB-SB MR -BK S1CBL M-A1-H MR -BK S1CBL M-A 2 H MR-BKS2CBL03M-A1-L MR -BK S2CBL 03 M-A 2 L ( ) AWG 20 B1 AWG 20 B2 . 13 9 13 13.2 (1) [W] LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] LECSC-S5 30 LECSC-S7 10 30 100 LECSC-S8 10 30 100 (2) (2) PA02 PA02 0 0 00 100W 200W / 400W 02 LEC-MR-RB-032

MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 2020, 30, 40, 50, 75, 100 125, 150, 175, 200 Data MGQ 20, 25 M L M L MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 OUT (N) IN (N) Theoretical Output (N) Bore size (mm) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Made to Order Specifications (For details, refer to

JA/JAH/JB/JS

80 100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

JA/JAH/JB/JS

6-100 8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 Without

48

Cylinder stroke [mm] Bore size Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 Port thread type Nil M thread 12 to 32 Rc 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 40 to 100 TN NPT TF G 25, 50, 100, 150, 200 Refer to page 4 for intermediate strokes.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Cylinder Speed Chart Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm 20 25 32 40 40 50 63 80 100 125 140 160 Average speed (mm/s) System 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation A 800 700 600 500 400 300

Series AK1000

40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

One-touch Fittings

Possible to use in vacuum to 100 kPa.

C95Series

d80 . %100 0 . 3 ~ "32 0. 1 8 "SO 0.58 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, SOD, 600 Allowable rotating torque "40 0.33 " 100 0.69 . ft Ibs max . . : 63 25,50,75,1 00,125,1 50 ,175,200, %50,.063 0.47 250, 300.350,400,450,500, 600 sr 25, so, 75. 100, 125. 150, 175 ,200,250, 300,350, 400, 450, 500, 600, 700 Nole 1) AbsOfbabte kinshc energy by cushIOn mechanIsm IS

CJ2X/CUX/CQSX/CQ2X/CM2X

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

CJ2X/CUX/CQSX/CQ2X/CM2X

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

Compact Guide Cylinder

Compact Guide Cylinder 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 RoHS Bore sizes 80, 100 added. Port thread types NPT, G added.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500

Precautions 1

23.5 10.5 12.5 18 68 32 185 125 36 85 97 110 135 160 25 37.5 50 75 100 23.5 10.5 12.5 18 72 32 185 125 36 85 97 110 135 160 25 37.5 50 75 100 23.5 10.5 12.5 18 72 41 102 190 125 27 46 90 115 140 165 25 37.5 50 75 100 10.5 12.5 20 77 (mm) ZZ Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 25 32 40 143 156 168 181 206 231 256 147 160 172 185 210 235

VFR

Cylinder Speed Chart Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB/CA1 Note) Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm 20 25 32 40 40 50 63 80 100 125 140 160 Average speed (mm/s) System 800 700 600 500 400 300 200 100 Perpendicular, upward actuation A Horizontal actuation VK VZ 0 800 700 600 500

Electric Actuators

400 100 to 600 100 to 800 200 to 1000 Size 16 25 32 40 Size Stroke 100 to 600 100 to 800 200 to 1000 25 32 40 CAT.NAS100-87 Slide Table Guide Rod Slider Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Belt drive Basic type (R type) Series LESHmR Symmetrical type (L type) Series LESHmL In-line motor type (D type) Series LESHmD Series LEL Size 25 Stroke 100 to 1000