ZMA Description q w e r t y Note Body Valve cover Adapter plate Cover Tension bolt Flow adjustment screw AMJ Misc. ZMA-HCB Electroless nickel plated Replacement Parts No. Description u i o !0 !1 !2 Part no.
-B 40 W 50 L/min 1000 Hz 0.55 0.4 High speed response required for both ON and OFF -E 80 W 100 L/min 650 Hz 0.55 0.55 -F 40 W 100 L/min 550 Hz 0.7 0.55 -J 80 W 150 L/min 600 Hz 0.6 0.75 -K 40 W 150 L/min 500 Hz 0.8 0.75 * Current needs to be limited.
T 04 06 08 10 12 4 6 8 10 12 VMG Construction Description Material Component Parts No. q w e r t y u i o !0 !
Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !
8 Fine Lock Cylinder Double Acting, Single Rod Series CLJ2 16 How to Order 16 60 R E L CLJ2 Without auto switch 60 R E H7BW L 16 CDLJ2 With auto switch Number of auto switches Built-in magnet Nil S n 2 pcs. 1 pc. n pcs.
Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) 3 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC 4 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC 5 q Ambient
Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) 3 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 460 VAC 4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 460 VAC 5 q Ambient temperature
kPa Supply valve/Release valve combination With supply and release valves With supply valve K1 K2 Output specifications Rated voltage (Applicable only when the vacuum pressure sensor specification is D for digital pressure switch for vacuum) Electrical entry DC specifications 5 6 V S R 24V 12V 6V 5V 3V G H L LN LO M MN MO Lead wire length 0.3 m Grommet Lead wire length 0.6 m N P A B C D E
17 - No.ZB-OM00301 V Ass y V Assy V Assy ( ) V Assy 2 1V V Assy 2V Assy Assy 18 - No.ZB-OM00301 O Assy V Assy Assy V Assy Assy 19 - No.ZB-OM00301 1TK1-123 2 3 1VKJ 2 3 1 0.1 2 0.1 3 0.15 -0.2 2 20 - No.ZB-OM00301 () ( ) ONOFF () 0.1Nm 1 ON 0 ) () () 1 (PA) 0 (AR) () 21 - No.ZB-OM00301 AXT661-12 0.2~0.33mm 2 (1.7mm) ) DXT170-71-1 3.2~3.7mm (DXT170-75
Caution -4- Specifications Model S F E 11 Port size Male thread type Plug-in type One-touch fitting type Max. flow capacity Symbol Port size Symbol Port size Symbol Applicable L/min (ANR) tube O.D. 11 M50.8 3 3A 4 3F 4 30 42 R1/8 4B 6 4G 6 65 52 R1/8 5C 8 5H 8 130 53 R1/4 130 73 R1/4 7D 10 7J 10 200 Accessory (Bracket) S F E B R 3 Symbol Applicable model 3 SFE3 4 SFE4 5 SFE5 6 SFE7
Dust cover caulking (Finger part only) Grease for food 523 Series MHK2 Construction Double acting Single acting @0 e !8 !7 w o Open condition Normally open !9 t y !5 i u !6 q r !1 !0 !2 Normally closed Closed condition !4 !3 Component Parts Material Note Description Material Note No. No.
Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm
E C Padlock mounting position C D D SUP SUP. A OUT IN A OUT IN 1 2 3 B B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3
Models Symbol (A) 2 Effective area mm (Cv factor) Operating pressure range MPa {kgf/cm} Port size Valve model Weight g (grommet type) VKF33 3.6 (0.2) 2 3 0 to 0.7 {0 to 7.1} VKF33 Y (for low power consumption, DC2W) 2.7 (0.15) 2 3 3 (R) 1 (P) Note 1) M5 x 0.8 Rc(PT) 1/8 Body ported VKF33 E (for long loading time) 2.7 (0.15) 80 2 3 VKF33 V (for vacuum) 3.6 (0.2) 2 3 101.2kPa to 0.1 {1Torr
Screw for bracket Panel mounting bracket (Standard) Type E snap ring Plate Operation on the panel front permits mounting. Holes for mounting bolts are not necessary. (Mountable panel thickness is 5 mm maximum.) Plug connector Clamp bolt Socket connector Socket case PAT.PEND With One-touch fitting Seal Plug case Tubes of different sizes can be used simultaneously.
Low Voltage Directive This directive is applied to products, which operate above 50 VAC to 1000 VAC and 75 VDC to 1500 VDC operating voltage, and require electrical safety measures to be introduced. Simple Pressure Vessels Directive This directive is applied to welded vessels whose maximum operating pressure (PS) and volume of vessel (V) exceed 50 bar/L.
5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.
Description Body Note Baking finish Material q Aluminum alloy w w Aluminum alloy Baking finish Housing e Aluminum alloy Baking finish Drain guard y r Foam rubber Float IN t Stainless steel + Rubber Pilot valve y Resin Lever u Brass Flushing button t i Orifice r o Rubber Diaphragm Replacement Parts 10-1 e No. Description Part no. ADH-D400 Note 10-2 !
(page 75) 8000 0x1F40 0 R Inclination of flow rate PD a F32 N Measurement related Refer to "Inclination and intercept".
XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.