NARM Series

.19 (4.5) (25) (34) (21) (18) (56) (16) (9) (18) (19) (52) (9) (11.5) (4.8) NARM2000 .18 1.36 1.69 1.10 1.06 2.76 .79 .45 .94 1.10 2.60 .45 .65 .19 (4.5) (34.5) (43) (28) (27) (70) (20) (11.5) (24) (28) (66) (11.5) (16.5) (4.8) Dimensions by number of stations Model Symbol A C E F G H J K M P NARM1000 L1 1.42 2.17 2.91 3.66 4.41 5.16 5.91 6.65 7.40 8.15 (36) (55) (74) (93) (112) (131) (150

3 Port Solenoid Valve/

0.25 to 0.7 MPa (Same as operating pressure) Maximum operating frequency 30 times/minute Minimum operating frequency 1 time/week Operating and ambient temperature 14 to 122F [10 to 50C] (No freezing) Ambient humidity 20 to 90%RH (No condensation) Manual override None Pilot exhaust Individual exhaust Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance 150

VCC

Operating fluid Eliminate all solid material larger than 150 m in the fluid to avoid valve failure. Piping Caution 1. Piping to pilot port Condensation may be formed in the piping to the pilot port, due to factors such as its length. The life of the valve will be shortened if condensed moisture enters the pilot port.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

VCW

D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 T : Thread type 2 5.5 25 IN port 2-3/8 l=280 l=300 (V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 (44) W T R Z (Y) L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93 231

Thermo-dryer

Recommended for small flow rate (100 to 150 L/min). Filter (AME) Construction (Pneumatic/Refrigerant Circuit) Pneumatic circuit Refrigerant circuit Hot and humid air entering this product is cooled down by the cooler. The moisture condensed at this time is separated by the drain separator and exhausted automatically.

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

10 400 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Symbol Specifications Manufacture of intermediate strokes at 1 mm intervals is possible.

VR4151/4152

Inch size 1/4" 1/8" 5/32" Flow rate (l/min(ANR)) 170 100 120 150 IN OUT Effective area (mm2) 2.6 1.5 1.8 2.3 IN P1 Note) Flow rate is the value measured under a pressure of 0.5 MPa and a temperature of 20C.

3 Port Solenoid Valve Series VQ100

[dm3/(sbar)] 0.045 0.083 SYJ Valve specifications Electricity specifications b 0.28 2 3 0.28 Cv 0.012 0.021 VK ON: 3.5 ms, OFF: 2 ms ON: 3.5 ms, OFF: 2.5 ms Response time (1) VZ (2) 10 to 50C Ambient and fluid temperature Not required Lubrication VT (3) Non-locking push type/Locking type (Tool required) Manual override VP Unrestricted Mounting orientation Shock/Vibration resistance (4) 150

One-touch Fittings

P.150 Male run tee KQ2Y Use to branch a female thread in the same direction and at a 90 angle.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Note 4) 1 m (M): D-M9(W)(V) only Note 5) Lead wire length tolerance Model Lead wire length D-LC05 0.5 m D-LC30 3 m D-LC50 5 m Lead wire length Tolerance 15 mm 0.5 m 30 mm 1 m 90 mm 3 m 150 mm 5 m 1272 Prior to Use Auto Switches Common Specifications 2 Specific Product Precautions Refer to the Auto Switch Precautions on pages 8 to 11 before using auto switches.

3 Port Solenoid Valve Series VQ100 1

[dm3/(sbar)] 0.045 0.083 SYJ Valve specifications Electricity specifications b 0.28 2 3 0.28 Cv 0.012 0.021 VK ON: 3.5 ms, OFF: 2 ms ON: 3.5 ms, OFF: 2.5 ms Response time (1) VZ (2) 10 to 50C Ambient and fluid temperature Not required Lubrication VT (3) Non-locking push type/Locking type (Tool required) Manual override VP Unrestricted Mounting orientation Shock/Vibration resistance (4) 150

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

Lubrication Dustproof [Degrees of protection 0] (4) VZ Enclosure Shock/Vibration resistance (m/s2) Electrical entry 150/50 (5) Grommet, DlN terminal VT Standard 100, 200 VAC, 50/60 Hz; 24 VDC 220, 110, 48, and 24 VAC (50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or equivalent (130C) (6)

In-line Air Filter

200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74 6 ZFC75 8 0.1 MPa 0.3 MPa 0.5 MPa 0.1 MPa 0.3 MPa 30 30 Differential pressure [kPa] Differential pressure [kPa] 0.5 MPa 0.7 MPa 20 20 0.7 MPa 10 10 0 50 100 150 250 200 0 0 0 100 200 300 400 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3 MPa 0.1 MPa 0.3 MPa 30 30 0.5 MPa 0.5 MPa 20 20 0.7 MPa 0.7

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Please contact SMC in this case. 356 Series MGG Guide Cylinder Specifications JIS Symbol Standard Stroke Model (Bearing type) Long stroke (mm) Standard stroke (mm) Bore size (mm) 20 75, 100, 125, 150, 200 250, 300, 350, 400 25 350, 400, 450, 500 32 350, 400, 450, 500, 600 40 350, 400, 450, 500, 600, 700, 800 MGGM(Slide bearing) MGGL(Ball bushing bearing) 75, 100, 125, 150, 200, 250, 300 50

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 *Please consult with SMC for non-standard strokes as they are produced as special orders.