Digital Flow Switch (Integrated display type) ( compatible)

setting 50 F10 Sub screen setting 51 F30 Accumulated flow value hold setting 57 F80 Display OFF mode setting 58 F81 Setting of security code 59 F90 Setting of all functions 61 F98 Output check 62 F99 Reset to default settings 65 Other Settings 66 Maintenance 70 IO-Link Specifications 70 Outline of IO-Link functions 70 Communication specifications 70 Process data 71 IO-Link parameter setting 75

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

50 n 1 0 8 6 4 2 50 67.5 <69.5> L1 8 67.5 <69.5> 64.9 L2 4 x 9 (for M8 mounting) 3 port valve 2 port valve 64.9 50 8 10.5 Leakage detection port Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) 30 31 0.5 to 2 0.5 to 2 10 10 0.5 to 2 0.5 to 2 n-1 5 3 1 1 2 122.2 <124.2> 142.2 <144.2> 22.6 100 120 80 25 75 n 6 4 2 3 Gate valve Aluminum + hard anodized

HRX-OM-X010

1-75 HRX-OM-X010 Chapter 1 Safety 1.8.7 Refrigerant R448A 1.8 Material Safety Data Sheet (SDS) HRZ Series 1-76 HRX-OM-X010 Chapter 1 Safety HRZ Series 1.8 Material Safety Data Sheet (SDS) 1-77 1-77 HRX-OM-X010 Chapter 1 Safety 1.8 Material Safety Data Sheet (SDS) HRZ Series 1-78 HRX-OM-X010 Chapter 1 Safety HRZ Series 1.8 Material Safety Data Sheet (SDS) 1-79 1-79 HRX-OM-X010 Chapter 1 Safety

HEC-OM-S008

[CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XL-OMY0001

1 FKM:No.1349-80 ** [] AS568-025-XN1 7 XL-OMY0001 / 16 25 40 50 XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XLA Series

Note3) We do not guarantee the quality if the seal material is changed by customer. 6 XL*-OMI0009-E Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials

XLA- ∗ -F7NJ ∗ - ∗ Series

(Material: SUS304) External seal (Maintenance part) 3 6 Bellows (Material: SUS316L) 5 Valve (Material: SUS304) 2 Valve seal (Maintenance part) C D J 4 C E E Body (Material: A6063) (KF flange) (K flange) Fd fn Heater (Option) Auto switch (Option) G H B A A Unit: mm Model n Fd XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75

XL-OMV0002

227 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** AS568-233V B2401-V85V AS568-349V B2401-G155V AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** 1)(FKM:No.1349-80)(**) AS568-025-XN1 2)4 3) FKM for ULTIC EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75

XL-OMY0002

** B2401-V85 ** AS568-349 ** B2401-G155 ** S XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A XLD63-2-9-1A ** XLD80-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** AS568-020V AS568-020 ** 1) FKM:No.1349-80** AS568-030-XN1 2) 5 P11 3) 7 XL-OMY0002 Barrel ULTIC ARMOR Perfluoro Kalrez Chemraz VMQ FKM for R R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75

XLDV Series

Note2) Refer to the Construction of each series for the construction numbers. 6 XL-OMM0005-A Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials used

High Vacuum L Type Valve

Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials used, changing only the seal may prove inadequate.

XL-OMY0003

-XN1 / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15 ** B2401-V24** B2401-P42 ** AS568-227 ** 1) FKM:No.1349-80** AS568-025-XN1 2) 4 3) FKM for EPDM Barrel ULTIC ARMOR R R Kalrez Chemraz VMQ R PLASMA R Perfluoro No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75

HRX-OM-W032

PV SV HRS Series 5.21 Communication Function 5-75 HRX-OM-W032 Chapter 5 Display and Setting of Various Functions 30. Perform setting for the contact input signal 1 with [] key or [] key, and press [SEL] key to enter.

Air cylinder (Series compatible with secondary batteries)

D-M9V-900 D-M9-900 D-M9WV-900 D-M9W-900 Bore size(mm) Hs Ht Hs Ht 40 30 30 34 30 50 34 34 38 34 63 41 41 44 41 80 49.5 49 52.5 49 100 56.5 56 61 56 14 Table 8 Minimum Stroke for Auto Switch Mounting n:Number of auto switches(mm) brackets other Center trunnion Number of Auto switch model than autoswitches 40 50 63 80 100 center trunnion (Different surfaces and same surfaces) 15 80 85 90 75

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Therefore, SMC products cannot be used for business or certification ordained by the metrology (measurement) laws of each country. 3 - 1Specification LEKFS*G Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 50 to 800 50 to 1000 150 to 1200 Horizontal 15 28 40 40 50 68 26 60 75 Work load [kg] Note2) Vertical 3 7.5 15 4 10 18 4.5 4.5 25 Up to 400 20 to 1500 12 to 750 6 to 500 24 to 1300 16 to 1000

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

Product weight [kg] Model Stroke Additional weight with lock Size 50 75 100 150 8 1.06 1.23 0.16 16 1.87 2.26 0.32 25 3.50 4.10 4.90 0.61 -5- 1.3 Construction LESYH*R / LESYH*L R type as shown L type opposite as shown Case of D type Component parts No. Description Material Remarks No.