Compact Guide Cylinder

mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less Load mass m [kg] Load mass m [kg] 10 10 5 5 10 50 51 100 101 200 100 101 200 10 50 51 Stroke [mm] Stroke [mm] 17 Model Selection MGPK Series L L Plate Material Carbon Steel /MGPKL Horizontal Mounting m m MGPKL16

MQQ

4-N through M 0.2 D W K B + Stroke L A + Stroke M 0.2 E Bore size (mm) Stroke range (mm) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5 M3 x 0.5 61.5 6 6 29 9 M4 x 0.7 38 5 8 20 3.5 6.5 39.5 7 5 4 16 10 to 60 80.5 M4 x 0.7 70.5 8 8 36 11.5 M6 x 1.0 47 7 10 25.5 5.4 9 48.5 10 5 7 20 10 to 60 89 M5 x 0.8 79 10 10 40 12 M6 x 1.0 52 8 10 28 5.4 9 55 10 6 7 25 10 to 50, 75

MQQ

A + Stroke 4-FD C J G5-S Rear flange style: MQQLG 10, 16, 20 25, 28 Bore size (mm) Stroke range (mm) A L 2-FD 4-FD CV 10 10 to 40 75 8 16 10 to 60 88.5 10 MVGQ 20 10 to 60 97 10 FV FV M 25 10 to 50, 75, 100 104.5 12 CC 28 10 to 50, 75, 100 124 12 L FT FX B + Stroke FZ FX (Dimensions except A and L are same as rod side flange style.)

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

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M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M

10

Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T Z2K Z2L Z2M Z2N Z2P Z2Q Z2R Z2S Z2W Z2T Z3A Z3B Z3C Z3D Z3E Z3F Z3G Z3H Z3V Z3J A B C D E F H J K L M N Nil A B C D E F G H K L Z Nil XB A B D E H J L M Nil A B C D E F G H K L Z Nil XB A B C D E F G H J K L M N P Nil A B C D E F G H K L Z Nil XB A B C D E F M N P Q R S T U V W Y Z1A Z1B Z1C Z1U Z1D Z1E Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T

LEC-OM069xx

A warning will occur and the command will be ignored in the following 9 10 cases.

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M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

: (J) 0.98 3.92 14.7 58.8 MX Select a model from data D of Shock Absorber (RB series) of Best Pneumatics Vol. 10.

Secondary Batteries

P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R A, B port size (inch) A, B port size (metric) P, E port Applicable series P, E port Applicable series A, B port A, B port Symbol C4 C6 C8 C8 C10 C12 M Symbol N3 N7 N9 N9 N11 M One-touch fitting for 4 One-touch fitting for 6 One-touch fitting

Electric Rotary Table

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length (L) [m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 (5.5) (6.3) 15 Actuator side (14) (18) (Terminal

XL

-6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating

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17 18.6 20.8 M L Q A D N M O L Q A Note 1) D is maximum diameter.

Rotary Table/

range Actuation range A B Rotation range m 190 40 10 20 10 1 2 3 7 20.9 22.8 24.4 28.7 16.9 18.8 20.4 24.7 A A 190 35 10 20 10 190 30 10 15 10 When D-F9 is used 190 25 10 15 10 Rotation range m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

1.1

Specify the quantity of units necessary for use with your piping system. 29 Series HRG Dimensions [Dustproof filter set] HRG-FL001 HRG-FL005 A A (10) (25) (25) B (25) (25) (10) B Surface fastener HRG-FL010 A (10) (25) (25) B (390) (390) HRG-FL015 A (10) A (10) (25) (25) (25) (25) B (Large) (Small) B (390) (390) (mm) A B C Part no.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

NA G 3 x UA thread depth UB P.C.D.R (Mounting thread) 3 x SA through SB counterbore depth SC P.C.D.R (Mounting hole) Auto switch mounting groove positions (4 locations) MHS3-100D MHS3-125D 10 10 10 10 40 40 40 40 5 6.4 5 10 6.4 13 90 12 5 15 7 90 (mm) M 4 6 K 15 21 J 38 52 G 63 84 15 18 FZ 10 12 FX 59 74 FY 54 68 CA 18 23.5 EC 28 30 EO 40 46 DC 66 82 DO 78 98 B 134 166 AC 6 8 AA 96 122 AB

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Size: 10 to 200 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed switch Solid state switch D-M9 D-M9V, D-F9W, D-F9WV, D-F9BAL D-A9, D-A9V Rotation Size Operating angle m Operating angle m Operating angle m Hysteresis angle A Hysteresis angle Hysteresis angle A B B B A 10 10 10 10 10 10 10 90 80 65 50 45

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W MSQ MSZ (mm) CRQ2X MSQX Q2 L2 max Y Size (mm) L1 = X = Q2 = M Q1 = M 10 Y 3 M 4 X L1 max Q1 Size 7 to 8 L2 = Y = MRQ 10 15 Y 3.5 M 5 M4 7 to 14 X 3 8.5 to 9 15 20 Y 4 M 6 M5 8.5 to 18 X 3.5 10 20 30 Y 5 M 8 M6 10 to 20 X 4 13 30 40 Y 6 M10 M8 13 to 22 X 5 15 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

rail) 10-SV1000 10-SV1000 For 3 stations When a longer DIN rail is desired than the specified stations (Specify a longer rail than the standard length.) 10 One-touch fitting 3/8" One-touch fitting D20 For 20 stations 10-SV2000 10-SV2000 Note) For D0, only DIN rail mounting bracket is attached. 3/8" One-touch fitting 12 One-touch fitting 10-SV3000 10-SV3000 For mixed specifications (M)

Membrane Air Dryer

Applicable model $ $ $ 1/2 BM64 BM65 IDG30<A, IDG50<A IDG60<A, IDG75<A, IDG100<A With cap bolts (2 pcs.) and spring washers (2 pcs.) 1 RoHS Membrane Air Dryer/Single Unit Type Series IDG Single Unit Type Model Selection Made to Order Specific Product Precautions Unit Type How to Order IDG 02 10 Size M V 1 3 5 10 20 60 75 100 Accessory Symbol Type Standard dew point temperature and air flow