AP10PA

(Top view) r r e Pressure gauge unit 2) Code Unit psig/bar MPa w q w q w q 1) Refer to gauge guide (P.1058) for gauge specifications.

Exhaust Cleaner for Clean Rooms AMP Series

OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2,

AC Servo Motor Driver (MECHATROLINK-II type)

Bit 3 of SW2 SW1 Station Address Bit 3 of SW2 SW1 Station Address OFF 0 Disabled ON 0 50H OFF 1 41H ON 1 51H OFF 2 42H ON 2 52H OFF 3 43H ON 3 53H OFF 4 44H ON 4 54H OFF 5 45H ON 5 55H OFF 6 46H ON 6 56H OFF 7 47H ON 7 57H OFF 8 48H ON 8 58H OFF 9 49H ON 9 59H OFF A 4AH ON A 5AH OFF B 4BH ON B 5BH OFF C 4CH ON C 5CH OFF D 4DH ON D 5DH OFF E 4EH ON E 5EH OFF F 4FH ON F 5FH Turn the power

IDX-OM-W014

D A B P G [AC200V] C F J M K L N H 4x13 [AC100V] [AC200V] 10 (:1.9m) (17) :0.8m mm A B C D E F G H J K L M N P Q IDU3E Rc3/8 440 498 285 2751 15 455 IDU4E Rc1/2 13 483 31 568 470 270 3001 80 2402 15 32 230 802 355 422 IDU6E Rc3/4 15 485 IDU Series 6-3 6 3 IDX-OM-W014 6 6-4 IDU3E4E AC100/100,110 (50/60Hz) CM 1 2 ILS FM PTC OLR PC 1 PTC PTC ILS CM AC200/200 (50/60Hz) AC230V

VFR2000-OMM0001

T D Y :DIN +-No.1 No.2 T :68mm E :2.32.8mm D :68mm Y :4.57mm AB+ B+COM -COM ET :1.25-31.25-3S1.25Y-3N 1.25-31.25-3S1.25Y-3N1.25Y-3S 1.25Y-3S(D Y ) -8No.VFR2000-OMM0001 3.23.7mm ( 0.33mm ~ 0.2 2 1.7mm ( ) (1mm) -9No.VFR2000-OMM0001 VFR200 VFR210 (AB) N.C.

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

High-precision Digital Pressure Switch ( compatible)

[March 2018] E: Contents revised in several places. [June 2018] F: Contents revised in several places. [October 2018] G: Contents revised in several places. [March 2020] H: Contents revised in several places.

ITVH

Therefore, supply pressure regulated by a built-in regulator e passes through the air supply solenoid valve q and is applied to the pilot chamber r. The pressure in the pilot chamber r increases and operates on the upper surface of the diaphragm t. As a result, the air supply valve y linked to the diaphragm t opens, and a portion of the supply pressure becomes output pressure.

Manifold Regulator Modular Type ARM2500/3000 Series

B C D E F G H I J K L M N O P Symbol Model A ITVH ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 ITVX 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 PVQ Manifold stations Dimensions by the Number of Stations 10 Model Symbol VY1 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VBA VBAT ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

2 e !1 No. q w e r t y u i o !0 !1 !2 Material Note Description Body A Handle Body B Needle Needle guide Lock nut Panel nut U seal Spacer Cassette Packing O-ring PBT PBT Brass Brass Brass Brass Brass HNBR PBT POM, Stainless steel NBR NBR Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Note) !

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note Platinum silver Platinum silver Black Black q Description Sub-plate Body Aluminum die-casted Stainless steel w e Mounting bolt and gasket are not attached. : Thread type Spool/Sleeve Adapter plate Thread Type r Resin t Resin End plate Nil Standard Rc y Resin Piston NPT N Option T NPTF G F Replacement Parts Description Material Part no. No.

S Couplers Series KK/KKH/KK13

2 e !4 !5 !4 !5 !

Flow sensor

E: Contents revised in several places. [September 2016] F: Contents revised in several places.

LFE-OMY0008

[%F.S.] 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 [s] [S] [MPa] [MPa] [MPa] [MPa] [ [ [ [ ] ] ] ] 2 69 No.LFE*-OMY0008 / / / / A B C 1 V 1.1 V 5 V 4 mA 4.4 mA 20 mA [L/min] LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 70 No.LFE*-OMY0008 2x )M12 () 1.6mm A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67

CG1-SMV13_en

Year Month 2015 2016 2017 2025 2026 2027 T U V D E F Bore Size (mm) Torque 10% (N.m) Jan O TO UO VO DO EO FO Instruction Manual CG1*N25&100-*Z-X2992 Air Reservoir 32 2.9 Feb P TP UP VP DP EP FP 40 4.9 Mar Q TQ UQ VQ DQ EQ FQ 50 11.8 Apr R TR UR VR DR ER FR 63, 80 24.5 Do not service or attempt to remove product and May S TS US VS DS ES FS machinery/equipment until safety

JXCx-OMT0030CN

LECGPR1 1 2 3.4 3LEC LEC 4. 4 LEC 4 LEC 4 5 CN1~CN3 5. 8 - 6 DC24V LEC LEC LEC 12.4 LED LED PWR CN2 STAT CN2TB/PC BUS STAT IF ALM SF BF LED 10.LED ALM LED 7 12.LEC 9 - 3 31 DC24V10% 200mA 300mA LEC 5 57words 57word UL , UL1310 Class2 Profibus Profibus DP V1 DP slave 0125 ID 1414 GSD Dsub 9.6k 19.2k 45.45k 93.75k 187.5k 500k 1500k 12000k (bps) (m) 1200 1000 400

Coolant valve

SGC200/300/400: Special request X1(SF4-X240) SGC500/600/700: Installed pilot valve VO307 Caution 7 SGC200-OMM0002-F SGC / SGH Series Coolant Valve / Precautions 5 Be sure to read this before handling.

SI unit for PROFIBUS DP

E: Contents revised in several places. F: Contents are added. [July 2016] G: Contents are added.

SI unit for CC-Link

EX122-SMJ1 SY3000/5000 EX124U/D-SMJ1 VQ2000/4000/5000 IP65 Plug-in SY3000/5000/7000 SV1000/2000/3000 VQC1000/2000/4000 Direct EX126D-SMJ1 IP67 -31No.EX-OMB0014-H Dimensions EX120-SMJ1 EX121-SMJ1 -32No.EX-OMB0014-H EX122-SMJ1 EX124D/U-SMJ1 -33No.EX-OMB0014-H EX126D-SMJ1 -34No.EX-OMB0014-H Revision history C: Complete revision D: Terminal screw change Switch cover change (EX124U/D, EX126D) E:

Fieldbus system (SI unit – PROFIBUS DP compatible)

Wiring Communication wiring Cable: Shielded twisted pair cable (Type-A cable) Impedance 135 to 165 ohm(3 to 20 MHz) Capacity between conductors 30 pF/m or less Conductor resistance 110 /km or less Cable diameter 0.64 mm or more Conductor area 0.34 mm2 or more Transmission speed & Maximum wiring length Baud rate (kbps) 9.6 19.2 45.45 93.75 187.5 500 1500 12000 Wiring length (m) 1200 1000 400