LEY-OM007

23 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 20 20 34 33 35 32 31 1 21 2 22 3 23 4 24 5 25 6 26 NBR 7 27 8 POM 28 9 29 10 30 11 31 12 32 13 33 14 34 15 35 NBR 16 17 18 101 19 POM 101 20 / 16 LEY-L016 LEY-F016 LEY-D016 16 LE-D-2-1 25 LEY-L025 LEY-F025 LEY-D025 25 LE-D-2-2 32 LEY-L032 LEY-F032 LEY-D032 32 LE-D-2-3 1 2 C /P.46 7.4 /P.47 7.5 -12-

JXCx-OMU0004

P.16 6.4 I/O P.23 12. P.65 ONOFF 2.2 P.7 OFF OFF OFFLED ON STOP ON OFF 79 No.JXC-OMU0004-A 12. P.65 4. P.16 6.4 I/O P.23 3.4 P.14 3.1 P.11 CP.38 2.2 P.7 ALARM ON STOP ON OFF 10 ALARM ALARM ON ON 80 No.JXC-OMU0004-A 16.2 () 2.2 P.7 4.

LEC-OM034xx

External connection .23 5. 1 CN4: Power supply connector .23 5. 2 CN3: Bus connector .23 5. 3 CN1: CONT connector.23 5. 4 CN2: PC/TB connector.24 6. CN4: Power supply connector .25 1 - 6.1 Power supply connector.25 6.2 Power line.25 6.3 Wiring of the shutdown circuit.26 Shutdown circuit Example.28 7. CN3: Bus conecter.29 8.

Fieldbus system EtherNet/IP TM compatible SI Unit

) SI Unit (EX600-SEN3): 4 bytes occupied When Diagnostic mode 0 and byte order of analogue value (LSB-MSB) are selected. 1 Input data Output data Byte0 Lo byte DYB (Unit 1) Output 0 to 7 AXA channel 0 (Unit 0) Hi byte DYB (Unit 2) Output 0 to 7 Byte1 Byte2 Lo byte Output 0 to 7 AXA channel 1 (Unit 0) Hi byte Output 8 to 15 Byte3 SEN3 (Unit 5) Byte4 DXB (Unit 3) Input 0 to 7 Output 16 to 23

MHC2

Weight Unit: g End boss type (Symbol) Model H E M K 23 MHCA2-6 23 23 23 12-8-21 22 Angular Style Air Gripper Standard Type MHCM2-7S Size: 7 How to Order 7 MHC M 2 S Compact type Number of fingers Action 2 2 finger Single acting (Normally open) S Bore size (mm) 7 7 Specifications JIS Symbol Air 0.4 to 0.6 MPa 10 to 60C 0.02 mm 180 c.p.m.

CE

36 23 SR6 M8 x 1.25 40 18 3 23 70 36 18 7 2-M5 x 0.8 (port size) 4-M5 x 0.8 Thread depth 7.5 74 20 114 + Stroke 31 145 + Stroke 2 7 High Precision Scale Cylinder Series CEP1 4-5.5 Foot type 4 (Positioning pin hole) CEP1L20 Stroke 40 6 13.5 25 6 +0.05 +0.02 68 85 22.5 4.5 57.5 40 36 52 Front flange type CEP1F20 Stroke 4 (Positioning pin hole) 4 (Positioning pin hole) +0.05 +0.02 +0.05 +0.02

CUJ

Without auto switch 4, 6, 8, 10 Bore size (mm) M3 x 0.5 6 Port size Stroke (mm) 8 or more AS121F-M3-23 AS121F-M3-04 AS131F-M3-23 AS131F-M3-04 Note) Only applicable to the mounting position shown in Figure 1 below. Figure 1 Mounting position 1 Mounting position 2 a) Side mount b) Front mount Mounting position 3 Mounting position 4 Notes) 1.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

MHC2

Weight Unit: g End boss type (Symbol) Model H E M K 23 MHCA2-6 23 23 23 12-8-21 22 Angular Style Air Gripper Standard Type MHCM2-7S Size: 7 How to Order 7 MHC M 2 S Compact type Number of fingers Action Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 2 finger Single

KS/KX

17 23 23 29 38 56 64 82 76 93 1 8 1 4 14 8.6 8.6 4 30 31 32 37.5 38 39.5 40.5 42 1 8 15.2 17 26 6 18.5 21.6 14.9 17 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 10 18.5 22 31.5 21 30.5 25.0 22 7 24 20.9 24 34 22 8 35.1 35.1 12 Reference dimensions after R(PT) thread installation.

MHZ2/MHZJ2

18 7.6 0.02 11H9 depth 2 +0.043 0 0 -0.7 23 12 When closed 11.2 When open 15.2 16.4 0.05 37.8 6 12 2-M3 x 0.5 thread depth 6 (mounting thread) 57 M3 x 0.5 4-M2.5 x 0.45 (finger closing port) (attachment mounting thread) M3 x 0.5 (finger opening port) 5 0 -0.05 11 Auto switch mounting groove dimensions 5.7 3 9 6.2 Auto switch mounting groove 19 5 In the case of single action, the port

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking GC ID IE IF IG IH J JA 139.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 56.5 22 25 61 91.5 15.5 14.5 18 202 240 M12 51.5 110 137 18.5 23 7.5 11 30 50 5.5 5.5 Rc 1/8 Rc 1/4 43 7 15 54.2 45.5 38 45 19 23 25 30 80 100 167.5 50, 75, 100, 125,

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking GC ID IE IF IG IH J JA 139.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 56.5 22 25 61 91.5 15.5 14.5 18 202 240 M12 51.5 110 137 18.5 23 7.5 11 30 50 5.5 5.5 Rc 1/8 Rc 1/4 43 7 15 54.2 45.5 38 45 19 23 25 30 80 100 167.5 50, 75, 100, 125,

MQQ

Contact SMC for further details. 23 Series MQQ/MQM Specific Product Precautions 3 Be sure to read before handling. See pages 19 through 21 for safety instructions and actuator precautions.

MXW

29 37 49 63 L1 A1 MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 Mr My Mp W L2 B2 W W C2: Moment center position distance compensation amount My L1 A2 L3 C2 (mm) B2: Moment center position distance compensation amount MXW8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 A2: Moment center position distance compensation amount Mr (mm) (mm) W Mp MXW8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 MXW8 MXW12 MXW16

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

V100 SY SYJ Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 Dimensions VK L (mm) A Applicable fittings fitting d Model A L D VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 16 16 18 20.5

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

Air Slide Table Series MXW

cylinder is stopped L2 B1 Pitch moment Yaw moment Roll moment A1: Moment center position distance compensation amount (mm) Mp = W x 9.8 (L1 + A) My = W x 9.8 (L2 + B) Mr = W x 9.8 (L3 + C) B1: Moment center position distance compensation amount (mm) L3 C1 C1: Moment center position distance compensation amount (mm) MXW8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 MXW8 MXW12 MXW16 MXW20 MXW25 23

XL

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

%silltr

23 23 23 24 24 24 24 26 26 27 28 55 55 J5 57 - C o T E N T S T A B L E o F Load Fatio Speed Control Air Flow and Consumption Rotary Actuators Rack and Pinion Type Vane Type Rotary Actuators: Sizing Rotary Actuato|s Torque and Inertia Spcial Actuators Locking Cylinder Rodless rylinders Wilh magnetic coupling, unguided Guided types, with magnetic coupling Guided, with mechanical coupling Slide