Vacuum Pad, with Buffer. 39 lb. M30.

A maximum effective area of 670mm² (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

. / .39 Kg Series Configured Datasheet.

. / .39 Kg Series Configured Datasheet.

. / .39 Kg Series Configured Datasheet.

. / .39 Kg Series Configured Datasheet.

. / .39 Kg Series Configured Datasheet.

A maximum effective area of 670mm² (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

Information

ASG22F-M5-04 ASG22F-M5-06 ASG32F-01-04S ASG32F-01-06S ASG32F-01-08S ASG42F-02-06S ASG42F-02-08S ASG42F-02-10S ASG52F-03-08S ASG52F-03-10S ASG52F-03-12S ASG62F-04-12S 4 10.6 23 28.8 11.6 25.2 18.2 M5 x 0.8 8 15.8 37.2 33.7 33.7 30.2 6 13 23.6 30.6 14 34.4 18.8 4 10.6 24.8 32 14.3 39.4 18.2 1/8 12 18.6 44 39 40 35 6 13 25.4 32.6 14.3 42.4 18.8 8 15 27.5 35.5 16 52.4 20.9 6 13 27.3 36.2 17.9

Speed Controller with One-touch Fittings

D5 Applicable series AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L L9 L10 L11 L12 L13 L14 L15 L16 L17 t1 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F 9.9 13.4 11 27.5 19.5 1 3.4 3.5 3.5 ASR ASQ 3.4 3.4 4.9 7.3 12 14.8 18.3 12.6 29 21 45 11.2 1.6 15.6 19.6 1.2 17 38 28 4.5 4.4 4.4 19.6 24.6 22 43 33 4.5 4.5 6.5 9.5 15.5 24.8 29.8 1.4 28 49 39 25.7

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

1/4" 20.7 13.7 21.6 12 17 1/8" 24.4 8.4 17.5 12.7 13.1 30.9 9.3 5/32" 24.9 9.3 18 37.3 3/16" 23.9 16.5 26.8 11.4 14 35.2 30.2 14.2 NPT 1/8 12.7 10.9 32.1 27.1 38.2 19 1/4" 25.6 17 29.9 13.2 16.2 12.9 40.8 21 5/16" 28.2 18.5 30.9 15.2 39.6 32 5/32" 21.9 16 30.6 10.4 16.2 10.9 41.6 33 3/16" 23.9 16.5 31.1 11.4 42.5 36 1/4" 25.6 17 34.2 13.2 39.9 34.9 18.5 NPT 1/4 17.5 34.4 29.4 18.3 45.1 39

AS

C D E F G H J K L AS100P-04-04 AS200P-04-04 AS200P-06-06 AS250P-06-06 AS300P-08-08 AS300P-10-10 23.9 31.4 31.3 33.6 37 37.5 41.7 51.4 52.3 54.6 60.5 63.5 26.7 36.4 36.3 38.6 42 42.5 38.9 46.4 47.3 49.6 55.5 58.5 26 30 30 32 36 39 9.3 9.3 11.6 12.8 15.2 18.5 17 17.1 18 18 19 22 4 4 6 6 8 10 4 4 6 6 8 10 10 13.6 13.6 17 22 22 12.7 12.7 13.5 16.8 18.5 21 17.4 18.9 19.9 24.1 27 30.5 22.4 25.7

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

40.1 18.5 21.9 35.2 30.6 8 15.2 5/32" 10.4 12.9 36 32 16 18.3 10.9 16.2 AS231FG-02-10 AS231FG-N02-05 31 48.4 42.6 21 23.9 38.7 31.1 10 18.5 3/16" 11.4 40 33 17 20.2 NPT 1/4 AS331FG-02-06 AS231FG-N02-07 40.4 35 34.4 29.4 25.2 47 45.6 17 25.6 38.5 34.2 6 12.8 1/4" 13.2 60 19 36 18.5 17.5 12.9 18.3 20.6 AS331FG-02-08 AS231FG-N02-09 28.2 50 48.4 18.5 28.2 39.7 35.2 8 15.2 5/16" 15.2 63 12.9 39

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS231FM-N02-11S 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 8.4 9.3 11.4 12 8.4 9.3 11.4 13.2 15.2 10.4 11.4 13.2 15.2 17.9 7 28.7 17.5 9.6 12.7 33.8 28.8 8 9.3 10-32 UNF 30.1 25.1 10.8 34.5 31.9 23.3 20.7 16.5 13.7 8 17 17.5 9.3 13.1 12.7 31.8 18 36.1 31.1 12.7 NPT 1/8 14.2 32.1 27.1 23.9 25.6 28.2 21.9 23.9 25.6 28.2 31 10.9 16.5 18.5 21 16 17 18.5 14 19 21 32 33 36 39

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Applicable model D5 L9 L10 L11 L12 L13 L14 L15 L16 L17 t1 AS-10L AS1002FS3.4 14.8 18.3 11 27.5 19.5 3.4 4.9 7.3 12 1 AS-20L AS2002FS 15.6 19.6 12.6 29 21 1.2 AS-25L AS2052FS 19.6 24.6 17 38 28 AS-30L AS3002FS4.5 24.8 29.8 22 43 33 4.5 6.5 9.5 15.5 1.4 AS-40L AS4002FS 25.7 30.7 28 49 39 Part no.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

(17.5) 13 AQ 10.4 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 ASV 24.5 28.5 9.3 19.2 47 (48) AS32l1FSl-U02-08 8 13.2 22.7 33 14.2 AS32l1FSl-U02-10 10 15.9 26.7 37 35.7 15.6 48 (49) AS32l1FSl-U02-12 12 18.5 29.7 40 34.5 17 50 (51) AS32l1FSl-U03-06 6 1/4 19 16.6 AK 10.4 21.8 32.1 28.7 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

39.6 18.5 18.3 21.9 35.2 30.6 8 15.2 5/32" 10.4 12.9 36 16 32 16.2 10.9 AS231FG-02-10 AS231FG-N02-05 31 47.9 42.1 21 20.2 23.9 38.7 31.1 10 18.5 3/16" 11.4 40 17 33 NPT 1/4 AS331FG-02-06 AS231FG-N02-07 39.9 34.9 34.4 29.4 25.2 46.5 45.1 17 25.6 38.5 34.2 6 12.8 1/4" 13.2 60 18.5 19 36 17.5 20.6 18.3 12.9 AS331FG-02-08 AS231FG-N02-09 28.2 49.5 47.9 18.5 28.2 39.7 35.2 8 15.2 5/16" 15.2 63 39

AZ1000

0.28 140 0.97 35 0.24 120 0.83 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 30 0.21 100 0.69 25 0.17 80 0.55 20 0.14 60 0.41 15 0.10 40 0.28 10 0.07 20 0.14 5 0.03 0 0.00 0 0.00 0 100 200 300 400 500 600 700 Flow rate (slpm, N2) 0 200 400 600 800 1000 1200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International. 39

COQ2BP

6.6 11 Depth 8 1/4 10.5 71 28.5 19 4" 80 112 68.5 32.5 25 98 12.5 M22xl .S 132 6 22 43.5 77 11 17.5 Depth 13.5 3/8 16 104 35.5 26 65.5 83 94.5 81 26 20 n 10.5 Ml8xl .5 103 7 17 33.5 60 90 14 Depth 10.5 1/4 15 84 28.5 19 55.5 High Magnetic Field Resistallce Sellies COQ2BP Foot Mount: COQ2LPO-OOM-OO H Thread [I (mm) c l BonI.1iIi (mm) A L[) R N X Y LG L 0 ~ t::;r H LH L1 . 50s 107 .2 15 39

CG5-S

0.050 0.093 0.065 0.117 CD-E03SUS 32, 40 NT-03SUS 25, 32 10 C type 10 for shaft 16.5 9.6 38.4 33 1.55 1.15 17 (19.6) M10 x 1.25 6 CD-E05SUS 50, 63 NT-G04SUS 40 14 C type 14 for shaft 18 13.4 59.6 53.2 2.05 1.15 19 (21.9) M14 x 1.5 8 CD-E08SUS 80, 100 NT-05SUS 50, 63 22 C type 22 for shaft 26 21 87.2 79.4 2.55 1.35 27 (31.2) M18 x 1.5 11 NT-08SUS 80 31 32 (37.0) M22 x 1.5 13 NT-10SUS 100 39