LEC-OM005xx

Normal mode Monitor . 86 (6-1) Monitor selecting screen . 86 (6-2) Monitor items . 86 (6-3) Monitor details . 86 (6-3-1) Drive monitor. 86 (6-3-2) Output monitor . 88 (6-3-3) Input monitor . 89 (6-3-4) Output pin monitor . 91 (6-3-5) Input pin monitor . 91 (7) Normal mode Alarm . 92 (7-1) Alarm selecting screen . 92 (7-2) Alarm selecting items . 92 (7-3) Alarm function details . 93 (7-3-

Programless controller (with stroke study) Step motor (servo 24 VDC)

Brown 12 Vcc B-4 Black 13 GND A-4 U Actuator cable type Red 7 A B-5 Black 6 A A-5 Nil Robotic type cable Orange 9 B B-6 Black 8 B A-6 S Standard cable 3 Controller side Electric actuator side (2) Actuator cable (8-20m) signal Terminal no.

Secondary Batteries

(mm) Bracket assembly no. 1(P) 2(A) 4 90-VHK-B1A 4 4 6 90-VHK-B1A 6 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 6 8 90-VHK-B1A 8 2(A) Applicable tubing O.D. (mm) 2(A) Applicable tubing O.D. (mm) 4 6 8 4 6 8 1(P) 1(P) 1(P): Male thread 2(A): One-touch fitting Applicable tubing O.D.

VZS

Applicable valve model Base model Wiring 1(P), 5(R1) 3(R2) 2 to 16 stations Plug-in type VV5ZS3-51F VV5ZS3-51G With D-sub connector With attachment plug lead wire VZS350-FZ 18 14 , (Example) Plug-in type (At 6 stations) (Manifold base) VV5ZS3-51FD-061-011 (2 position single) VZS3150-5FZ3 (2 position double) VZS3250-5FZ2 (Blanking plate) VVZS3000-10A-11 Non plug-in type (At 6 stations

IDX-OM-Z004

Y Y ,, IDF100F150F-W 6 7 IDX-OM-Z004 6 6.6 () (1) ADH-E400 V 1 -(2) 1 1 ) 1 2 ) Y92S-36/CR2477/ () 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 12 /JEMA 300 A B IDF100F150F-W 6 8 IDX-OM-Z004 7 7 7.1 / 7-1 IDF100150F-W 7 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel

Cylinder with Lock Series CNG

K KA M MM NA PG PH PL S LC LD LS LH LT LX LZ X Y W XA XB 117 (125) 141 (149) 24 7 5 6 3 M8 x 1.25 1/8 21.5 2 65 4 6 25 3 50 62 15 10 3 12 127 (135) 151 (159) 29 7 5.5 8 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6 28 3 57 70 15 10 3 12 128 (136) 154 (162) 35.5 8 5.5 10 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6.6 28 3 60 74 16 10 3 12 142 (151) 169 (178) 44 8.5 6 14 4 M14 x 1.5 1/8 28 2.5 81 4 6.6 33 3 68

High Purity Chemical Valve

Metric 3, 4, 6 6, 8, 10 10, 12 Inch Valve type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 Symbol Type Basic type N.C.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

0.6 2.3 0.4 D-H7BAL D-H7NF D-C73C 0.6 + 2(n 2 2 ) (n = 2, 4, 6) C-C80C 0.6 3.1 3.1 + 2(n 2) 0.4 D-H7C 0.8 + 2(n 2 2 ) (n = 2, 4, 6) D-H7LF 0.8 2.8 2.8 + 2(n 2) 0.4 0.6 + 2(n 2 2 ) (n = 2, 4, 6) D-B5 0.6 2.7 2.7 + 2.2(n 2) 0.4 D-B6 0.8 + 2(n 2 2 ) (n = 2, 4, 6) D-B59W 0.8 2.9 2.9 + 2.2(n 2) 0.6 0.6 + 2(n 2 2 ) (n = 2, 4, 6) D-G59 0.6 2.8 2.8 + 2(n 2) 0.4 D-K59 6-14-6 7 Series NCM

MQQ

B C d H D E F MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 20.5 M5 x 0.8 8 9.2 6 15.5 5 9.2 4 10 10 8 22.5 M6 x 1.0 8 9.2 8 16.5 6 11.5 5 16 16 10 24.5 M8 x 1.25 8 9.2 10 18.5 6 15 5 20 20 13 33.5 M10 x 1.25 10 11.5 12 22.5 11 19.6 6 25 25 17 40.5 M14 x 1.5 14 16 16 28.5 12 25.4 8 28 28 22 Applicable bore size (mm) Part no.

Stopper Cylinder

6 7 RS2H D-A9/A9V D-A7/A80 D-A7H/A80H D-A73C/A80C 6 9.5 9 9.5 9.5 9.5 RSH 12 12 12 11 10 MIW MIS D-A79W 13 13 13 14 14 D-F7/J79 D-F7V/J79C D-F7W/J7WV D-F7BA/F7BAV D-F79F/F7NT 6 5.5 6 6 6 5.5 5 D-P3DWA 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

IDX-OM-W011

. i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Plug: KPP Applicable fitting size d Weight g D Model L A L A 6 32 13.8 0.4 KPP-04 4 D d 8 35 15.7 0.7 KPP-06 6 10 39 17.3 1.1 KPP-08 8 Applicable fitting size d 12 43 19.2 1.7 KPP-10 10 14 45.5 20.7 2.5 KPP-12 12 4 For Drive System Air Piping Series KPQ/KPG Clean One-touch Fittings Recommended Applicable Tubing Tubing material Polyurethane: 10-series 4, 6, 8, 10, 12 Tubing O.D.

LEF-OM002xx

Bolts Size Belt Belt tension Part number (N) LEF16 LE-D-6-1 9.8 pull LEF25 LE-D-6-2 19.6 LEF32 LE-D-6-3 49.0 LEF40 LE-D-6-4 98.1 Bolts Size Tightening torque 6.Motor cover is installed. (Only "With motor cover") (Nm) M2.5 0.3610% M3 0.6310% M4 1.510% M5 310% The fingernail of "Grommet" is inserted in the hole of "Pulley box". Grommet 43 - 7.

Parallel Type Air Gripper

Screw (mm) MHZA2-6 M20.4 0.15 4.5 7H8(+0.022/0) 1.5 MHZAJ2-6 Note) Axial mounting type is not available for MHZ2-6 and MHZJ2-6. Use the holes on the body end surface for positioning. Max. tightening torque (Nm) Maximum screw-in Model No. Screw depth (mm) MHZA2-6 M2x 0.4 0.15 4 MHZAJ2-6 Note) Except MHZ2-6 and MHZJ2-6. Model No.

rep-modular-e

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Magnetically Coupled Rodless Cylinder

D-F9, D-F9W 5 4 D-Z7, Z80 9 9 11 A B D-Y59, Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

XL

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

Hygienic Design Cylinder Series HY

8 L1 22 24 X 12 14 (mm) Bore size A 60 61 H M4 x 0.7 M5 x 0.8 20 25 B 50 51 C 8 10 D 8 10 E 33 40 F 6 6 I 42 50 K 5 5 KA 6 8 L 10 10 M 22 26 N 4.4 5.4 OA M5 x 0.8 M6 x 1.0 Q 14 14 R 10 10 Stroke range 50 or less 50 or less DNote 1) Refer to pages 885 to 889 for details about the rod end nut, mounting bracket and accessory bracket.

Process Valve Series VNA

M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 VCC 20 24 24 70 92 109 413 Series VNH Specific Product Precautions Be sure to read before handling.