HRX-OM-T004

. 5-18 5.8.4 Command:LOC Key-lock setting (R) . 5-19 5.8.5 Command:LOC Key-lock setting (W) . 5-20 5.8.6 Command:STR Saves data (W) . 5-21 5.9 Negative response . 5-22 Chapter 6 Communication alarm function . 6-1 6.1 Communication alarm occurs . 6-1 6.2 Communication alarm reset . 6-2 6.3 Setting and checking . 6-2 6.3.1 Setting and checking items . 6-2 HRS090 Series HRX-OM-T004 Contents

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

. 30 10, 20, 30, 40, 50, 75, 100 40 10, 20, 30, 40, 50, 75, 100 Bore size Strokes are available in 1 mm increments by installing spacers in standard stroke cylinders. 10 16 20 25 30 40 10 mm 16 mm 20 mm 25 mm 30 mm 40 mm Port thread type M thread Rc NPT G 10 to 20 Nil 25 to 40 TN TF Series MQQ is not auto switch capable.

PF2A/PF2W

(Add 20 g for the types of analog output whether voltage or current output selected.)

2-Color Display Digital Flow Switch Series PFM

Dimensions PFM -C4/C6/C8/N7--X693 7 5 PFM -C4/C6/C8/N7--X694 7 5 10.2 10.2 1 43 A 43 1 IN OUT (34.2) 3 (34.2) 13 3 13 A 18 OUT 2 x 3.4 18 IN B B 48 20 48 20 2 x 3.4 One-touch fitting Applicable tube O.D.

Pulse Valve

Because of this, the air flows to the OUT side. q w Caution Selection of Pilot Valve p. 3 Energized (Main valve open) Due to the release of air from the pressure action chamber w, the pressure in the pressure action chamber w decreases (force pushing the main valve down < force pushing the main valve up), opening the main valve.

Profile Design ISO/VDMA Air Cylinder Series CP95

e Order No. b d f l1 c a 32 M10x1.25 GKM10-20 10 40 10 52 20 20 40 M12x1.25 GKM12-24 12 48 12 62 24 24 50/63 M16x1.5 GKM16-32 16 64 16 83 32 32 80/100 M20x1.5 GKM20-40 20 80 20 105 40 40 Rod end nut (standard equipment) 30 d D C H B Bore size (mm) Order No.

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

Fieldbus system (CC-Link compliant)

Valve series Power consumption SY3000/5000/7000/9000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) SYJ3000/5000/7000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) VQZ1000/2000/3000 Standard: 1.0 W (approx. 42 mA) Low wattage: 0.5 W (approx. 21 mA) Refer to "Wiring of the branch cable and connector for connecting load" on

Bag Filter

FGF FGF FGH Choose the vessel type and number of units. 2 elements FGF1-20 2 units FGF1-20 1 unit FGF1-20 2 units FGF1-20 3 units w Vessel type and number of units FQ1 or Choose a vessel that satisfies the number of elements obtained in step q.

Vacuum Gripper

ZPGB30J-7A-X2 18 19 19 25 ZP2-B30J ZP3P 20 JT2 SF ZP3PG20JT2SF-7A-X2 21 ZP3P-20JT2SF-W ZP3PA-T1JT-7A-X2 ZP3P 20 JT2 SF M ZP3PG20JT2SF-M-7A-X2 21 ZP3P-20JT2SF-WM ZP3P 32 JT2 SF ZP3PG32JT2SF-7A-X2 48 ZP3P-32JT2SF-W ZP3PA-T2JT-7A-X2 ZP3P 32 JT2 SF M ZP3PG32JT2SF-M-7A-X2 48 ZP3P-32JT2SF-WM ZP3P 20 JT5 SF ZP3PG20JT5SF-7A-X2 23 ZP3P-20JT5SF-WG ZP3PA-T1JT-7A-X2 ZP3P 25 JT5 SF ZP3PG25JT5SF-7A-X2

Miniature Guide Rod Cylinder Series MGJ

The area between bold lines in the below graphic shows the relation between load mass and maximum speed. 6 10 Bore size (mm) Operating piston speed (m/s) Allowable kinetic energy (J) 0.012 0.05 to 0.5 0.035 6 L 100 100 5st 10st 15st W 80 10 Load mass W (g) 10 6 60 Load mass (kg) L 1 40 W 20 0.1 00 5 10 15 20 0.01 0.01 1.0 0.1 Eccentric distance L (mm) Maximum speed (m/s) Allowable Eccentric

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B B A W A B stroke 6 5 to 30 3.5 0 17 6.5 13 3.5 2.5(5) 17 4.5 5 to 20 17 13 17 10 25 7.5 3.5 20 16 2.5 7.5 20 1.5 0.5 30 19 15 19 (1) 5 27 23 27 10 22 18 22 15 27 23 27 16 8 4 2 8 2 0 B A 20 22 18 22 Bore (mm) 6 10 16 25 27 23 27 (0.5) 6.9 10 30 27 23 27 8.8 14 13.9 19 Note 1) Negative figures

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

Vacuum Gripper

ZPGB30J-7A-X2 18 19 19 25 ZP2-B30J ZP3P 20 JT2 SF ZP3PG20JT2SF-7A-X2 21 ZP3P-20JT2SF-W ZP3PA-T1JT-7A-X2 ZP3P 20 JT2 SF M ZP3PG20JT2SF-M-7A-X2 21 ZP3P-20JT2SF-WM ZP3P 32 JT2 SF ZP3PG32JT2SF-7A-X2 48 ZP3P-32JT2SF-W ZP3PA-T2JT-7A-X2 ZP3P 32 JT2 SF M ZP3PG32JT2SF-M-7A-X2 48 ZP3P-32JT2SF-WM ZP3P 20 JT5 SF ZP3PG20JT5SF-7A-X2 23 ZP3P-20JT5SF-WG ZP3PA-T1JT-7A-X2 ZP3P 25 JT5 SF ZP3PG25JT5SF-7A-X2

Air cylinder

(Same side) 20+55(n2)/2 n=2, 4, 6, 8 D-F5NT 10 1 switch 20 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7H D-Y7W 1 switch, 2 switches (Different side, Same side) 15 10 10+40(n2)/2 n=2, 4, 6, 8 Other qty. 15+40(n2)/2 n=2, 4, 6, 8 1 switch, 2 switches (Different side, Same side) D-Y69 10 D-Y7PV D-Y7WV 10+30(n2)/2 n=2, 4, 6, 8 Other qty. 1 switch, 2 switches (Different side, Same side) 20 D-Y7BA 20+45(n2)/2 n=

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

5For PROFIBUS DP K w For EtherNet/IPTM, PROFINET, EtherCAT, Ethernet POWERLINK K w and K e are used in combination with each other. K !7For PROFIBUS DP For DeviceNetTM (Plug) For PROFIBUS DP (Plug/B-coded) Plug (Male) K q For EtherNet/IPTM, PROFINET, EtherCAT, Ethernet POWERLINK RJ45 VProduct Table Description Application No. SMC part no.

SMC Pneumatic Clean Series

Appropriate tightening torque (Nm) Bolt Without auto switch With auto switch 6 8 10 10 1.06 M3 x 0.5 0.5 10 0.4 0.4 8 Allowable lateral load W (N) Allowable lateral load W (N) 0.3 0.3 8 Tightening torque Tightening torque 0.2 0.2 6 6 0.1 0.1 Allowable kinetic energy Caution 0 4 6 8 10 15 20 Stroke ST (mm) 0 4 6 8 10 15 20 Stroke ST (mm) When driving an inertial load, operate a cylinder with

SFOD-OMT0005CN

W-AREA1 (-) (+) WAREA ON (mm) W 1W 2 WAREA ON *W 1W 2 PARA W 1=W 2=0 WAREA OFF) W-AREA2 W-AREA2 (-) (+) ORG Correct Link Offset () Sensor type Sensor type () Option 1 Option 1 () Undefine No. 11 Undefine No. 11 () Undefine No. 12 Undefine No. 12 () *1 -45- 10.3 () ORIG direction ORIG direction 12 1CW [CW] 2CCW [CCW] ORIG mode Return to origin mode 12 1[] 2[SW]

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Length per roll (m) Tubing material Symbol T Material Symbol TI Material Nylon Soft nylon Polyurethane Nylon Soft nylon Polyurethane Metric size Metric size Symbol 20 20 m (Standard) Length Inch size TS TU TIS TIU Color Nylon Symbol B Symbol B Color Black White Red Blue Yellow Green Clear Color Black Blue White Soft nylon Tubing size Inch size W BU W Size Size Metric size Symbol Symbol R

Low Profile Guide Type

(mm) D-M9V D-M9WV D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A90V D-A96V D-A93V Bore size (mm) D-A90 D-A96 D-A93 D-M9 D-M9W Bore size (mm) Mounting pattern q, w Mounting pattern e 32 32 20 22 35 20 10 15 25 12 5 10 Mounting of Auto Switch As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.