LG1H

Mounting hole 40 135 (Bearing surface thickness 5) CNP1 CNP2 130 120 CN1 CN3 CN2 6 5 5.5 LECSB 40 6 Mounting hole 6 135 (Bearing surface thickness 4) 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 1 Battery included. 98 Incremental Type Series LECSA Absolute Type Series LECSB Specifications LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 Model Compatible motor capacity [W]

Electric Actuator Triple Axis P&P Unit

Dimensions (reference drawing for assembling) 12 6 (26) 14 2-M5 x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31 4H10depth5 92 5 4H10depth5 D (Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5

I/O Configurator (NFC version)

When they are not in pairing mode, refer to STEP 4 or STEP 6 of 6.4. (1) Input and output size of the wireless slave.

VP4

Product Profile: ISO Standard Solenoid Valve: Size 1, 2 Rubber Seal Series VP7-6/7-8 Solenoid valve conforming to ISO standard Size (1)/VP7-6 Size (2)/VP7-8 (Rubber seal) Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position Closed center (FHG-D) Exhaust center (FJG-D) Double pilot check (FPG-D) Pressure center (FLG-D) Courtesy

Electric Actuator / Slider Type 《 AC Servo Motor 》

See the table below Belt tension Size Belt N Part number Bolts LEF25 LE-D-6-2 19.6 pull LEF32 LE-D-6-3 49.0 LEF40 LE-D-6-4 98.1 4. "Pulley plate" is installed. Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

energy saving effect

Description Size 1 Valve Rc1/2 2 Valve Rc1 3 Y-strainer (#40) (Accessory) Rc1 4 Flow meter Prepare a flow meter with an appropriate flow range. 5 Valve (Part of thermo-chiller) Rc3/4 6 Y-strainer (#40) Rc1/2 7 Pressure gauge 0 to 1.0 MPa 8 Y-strainer (#40) Rc1 Cable Specifications Power supply and signal cable should be prepared by user.

Turntable Cylinder Series MGT

1) D-Z8 type D-A9 type D-F9 type D-Y6 type Ball bushing D-Y7 type Note 1) Vertical outlet types cannot be mounted.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

CC-LINK System PROFIBUS-DP (COM) DI unit (For input) M12 8 number of inputs U D U D U D U D U D U D U D U D U D U D U D U D U D U D U D U D EX323 -S001 EX123 -SMB1 EX124 -SMB1 EX123 -STA1 EX123 -SSH1 EX123 -SUW1 EX124 -SAB1 EX123 -SUH1 EX123 -SSL1 EX123 -SSL2 EX123 -SFU1 EX124 -SDN1 EX124 -SCS1 EX124 -SCS2 EX124 -SJN1 EX124 -SMJ1 EX240-SDN2 EX240-SPR1 EX240-IE1 Dedicated output model For

ASR

6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

1

M2 20-CM2 Standard type 20-CM2A Standard with air cushion type 20-CM2W Double rod type 20-CM2K Non-rotating rod type 20-CM2R Direct mount type 20-CBM2 End lock type Air cylinder Series M(D)B 20-M(D)B Standard type 20-M(D)BW Double rod type End lock type 20-M(D)BB 6-18-2 3 Copper-free Air Cylinders Air Cylinders Bore size (mm) Series Application 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100

CEx-OML0058

50 40 40 100 100 300 300 200 400 500 200 400 500 D o e s t h e m o u n t e d l o a d / P i s t o n s p e e d ( /) e x c e e d t h e l o a d g i v e n i n P i s t o n s p e e d ( /) t h e d i a g r a m ? H o r i z o n t a l m o u n t i n g V e r t i c a l m o u n t i n g S e l e c t i o n ..

Series VCS

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

HRX-OM-S004

capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-7 Cooling capacity(HRS100-W-20/40/46-) 8.4.4 HRS150-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 20 20 18 18 16 16 Cooling capacity [kW] 14 14 Cooling capacity [kW] 12 12 10 10 8 8 6 6 4 4 2 2 0

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

type D-Z7 type Note 1) Note 1) D-Z8 type D-A9 type D-F9 type D-Y6 type D-Y7 type Note 1) Vertical outlet types cannot be mounted.

Electric Actuator / Guide rod Slider

50 CCW CW Stroke[mm] Origin 50mm 10 20 30 40 50 60 CCW CW Stroke[mm] Origin 50mm -50 -40 -30 -20 -10 0 CCW CW Stroke[mm] Origin 50mm -40 -30 -20 -10 0 10 CCW CW Stroke[mm] Origin 50mm -60 -50 -40 -30 -20 -10 CCW CW Stroke[mm] -25- 4.

Electric Actuator Miniature Rod Type Miniature Slide table Type

Top mounting Front mounting Model Bolt Max. tightening Max.screw-in torque [Nm] depth [mm] LEPS6 M4X0.7 1.4 6 LEPS10 M4X0.7 1.4 6 Model Bolt Max. tightening Max.thread depth [mm] torque [Nm] LEPS6 M4X0.7 1.4 7 LEPS10 M4X0.7 1.4 8 40 - 6. When mounting the product, tighten the mounting screws within the specified torque range.

HRX-OM-I051

Loosen the cap and insert the power cable from the power cable access. 6. Connect the communication cables with P1 and P2. P1 (D-sub 25P female) Cap P2 (D-sub 9P female) P3 (D-sub 9P male) Not used.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Series Size Rotating angle Vane type Applicable auto switch Angle adjustment screws 1 D-9, D-T99 D-9A, D-S99, S9P 90 High precision type MSUA 3 Single vane 7 Table unit D-R73, D-T79 D-R80, D-S79, S7P 180 Auto switch capable 20 1 D-9, D-T99 D-9A, D-S99, S9P Single vane Since switches can be moved anywhere on the circumference, they can be mounted at positions which accommodate the specifications

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Auto Switch Proper Mounting Position (mm) (mm) Auto Switch Mounting Height D-M9 D-M9W D-M9 D-M9W D-A9 Auto switch model Auto switch model D-A9 B A B A Bore size Bore size 20 25 32 40 Hs 30.5 59.5 34 55.5 20 25 32 40 Note) The above values are a guide in the stroke end detection of the mounting positions of the auto switch.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

10, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston