FQ1

The suffix of the filter model part number is not necessary. 13 Pressure loss: 0.01 to 0.02MPa Operating temperature: 0 to 80C Differential pressure resistance: 0.5MPa/25C HEPO II element "Series EJ102S ...

Information

When it is OFF (alarm occurs), stop the sequencer signal using the sequence program. 13 Series LECSm Control Signal Wiring Example: LECSS 10 m or less 10 m or less LECSS Note 4) Note 4) Note 2) CN3 CN3 24 VDC MBR DICOM 5 13 RA1 D0COM 3 Electromagnetic brake interlock Note 2) RA2 9 INP Forced stop EM1 20 In position D11 2 Upper stroke limit (FLS) 15 ALM RA3 Failure Note 3) D12 12 Lower stroke

240

4 8 Bearing stopper Size 6: Aluminum alloy Size 10: Carbon steel 9 Motor plate Aluminum alloy Anodized 10 Guide ring Aluminum alloy Size 10 only 11 Bearing 12 Bushing Oil impregnated sintered copper alloy 13 Soft wiper !2 e w i !1 t !

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

0.5

Functions and Indications Page 13 Alarm Page 13 Wiring Page 14 Wiring Circuit Page 14 Operation Chart Page 15 DimensionsPage 16 Fan Type Ionizer IZF10/IZF10R Series Technical Data/Static Neutralization Performance q Installation Distance and Discharge TimePage 20 w Static Neutralization RangePage 20 How to Order Page 21 Accessories Page 22 Accessories Sold Separately Page 22 Specifications

Air Cylinder

62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87 26 50 10 14 66 16 M10 x 1.25 12 23 14 M26 x 1.5 28 3/8 88 168 Rod end nut (Standard) 30 d D C H B [mm] Part no.

Compact Guide Cylinder

4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x

ChemicalThermo-con

-HW19 Temperature controller model HED003-C2A Part number of set HED003-W2A13 HED003-W2A19 HED003-W2B13 HED003-W2B19 HED005-W2A13 HED005-W2A19 HED005-W2B13 HED005-W2B19 HED007-W2A13 HED007-W2A19 HED007-W2B13 HED007-W2B19 HED003-C2B HED005-C2A HED005-C2B HED007-C2A HED007-C2B Heat exchanger HED H W 007 13 Cooling capacity Tube size 003 005 007 13 19 1/2" x 3/8" 3/4" x 5/8" 300 W 500 W 750

Intrinsically Safe Valve

G NPT NPTF 13 Body Ported Series 53-SY5000/7000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1 Groups A, B, C, D Warning Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009)(Refer to page 40 for details) How to Order Valve

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting

Compact Hydraulic Cylinder

Bore size (mm) NT-02 NT-04 NT-04 NT-05 NT-05 NT-08 NT-10 B C d D H 12.5 21 21 26 26 31 39 5 8 8 11 11 13 16 15 25.4 25.4 31.2 31.2 37 47.3 M8 x 1.25 M14 x 1.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 32 40 50 63 80 100 13 22 22 27 27 32 41 256 Auto Switch Mounting CHQB/CHQWB Series Refer to pages 431 to 490 for detailed specifications.

Cylinder

CIhm) . ... . , ."~" ." t LZ . '"' 17 M3 xO.5 M10 x l.0 7 6.5 10.5 11 6 7 9 14 14 3 10.5 8 6 6 3.4 1.6 20 28 7 Mi2 Xl,Q 12 8 , 12 4.5 13 ~ '1 .6 24 33 ..H i 17 ~ , 20 ,', 1V14 XO.7 10 ' ... " .. ~ , ~ . .. r. 13 & :1 .:, 7 . "" , ,5 M14 XlQ 24 M5XO.8 10 10 16.5 14 6 15.5 6 7 18 2.3 43 15 12 19 10 5.5 30 20 Clevis Mount: CJPD/ Without Auto Switch zz Q S .CD B 2-M5 XO.8 GB Built In flange

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Suction flow rate l/min (ANR) 6 10 15 20/25 32 2 5 10 15 20 0.1MPa 0.05MPa 0.15MPa 10 to 60C (With no condensation) 30 to 400mm/s 0 to 5mm compared to the standard stroke Ball bushing bearing/Slide bearing Bearing type 10-/11-/12-: Fluorine grease 21-/22-: Lithium soap base grease 10-/12-: Grade 2, 21-: Grade 3 11-/22-: Grade 1 Grease Particle generation grade (Refer to front matter pages 13

Manifold Specifications

Unused Lead wire assy (13 stations) U side 6 stations Pin (14 stations) (n) Confirm an insertion of the lead wire assy after the insertion of pin by light pulling of the lead wire. 4. Mount the end plate !2 and !3 and tighten the bolt !1. 7 stations (15 stations) Note 1) Be careful that the packing and the O-ring do not fall out of the groove. Note 2) The tightening torque of bolt !

Manifold Specifications

(Put packing B w on the surface contacting to the end plate.) 4 stations (12 stations) 5 stations (13 stations) 3. For a style with a D-sub connector, open the cover !4 and insert the pin of lead wire assembly !0 as shown in the right figure.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

M8 x 1.25 40 41 28 43 20.5 32 13 ZPT50HB-A14 -B10 50 52 36 54 24 35.5 65.5 16.5 M10 x 1.5 ZPT50HB-B 8 ZU M8 x 1.25 50 52 36 54 24 35.5 16.5 -B10 M10 x 1.5 ZL ZY ZPT HB-A16 (Male thread) ZPT HB-B (Female thread) 63 80 63 80 ZF M16 x 1.5 ZP (Rc, NPT, NPTF) 8 1 Hexagon width across flats 22 6 6 Hexagon width across flats 24 SP 25 G Width across flats 37 45 45 ZCUK 4 x M4 x 0.7 4 x M4 x 0.7

Clean Regulator/Fluororesin Type

Nil X401 Standard Applicable fittings LQ1 LQ2 Symbol 1 2 Nil N Rc 1/8 NPT 1/8 Rotating the mounting hole 90 Fitting size (IN side) Fitting size (OUT side) Note 2) Note 2) Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Fitting size Fitting type Applicable fitting size Fitting type Symbol Symbol Nil 07 11 13 19 25 Note 1) 2 3 4 5 6 Same as IN side 2 3 4 5 6 07 11 13

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

(Port location: Side ported type only) A port B port 25 42 65 13 Series MSUA These drawings indicate the condition when the B port is pressurized.

MLGC

8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

MXF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 21 31 20.5 13 18 58 3H9 depth 3 +0.025 0 15 9.5 4-3.2 4-6.5 4.5 4.7 2-M3 x 0.5 thread depth 6 A G H 8 4-M4 x 0.7 Operating port 2-M3 x 0.5 Section AA M 8 N 2 ( 1): The number of pitches 0.3 15 (Table length) 16 4.5 J 8 Z 2.4 Max. 9 ZZ H G 3H9 depth