Micro Mist Separator

Structural Drawing, Option and Replacement Parts 10 6. Bowl Assembly Specifications 11-18 7. Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-26 10-1. Bowl Assembly Replacement 23-24 10-2. Element Replacement 25-26 11. Disassembly Drawing 27 12.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

10 stations Size of P, EA, EB port Note) SU and TBU require one station. 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Location and size of A, B port 02 03 04 06 10 02B 03B 04B Side 1/4 Side 3/8 Side 1/2 Side 3/4 SIde 1 Bottom 1/4 Bottom 3/8 Bottom 1/2 Option Nil TBU SU W None With terminal box With SI unit Splash proof 3-11-18

Serial Transmission System Series EX250 Series EX500

Tie-rod base SS5V W 1 A1W D 05 U 10S Cassette base U SS5V W D 05 16S 1 A1W Enclosure IP67 Series DIN rail length specified 1 2 SV1000 SV2000 Standard length Nil 3 SI unit specification Specify a rail longer than the standard length.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

10 Air Slide Table Long Stroke Type Series MXY Construction @3 y w q r u #0 MX MTS !

AC Servo Motor Driver (SSCNET /H Type)

Refer to LECSS2-T Operation Manual,section 3.5 for input/output signal details. -10- 3.3.2 Source Sink I/O interfaces Connection example An example wiring diagram for Sink I/O is shown below Driver Servo amplifier () CN8 (Note 16) Short-circuit connector (Packed with the servo amplifier) 10 m or less driver) (Note 12) CN3 10 m or less 24 V DC (Note 10) 3 DOCOM (Note 15) Main circuit power

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

0.4 MPa External grip 0.4 MPa 0.3 MPa MHK 0.3 MPa 10 10 F 0.2 MPa 0.2 MPa MHS MHC 0 0 10 10 20 20 30 30 40 40 Gripping point L (mm) Gripping point L (mm) F F MHT MHS4-25D MHS4-25D MHY 50 50 Pressure 0.6 MPa Pressure 0.6 MPa MHW 40 40 F Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa -X 30 30 Internal grip 0.4 MPa 0.4 MPa 20 20 MRHQ 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 10 10 MA D0 0 10 10

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ7-20-03 . 1 set (manifold base) SYJ712-5LZ-01 . 2 sets (valve) SYJ700-10-1A . 1 set (blanking plate assembly) SS3YJ7-42R-03-01 . 1 set (manifold base) SYJ714R-5G . 2 sets (valve) SYJ700-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

Multi-Axis Step Motor Controller

2 w e !3 !4 r t y u i !5 !6 No.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Without adjuster type is not available for the 11-MXP6 series. 11-MXP How to Order MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicone-free + Low particle generation Stroke 5 10 5 mm 10 mm 22 Vacuum suction type With auto switch type is not available for the 11-MXPJ6 series.

AC Servo Motor Driver (MECHATROLINK-II type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2.

HRX-OM-W058

Applicable model HRS0 -A -20-T-R Rated flow (50/60 Hz) Note 1),2) L/min 10 (0.35 MPa) /14 (0.35 MPa) Maximum flow rate (50/60 Hz) L/min 17 / 20 Pump Maximum pump head (50/60 Hz) m 70 Output W 610 Recommended earth leakage breaker capacity A 15 Cooling capacity Note 3) W The cooling capacity reduces approximately 300 W from the value in the catalog Note 1) The capacity at Thermo-chiller outlet

Speed Controller with

Metric Size Applicable tubing 23 04 06 08 10 12 3.2 4 6 8 10 12 AS1002Fm TMH-23J TMH-04J TMH-06J AS2002Fm AS2052Fm TMH-06 TMH-08 AS3002Fm TMH-07 TMH-10 TMH-12 AS4002Fm TMH-13 Tubing size Applicable model The applicable TMH for the AS1002Fm-02 is not available.

IZx-OMR0035

Air flow SW:1 10 10 Air flow SW:10 5 5 Air flow SW:10 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance mm Installation distance mm 28 Doc.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

MXP10-10 A Width across flats 1.5 H 13 (Plug: M-5P) 2-M5 x 0.8 Piping port Width across flats 5.5 4-M3 x 0.5 depth 4 6.5 16.4 M3 x 0.5 7 4 3.7 21 20 8.5 depth 2.5 3 4-M4 x 0.7 A 0.5 19 +0.030 0 depth 2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 28 27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA Mounting base

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Servo Motor Controller (24 VDC)

) Side (10) No.

4

3 Port Solenoid Valve Direct Operated Poppet Type New New [Option] RoHS Vacuum applications 101.2 kPa 101.2 Power consumption 4 w 1 .8 w 4 w Standard type 1 .8 w (Existing product: 4.8 W) Energy-saving type (Existing product: 2 W) A single valve with various valve functions 54.5 (Universal porting type) N.C. valve N.O. valve etc.

KP/KPQ/KPG

Tubing Series10-TU Series 20m bundle Tubing size Metric size (series TU) 20 TU0425 10 BU 10-TU1208 10-TU1065 10-TU0805 10-TU0604 10-TU0425 O.D. mm Designation 8 10 5 6.5 12 8 2.5 6 4 4 I.D. mm Color Clean series B Black Black White (W) Red (R) Blue (BU) Yellow (Y) Green (G) Clear (C) Orange (YR) W White R Red BU Blue Tubing designation Y Yellow G Green C Clear YR Orange Specifications

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with