Dimensions Foot type: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 10 5.5 83 2.3 14 33 25 65 19 42 108 9 6 16 5.5 92 2.3 18 42 30 74 21 54 119 9 6 20 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 25 6.8 142.5 3.2 28 40 47 102.5
RB 34 38 O 5 5.5 4H9 5H9 VA Q 14 17 RA 52 66 VB 4 5 WA WB 2 2.5 XA XB 4 5 YC 7 7.5 +0.030 0 +0.030 0 +0.074 0 +0.074 0 +0.030 0 +0.030 0 52H9 65H9 4H9 5H9 7
Positioning complete signal 19 OZ+ Z Z 10 20 COIN OZ+ 14 GND VDC 12 to 24V 13 4.7k COM Torque monitor: Zout 4.7k 12 + IM VDD 30V max. 15mA max. 11 Speed monitor: Zout 4.7k 4.7k SP + 21 CZ Z (Pin 14 is GND.) 26 FG CN I/F 205 Non-standard Motor Compatible Drivers Mitsubishi Electric Corporation Drivers for LJ1, LG1, LX Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5
With double acting spring 20 14 32 20 50 32 63 40 63 40 80 Bore size (mm) Rod size (mm) 50 Standard stroke (mm) Standard variations Series Variations Option Bore size (mm) 15 20 30 40 Rod end shape Series Mounting type Actuation system Built-in magnet With lock mechanism With proximity sensor With cancel 20 32 Double acting RSH Adjustable Flange Lever Double acting spring type 50 63 80 RS1H
shaft center Allowable driving capacity> REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14
Female connector elbow union: KBL T Connecting thread Weight (g) H (Hex.) 14 Part No.
173.5 165.5 15 184 176 16 194.5 186.5 17 205 197 18 215.5 207.5 19 226 218 14
Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.
Z Y X S NN NB NA MM LZ LY LX LT LH LC LA H F D C B A Bore size (mm) 10 16 90 [91] 7 5 46 M8 x 1 9.5 12.5 M4 x 0.7 32 16.5 24 1.6 9 4.5 38 28 8 4 14 12 15 91 [92] 9 6 47 M10 x 1 9.5 12.5 M5 x 0.8 42 25 33 2.3 14 5.5 46 28 8 5 20 18 15 Rod Side Flange Style (F) CVJ5F Rod extended/retracted when energized M5 x 0.8 M5 x 0.8 53.5 [54.5] M5 x 0.8 Manual override 28 [34.5] Width across flats B1
LG RD 11 Xmmm Plate SD OP 21 LG 14 SD Plate Note 4) CN1 EM1 Forced stop 8 Servo ON SON 4 Reset RES 3 Forward rotation stroke end LSP 6 Reverse rotation stroke end LSN 7 10 m or less CNP1 Note 1) PE Note 1) For preventing electric shock, be sure to connect the driver circuit power supply connector (CNP1),s protective earth (PE) terminal to the control panel,s protective earth (PE).
Bracket ISA-14 DIN rail ISA-5-m L Stations Part no.
Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing UR printing UR 11030SZ Printed in Japan. D-G
21 29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.
Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series RoHS Specifications Compact, solid, and safe design The case and cover have undergone testing in which they were subjected 100,000 times to impacts equivalent 1.5 times the rated pressure (confirming to MIL standard).
Accessory None Bracket (Available M5 type only) Nil B 14-11-17 Series GS40 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Wiring Mounting and Piping Warning Caution 1.
SET 20 VY1 + G P.SET PPA AL 14-11-19
AD Accessory (Option) GD Applicable model HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 Auto drain AD402-04 AD600-06 AD600-10 Model Selection (Flow Capacity l/min (ANR)) JIS Symbol Model HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 50C 2000 6000 12000 12000 12000 18000 1000 70C 100C 180C Inlet air temperature
Ported Type Series 52-SY7000 Dimensions 2-position single L plug connector (L) 52-SY7120-L-02 (-F2) In case with foot bracket 52-SY7120-L-02-(F1) 29.4 20 2 x M4 x 0.7 Threads depth 6.5 (For bracket mounting) 57 24.5 7 46 5.5 19.8 28 38 79.2 Manual override Insulation: Black () 14.7 B 13.6 40 A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14
Regulating spring Piston O-ring Adapter Hexagon socket head cap screw Port 14-7-4
Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 84 25 21 98 30 24 111 46