How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

upon the application Bearing type Slide bearing Ball bushing bearing MGQM MGQL Model 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Bore size (mm) Double acting Action Air Fluid 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure 12, 16 0.12 MPa Min. operating pressure 20 to 100 0.1 MPa Ambient and fluid temperature 10 to 60C (No freezing) 12 to 63 50 to 500 mm/s Piston speed 80, 100 50 to 400

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

3 Controller/Driver mounting Nil Screw mounting D DIN rail mounting* * DIN rail is not included. Order it separately.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

2 Controller/Driver mounting Nil Without cable (Without communication plug connector)*3 1 1.5 3 3*2 5 5*2 S Straight type communication plug connector*3 T T-branch type communication plug connector*3 Nil Screw mounting D DIN rail mounting* 11LEJS * DIN rail is not included.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body Hexagon lock nut Round lock nut J Nil Lock nut option Body size Indication symbol Panel mount type Symbol 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Made to Order Refer to page 622 for details. Applicable tubing O.D.

P

Description Material 1 Body SCS14A (SUS 316) 2 Needle SUS316 L4 3 Lock nut SUS316 4 Valve SUS316 5 Valve guide SUS316, NBR for low temperature L2 L3 6 Spring SUS316 7 Bolt SUS316 8 O-ring NBR for low temperature L5 9 O-ring NBR for low temperature Model Port size D H L1 L2 L3 L4 Note) L5 Mass g MAX. MIN.

HAW

Accessory (Option) Basic size Symbol Description Nil Applicable air compressor kW Symbol F With screw flange Screw type Reciprocating type D With auto drain Port size 2 2.2 7.5 7 Caution on Design HAW2 Size Applicable model 04 Symbol Rc 06 14 20 30 22 37 55 75 22 37 55 75 110 15 22 37 55 75 1 2 Rc 3 4 Rc 1 1 2 Rc 2 Warning HAW7 HAW22, 37 HAW55, 75 HAW110 1.

Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series ø 25, ø 32, ø 40

Standard stroke (mm) Bore size (mm) 25, 32, 40 50, 100, 150, 200, 250, 300 350, 400, 450, 500, 550, 600 1500 Stroke adjustment unit symbol For stroke adjustment unit, refer to page 1209. Intermediate fixing spacer is not available for end lock mounting side. Strokes are manufacturable in 1 mm increments, up to the maximum stroke.

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Separate switch spacers (BMG2-012) are required to retrofit auto switches (M9 type) on cylinders 25 to 63. 21 m type lead wire is only applicable to D-A93. Refer to page 1360 for details on other applicable auto switches than listed above. For details about auto switches with pre-wired connector, refer to pages 1648 and 1649. Auto switches are shipped together (not assembled).

LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEL25 Series LEL Electric Actuator/Guide Rod Slider Belt Drive Step Motor (Servo/24 VDC)

1 Made to Order Nil 1 3 5 Without cable 1.5 Nil D Screw mounting DIN rail mounting1 Nil X5 Standard product With magnet/switch rail 3 1 Only available for the controller types 6N and 6P 2 DIN rail is not included. Order it separately. 5 When Without controller is selected for controller types, I/O cable length cannot be selected.

VALVE, NAMUR INTERFACE, D/SOL, 4/5 PORT SOLENOID VALVE, 400 lb

This is a legacy product, and replaced byCDNA2F100-400-D-F5DWSC

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Bore Size: 075 (3/4"), Stroke: 400 (4"), Body Option: M (Male Rod End)

Controller (Step Data Input Type) Step Motor (Servo/24 VDC) LECP6 Series Servo Motor (24 VDC) LECA6 Series LECP6 Series LECA6 Series

Controller Actuator part number Part number except cable specifications and actuator options Example: Enter LEFS16A-400 for the LEFS16A-400B-R16N1. BC Blank controller Note) Compatible motor P Step motor (Servo/24 VDC) A Servo motor (24 VDC) Note) The dedicated software (LEC-BCW) is required.

Vacuum Ejector Series ZM

Compact and lightweight 15.5 mm width, 400 g (full system) ZX ZR ZM ZMA ZQ ZH ZU ZL Two-stage nozzle construction ZY The suction volume increase by the two-stage nozzle ZF ZP Vacuum pressure SP First stage nozzle diffuser performance ZCUK Second stage nozzle diffuser performance Air operated type AMJ Suction flow rate AMV Suction volume increase AEP Series ZM Applications HEP Application

Series: NCDA1 (Standard w/ Magnet), Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 400 (4"), Stroke: 0200 (2"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Series: NCA1 (Standard), Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 400 (4"), Stroke: 0300 (3"), Air Cushion / Rod Boot: J (Nylon Boot & Both Ends Air Cushion)

Series: NCA1 (Standard), Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 400 (4"), Stroke: 0250 (2 1/2"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs.

Series: NCA1 (Standard), Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 400 (4"), Stroke: 0600 (6"), Air Cushion / Rod Boot: K (Neoprene Boot & Both Ends Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs.

Series: NCA1 (Standard), Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 400 (4"), Stroke: 1000 (10"), Air Cushion / Rod Boot: K (Neoprene Boot & Both Ends Air Cushion)

Series: NCA1 (Standard), Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 400 (4"), Stroke: 1600 (16"), Air Cushion / Rod Boot: J (Nylon Boot & Both Ends Air Cushion)