PFxx-OMJ0005CN

10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I

ML1C

Applicable bore Shock absorber model ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 Side Support Side support A 2 x G E E F 2 x H A B Side support B 2 x J A B (mm) A B C D E F G H J Part no.

Digital Flow Switch (Integrated display type)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM710--C/E 10 (5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006

Rotary Actuator

The end angular speed is obtained by: Table (9) Allowable kinetic energy Allowable kinetic energy (J) t Size With Without Rotation angle rad (90:1/2rad) (180:rad) Rotation time s Air Cushion Air Cushion 30 0.01 50 0.05 0.98 63 0.12 1.50 Kinetic energy E is obtained by: 80 0.16 2.00 100 0.54 2.90 The allowable kinetic energy of the actuators with a cushion is the maximum absorbed energy

NVZseies

Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .

HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

CEx-OMQ0011

100 50 50 0 0 0 5 m/s m/s 19 4-3.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

1 w i e r t LVM !

VXR21/22/23

Water hammer relieving Check valve mechanism is provided in the E side of the supply orifice D and E and supply into the pressure action chamber B can be controlled with two stages by moving the diaphragm assembly r. After release of the energy, when the open amount of the main valve C becomes small, E is blocked. A low valve closing speed relieves the water hammer.

2/3 Port Valve for Various

Water hammer relieving Check valve mechanism is provided in the E side of the supply orifice D and E and supply into the pressure action chamber B can be controlled with two stages by moving the diaphragm assembly r. After release of the energy, when the open amount of the main valve C becomes small, E is blocked. A low valve closing speed relieves the water hammer.

Suction Guard (Produced upon receipt of order) FHG Series

G1/2 10 100 1000 1 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG32 Viscosity: 45 mm2/s Filter material: Micromesh Nominal filtration: 74 m e Element replacement When the pressure difference reaches 24 kPa during filter operation (triggering the differential pressure indicator), stop operation and either wash or replace the element.

Speed Controller with

Dimensions, flow rate characteristics and options are the same as standard product (brass needle guide). 8 AS-FG Series Construction w e r t w e r t q o !0 !1 i y u q o !0 !1 i y Component Parts No.

AMD

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122

VS 8-2/VS 8-4

e r w t q w q t VSR8-2-FG-DVSS8-2-FG-De r e r w q t w q t VSS8-2-DFHG FIG FJG VSR8-2-DFHG FIG FJG e r e r w q t w q t VSR8-2-DFDAG FDBG FDCG e r w q t Replacement Parts VSR8-2-DFDAG FDBG FDCG VSR8-2-DFHG FIG FJG VSR8-2-FG-DVSR8-2-FG-SVSS8-2-DFHG FIG FJG VSS8-2-FG-DVSS8-2-FG-SDescription No.

LEJ-OM002xx

No Initial value Recommended value Number of command input pulses per revolution *3 PA05 100 100 Electronic gear numerator *3 PA06 1 100(Positioning mode: 10) Electronic gear denominator *3 PA07 1 24 16 8 30 20 10 27 42 Feel length multiplication (STM) (Multiplier) PE02 0 0(Less than stroke 1000)/ 0001(Stroke 1000 or more) Home position return type PE03 0010 3Stopper type *4 Home position

Digital Flow Switch

L Accumulated volume per pulse (Pulse width = 50 ms) Select from 100 L/pulse or 1000 L/pulse.

KQ2

(100) 71 (71) 44.5 46 112 116 16 Reference dimensions after R thread installation.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

Clean Air Module

200 200 0.1 MPa 100 100 0 1 2 3 4 5 6 7 8 9 11 10 0 0.1 0.2 0.3 0.4 0.5 Number of needle rotations Fluid pressure (MPa) Model: LLB3-1-P1R1VSF and LLB4-1-P1R1VSF Supplied pressure: 0.5 MPa Pressure setting condition and measured position: Pressure is set by turning the regulator knob with ON/OFF valve turned off.

VXZ

80 60 10 60 40 1 AC DC AC/DC Maximum 10 (1) 5 (2) Minimum Note 1) Dew point is below 10C Note 2) Below 50 cSt Note 3) D, E, N, P, etc. in parentheses represents option symbol.