3-Position Rotary Table

(CCW: Counterclockwise, C: Center, CW: Clockwise) C C C C CW CCW CW CCW CW CCW CW CCW Left 90: Right 90 Left 45: Right 45 Left 90: Right 30 Left 60: Right 90 Working Principle This model uses a 3-position 5-port solenoid valve (pressure center).

MH-OMY0004

C 1C 2 3 :MH-G04(30g) C 17 3-4. C C 1. Assy 18 3. 4. 5. 6.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

How to Order B 32 30 D C CQ2Y Standard B F9BW S 32 30 D C CDQ2Y With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

PSxx-OMU0008CN

R NPN2+1 B T PNP2+1 E S NPN2+1 D + V PNP2+1 1: F + 4 2 M SI3 1 P psi2 2 3 kPaMpa (2m ) W 2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02 G1/4 B2 TSJ1/4 2 2 () L() A A1 ZS-46-A1 C A3 ZS-46-E B ZS-46-B E ZS-35-B D ZS-46-D + F ZS-35-E -9No.PS-OMU0008CN-D / A ZS-46-A1 38L(2 ) C ZS-46-E 310L(2 ) ZS-46-B ZS-35-B ZS-46-D + ZS-35-E ZS-46-5F 5 2 m ZS-27-01 ZS-35-01 -

PSE540/560

ZS-28-C 1 pc. Connector for PSE300 PF2 Specifications IF Conforms to CE marking and UL (CSA) standards.

EXxx-OMN0035CN

(3)B180(1/2) (1) (2) (3) A B C D-sub (1) (2) (3)2 0.6 Nm -14No.EX-OMN0035CN-A -15No.EX-OMN0035CN-A () 2.5 mm0.4 mm 0.081.5 mm 2(AWG1628) 56 mm EX600-ZT1 -16No.EX-OMN0035CN-A EX600-DX B M12 (5 )4 8 C M8 (3 )8 8 P PNP C1 M8 (3 )8 8 N NPN D M12 (5 )8 16 E D-sub (25 ) 16 F (32 ) 16 M12 (4 ) EX600-DXB No. 1 LED 2 () 3 4 5 () -17No.EX-OMN0035CN-A EX600-DXC No. 1 LED

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

180 Angular Type Air Gripper Rack & Pinion Type MHW2 Series 20, 25, 32, 40, 50 How to Order M9BW 20 MHW2 D 1 Made to Order Refer to page 712 for details. 2 fingers Number of fingers 2 Number of auto switches Bore size 20 25 32 40 50 Nil 2 pcs. 20 mm 25 mm 32 mm 40 mm 50 mm S 1 pc. n n pc.

Air preparation filter

AMX-OMU0058-C Revision history A Service parts addition. October 2017 B Change unit of water droplet. September 2018 C Change Flow capacity.

IDX-OM-W011

IDX-OM-W011-B / Series IDF1E/2E/3E-10(-A,C,S) IDF3E-20(-A,C) IDF4E-10(-A,C,L,M,R,S,T) IDF4E-20(-A,C,L,M,R,T) IDF6E-10(-A,C,K,L,M,R,S,T) IDF6E-20(-A,C,K,L,M,R,T) IDF8E-10(-A,C,K,L,M,R,S,T) IDF8E-20(-A,C,K,L,M,R,T) IDF11E-10(-A,C,K,L,M,R,S,T) IDF11E-20(-A,C,K,L,M,R,T) IDF15E1-10(-A,C,K,L,M,R,S,T) IDF15E1-20(-A,C,K,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded

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seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Single 2-position Double Closed center Exhaust center 3-position Pressure center Series EVS1-02 Flow rate characteristics 14, 2 (PA, B) 4, 25, 3 (A, BEA, EB) Positions C 1.50 2.20 1.50 2.20 1.50 2.10 1.30 2.00 1.60 2.20 b 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.16 0.10 0.20 Cv 0.30 0.50 0.30 0.50 0.30 0.50 0.20 0.50 0.20 0.50 b

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Single 2-position Double Closed center Exhaust center 3-position Pressure center Series EVS1-02 Flow rate characteristics 14, 2 (PA, B) 4, 25, 3 (A, BEA, EB) Positions C 1.50 2.20 1.50 2.20 1.50 2.10 1.30 2.00 1.60 2.20 b 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.16 0.10 0.20 Cv 0.30 0.50 0.30 0.50 0.30 0.50 0.20 0.50 0.20 0.50 b

PF2D

0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

VNC

entry hole: G1/2 LQ LVN Manual override (Non-locking) TI/ TIL Pilot port PA PAX PB Main port Main port Rc Pilot port Rc A B C D E F H J K L Model 1 8 1 4 1 4 VNC5-32A VNC6-40A VNC7-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 229.5 247 270 197 214.5 237.5 55 63 74 17-4-25 6 Series VNC Flange Type Port size: 32F, 40F, 50F Electrical entry

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seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Single 2-position Double Closed center Exhaust center 3-position Pressure center Series EVS1-02 Flow rate characteristics 14, 2 (PA, B) 4, 25, 3 (A, BEA, EB) Positions C 1.50 2.20 1.50 2.20 1.50 2.10 1.30 2.00 1.60 2.20 b 0.10 0.20 0.10 0.20 0.10 0.20 0.10 0.16 0.10 0.20 Cv 0.30 0.50 0.30 0.50 0.30 0.50 0.20 0.50 0.20 0.50 b

PSxx-OMR0001CN

4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -20No.PS-OMR0001CN-J 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5 C(4 ) C(6 ) F(G ) H 13 13.6 19 -21No.PS-OMR0001CN-J 2 ISA3--B-L () ISA3--B-L 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 C(4 ) C(6 ) F(

LECP6_C

, 1 (3m) CN4 CN1 EMG C24V M24V 24V 0V 0V 20 - 2 DC24V EMG () DC24V 0V Ry Ry U (1 ) BK RLS EMG Ry C 24V 24V 0V 0V M 24V (2 ) BK RLS Ry EMG C 24V 24V 0V M 24V 0V (3 ) BK RLS Ry EMG C 24V 24V 0V M 24V 0V OFF 21 - 3() DC24V M24V EMG () DC24V 0V Ry Ry U (1 ) BK RLS EMG C 24V Ry 24V 0V M 24V 0V (2 ) BK RLS EMG C 24V Ry 24V 0V M 24V 0V (3 ) BK RLS EMG C 24V Ry 24V

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(Panel adaptor A+Panel adaptor B) ZS-22-A Standard Specifications Positive pressure Item Vacuum 1OOkPa{1.02kgticm2} type 1MPa{IO.2kgl/cm1 ~pe Panel adaptor A Z$2201 Model ZSE4B ZSE4B I ZSE4B ISE4LB ISE4LB I ISE4LB ISE4B ISE4B ISE4B -0-25 -0 -26 -0 -65 -Ql-25 -0-26 -0-65 -0-25 -0-26 -0 -65 Switch Pressure 10 -101kPa 1 0 1OOkPa -0.1 1MPa Panel adaptor B ZS-22-02 ; display range {75 -760mmHgl

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

Steam Valve

Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101 93 109 5 6 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 61.5 74 637 A VND Series Port size: 32A, 40A, 50A H (Valve open) Indicator