AC Servo Motor Driver (Pulse input type/Positioning type)

communication error 2 Alarms A.24 Main circuit error A.30 Regenerative error (Note 1) (Note 1) (Note 1) A.31 Overspeed A.32 Overcurrent A.33 Overvoltage A.35 Command frequency error A.37 Parameter error A.45 Main circuit device overheat (Note 1) (Note 1) (Note 1) A.46 Servo motor overheat (Note 1) (Note 1) (Note 1) A.50 Overload 1 (Note 1) (Note 1) (Note 1) A.51 Overload 2 (Note 1) (Note

XL-OMV0005

Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.

AMX-OM-Q015E

Table 3-1.

CEx-OMG0106

N Terminal No. 6 7 8 9 1 0 0 0 0 2 1 0 0 0 3 0 1 0 0 4 1 1 0 0 5 0 0 1 0 6 1 0 1 0 7 0 1 1 0 8 1 1 1 0 9 0 0 0 1 10 1 0 0 1 11 0 1 0 1 12 1 1 0 1 13 0 0 1 1 14 1 0 1 1 15 0 1 1 1 16 1 1 1 1 0Open between IN6~9 and COM 1Short circuit between IN6~9 and COM Set Home When dip switch is set ON, origins signal is inputted. When dip switch is set OFF, origin input is not required.

Compact Guide Cylinder

mm 0 1 4.

Parallel Style Air Gripper: Wide Type Series MHL2

. 1 pc. n pcs.

Direct Solenoid

3 ' 1 4 1 5 ' , 1 6 Solenold Type ' 07 = 24 VAC 50/60 Hz ogt 115n2ov.60Hzd1oct11ov.50Hz 1Ot = 230 V 60 Bzor2oov 50 Hz 'rtg = 12VAC50/@HZ 51 = I2VOC usTtD tThb Prcduct is Lisld by UndeM tds Laboatoii6 lhc. and BeaB the Malk: 'Th* and olhr Vdiagotlz FaiingB arc available by SFcial On f, " Orly a/dlsbl * "D or'O osrion and 2 Dosition. fwhsn ;ou.t6d on subplat opton M must b r.d.

A-HEC-OM-J004

1-2 1.1.3 Symbols. 1-2 1.2 Hazard Warning Labels . 1-4 1.2.1 Location of hazard warning labels . 1-5 1.3 Location of Model Label. 1-7 1.4 Safety Measures . 1-8 1.4.1 Precautions. 1-8 1.4.2 Protective Equipment . 1-9 1.4.3 Long-term Storage . 1-10 1.4.4 Disposing of Product . 1-10 1.5 Interlock List . 1-10 Chapter 2 Description and Function of Each Part . 2-1 2.1 Liquid Tank/Controller. 2

1

Pressure units conversion (Approximation) 17 Unit Pa (N/m2) kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr PSI 1 x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1

IDX-OM-W023

R T 600mm 1 10% () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W023 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W023 6 6-1 IDU8E-10/20 IDU11E-10/20 IDU15E1-10/20 50Hz 1.1 1.5 2.6 3/min (ANR)1 m 60Hz 1.2 1.7 2.8 0.7MPa 55 32 10 580 0.151.0MPa 240 (85%) AC100V 50/60Hz AC100/100110V10%(4) AC200V 50/60Hz AC200/200220V 10%(4) AC100V 50/60Hz 3.4/3.5 5.7/6.0 4.6

AZ1000

Connections 1/2 inch face seal 1/2 inch tube weld 0.21 30 3.

Digital Pressure Switch

Internal circuit and wiring example Z/ISE40A(F)Output specification -S/-R (Analogue output mode) Switch output NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less R: Analogue output 1 to 5 V Output impedance 1 k S: Analogue output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance 50 -S/-R (

Round Type Low Pressure Hydraulic Cylinder Series CH
M

Refer to pages 135 through 141 for safety instructions, hydraulic cylinder precautions and auto switch precautions. 1 pc. Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.

Precision Regulator Series IR1000/2000/3000

Panel When mounting on a panel, refer to page 561 in Specific Product Precautions. 4.5 M5 x P0.5 8.5 M6 x P0.5 5.5 71 11 18 124 46 53 92 10 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) 30 OUT(2) SUP(1) 43 35 2 x Rc 1/8 Port size EXH 43 50 50 2 x Rc 1/4 Port size 2 x Rc 1/8 35 60 2 x Rc 1/8 Pressure gauge port Pressure gauge port 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (Option) 30

High-precision Digital Pressure Switch

value (main display). (1) Press and hold the SET button between 1 and 3 seconds in measurement mode.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Material PBT PBT Brass Brass Note White Black (1) Body A Handle Body B Needle 1 2 3 4 !1 q i !

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

1 1 1 1 2 1 1 2 1 1 1 2 1 2 2 1 1 1 1 1 3 2 3 VCC12-1A-1 (for VCC12-00) 1 set unit VCC12(D)-00 (dedicated) Orifice body assembly VCC12D-1A-1 (for VCC12D-00) 1 set unit O-ring assembly 1 set unit VCC12-OR-1 O-ring assembly Orifice assembly 1 set unit VCC12-OR-4 1 set unit VCC13-1A-1 VCC13-00 (dedicated) 1 set unit O-ring assembly VCC13-OR-1 O-ring assembly 1 set unit VCC13-OR-2 Mounting nut

Clean Gas Filter

21.5 0.3 MPa 0.01 50 40 IN 0.1 MPa 19 1 22.5 13 0.7 MPa 65 0.001 0.5 MPa 0.0001 100 SFB302-02: TSJ 1/4 (Tube Swage Joint) 0.1 1 10 Flow rate L/min (ANR) 2 x 4.5 (Mounting hole) Bracket 2 x 1/4 TSJ 21.5 50 40 IN 19 1 13 22.5 69 SFB305-02, SFB315-02: URJ 1/4 (Union Ring Joint) 2 x 4.5 (Mounting hole) Bracket 2 x 1/4 URJ 21.5 50 40 IN 19 1 22.5 13 A Model A 79 84 SFB305-02 SFB315-02 308 Clean

VVX31/32/33

AC, DC C.O. 7.5 55 6 45 50 42 18 60 37 12 AC Cv converted Av x 10 6 (m 2 ) VX32 AC (Full wave rectification) 50/60 10 8.5 60 1 3 5 0.08 1.5 1.0 0.6 220 1.9 VX311 -00 DC 8.5 60 11 60 9.5 50 1 3 5 0.16 0.5 0.3 220 3.8 VX312 -00 50 55 22 60 47 18 AC 0.6 370 VX3225-00 2.2 0.19 4.6 VX33 1.0 530 VX3325-00 AC (Full wave rectification) 50/60 14 11.5 60 1 3 5 0.24 DC 11.5 60 0.3 0.2 5.8 220 1.0

Stainless Steel 316

Model T (M) Weight (g) H T 2 x Applicable tubing (inch) KQGE03-00 KQGE07-00 KQGE09-00 KQGE11-00 KQGE13-00 14 38 13.5 18 22 5.6 5/32 1/2-20UNF 17 40.6 15 18.8 31 10.4 1/4 9/16-18UNF 22 45.8 20 20.9 46 26.1 5/16 3/4-16UNF M M 26 50 23 23 76 41.5 3/8 7/8-14UNF L 29 54.6 26 24.8 101 58.3 1/2 1-12UNF Note) Figures shown when using FEP tubing 7 Series KQG Applicable Fluid List Compatibility Checklist