CU

4 q w r !3 !0 !2 i o !5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

x 10 -3 kgm 0.04 8 I = 0.5 x = 0.1 x 10 -3 kgm I = (1.04 + 1.25) x 10 -3 = 2.29 x 10 -3 kgm Gripper: I 17 Rotary Actuator Technical Data 3 Air Consumption Air consumption is the volume of air which is expended by the rotary actuator's reciprocal operation inside the actuator and in the piping between the actuator and the switching valve, etc.

XLAQ/XLDQ

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Lock unit

Unlocked condition can be held in reversed order of Fig. 8. of the release bolt 3240 3 5063 4 80100 5 16 - W a r n i n g (1) Do not operate the release bolt until safety is confirmed.

PAB-OM-C007-B

If diaphragm is broken due to the life, the operating fluid w ould flow out to the pilot air side. L eading to the failure of pump. 5 . Replacement parts PAB-OM-C007-B P2 FLUID FLUID OUT IN P1 PT F E diaphragm set K T PA 5 3 1 S w itching valve assembly set K T PA 5 3 6 FLUID IN FLUID OUT P2 P1 4 . Maintenance 3 .

10

R R: Gripping point distance [mm] 6 MHL2 Series Construction 10 16 to 25 e r t u w y @4 @0 @1 @2 !7 !5 !8 @3 !3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

point) Port size Rc 1/2, 3/4 3/4, 1 1/2, 3/4, 1 Material Housing/Seal SUS304/NBR or FPM Element Note) Cotton, PP, SUS304, SUS316, etc.

Air cooled Thermo-con (Compact type)

COMMUNICATION FORMAT -3-1 3.1 TYPE OF MESSAGE -3-1 3.2 CONTENT OF COMMUNICATION -3-1 3.3 COMPOSITION OF REQUIRED MESSAGE (FROM MASTER TO THE PRODUCT) -3-2 3.4 COMPOSITION OF RESPONSE MESSAGE (FROM THE PRODUCT TO MASTER) -3-3 3.5 EXPLANATION OF CODE -3-4 3.6 CAUTIONS FOR COMMUNICATION -3-6 3.7 COMMUNICATION EXAMPLE -3-7 3.8 CONNECTION -3-9 3.9 IDENTIFICATION CODE LIST -3-9 3.10 ASCII CODE

Air cooled Thermo-con (Compact type)

COMMUNICATION FORMAT -3-1 3.1 TYPE OF MESSAGE -3-1 3.2 CONTENT OF COMMUNICATION -3-1 3.3 COMPOSITION OF REQUIRED MESSAGE (FROM MASTER TO THE PRODUCT) -3-2 3.4 COMPOSITION OF RESPONSE MESSAGE (FROM THE PRODUCT TO MASTER) -3-3 3.5 EXPLANATION OF CODE -3-4 3.6 CAUTIONS FOR COMMUNICATION -3-6 3.7 COMMUNICATION EXAMPLE -3-7 3.8 CONNECTION -3-9 3.9 IDENTIFICATION CODE LIST -3-9 3.10 ASCII CODE

Fieldbus system (DeviceNet compliant)

Valve series Power consumption SY3000/5000/7000/9000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) SYJ3000/5000/7000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) VQZ1000/2000/3000 Standard: 1.0 W (approx. 42 mA) Low wattage: 0.5 W (approx. 21 mA) Refer to "Wiring of the branch cable and connector for connecting load" on

Thermoelectric Bath

(Water) Heating capacity Note 2) 300 W (Water) 0.017F ( 0.01C) Temperature stability Note 3) 0.036F ( 0.02C) Temperature distribution Note 3) Tank dimensions Internal diameter 130 x Liquid level 188 mm 50 to 95F (10 to 35C) (no condensation) Temperature Pressure range Within 73 psi (0.5 MPa) Flow rate Note 4) 0.8 to 1.3 gpm (3 to 5 L/min) Port size IN/OUT: Rc1/4 Wetted parts material Stainless

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Construction w e r !2 !4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

Escapements Series MIW/MIS

4 w i !7 q y r !3 !2 t o w e !0 !5 !6 25, 32 Option @4 @1 @3 @0 !9 @2 Scraper Stroke adjuster u w !1 !8 (32 only) Description Material Note Component parts Description Material Note No. No.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

frequency Hz Valve effective area mm (Cv factor) SY3000 SY5000 Non-locking push type Slotted locking type, Knob locking type Note 2) Manual override 2 to 10 stations: W = 26n + 172 11 to 16 stations: W = 26n + 199 2 to 10 stations: W = 54n + 227 11 to 16 stations: W = 54n + 264 Note 3) SY3000 Weight W (g) n: Stations (D-sub connector) Main valve/pilot valve common exhaust type Internal pilot

KQ2

16 3 16 5 32 1 4 3.5 16.5 3 16 1 4 5 16 4.6 17 1 4 3 8 K 3 8 6 18.5 5 16 1 2 Applicable tubing M 7 21 1 2 3 8 Note) D: Max. diameter H KK D MS Cross: KQ2TW Applicable tubing O.D.

Transfer

0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2 w t !1 !3 q u !0 !2 r y e !5 o !

HRX-OM-W032

3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Operation at low ambient temperature or low circulating fluid temperature . 3-6 3.2.3 Location . 3-7 3.2.4 Installation and maintenance space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical wiring . 3-11 3.3.3 Preparation

Process Gas Diaphragm Valve

OUTLET INLET Mounting hole Top view (Mounting hole on bottom) Porting Symbols OUTLET (Downstream) INLET (Upstream) 2PW 2PWA 2PWC q q q w 2 PORTS w w 3PWD 3PWE 3PWG 3 PORTS q q q e e e w w w 4PWM q e r 4 PORTS w 1114 A

VFN2000N

-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32 40 14 Pilot EXH. 2-5.5 Mounting hole 3-1/4 3 4 5 1 Manual override (Non-locking) 23 23 VFN2220N--02 224.5 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 189 3-1/4 3 4 5 1 Manual override (Non-locking) 23 23 Cylinder ports are NAMUR hole pattern. 3-12-2 3 NAMUR Interface 5