FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

B Made to Order For details, refer to page 14.

Digital Flow Switch ( compatible)

The straight piping length shall be 8 cm or longer in order to maintain 3%F.S. of the specification. -94No.PF-OMY0002 Dimensions PFMC7501/7102/7202 Symbol Model Piping port size A B D E F H K L N PFMC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Bracket dimensions

CE

70500mm/s 5,12 5,12 6 4,5 CE1B12 () (500 3000) 7 14 69+ 93.5+ CE1B20 () 2x5.5 (500 3000) 4xM6x1 15 14 78+ 106+ CE1B32 4x5.5 (500 3000) 8xM6x1 20 90+ 131+ () 14 CE1B40 (500 3000) 4x5.5 8xM6x1 20 136+ 177+ 14 () CE1B50 (500 3000) 4x6.6 8xM8x1.25 20 144+ 193+ () 14 CE1B63 4x9 8xM10x1.5 20 (500 3000) 145+ 194+ () 14 2004 12 A 2014.4 B 2017.8 C 2017.11 4-14-1, Sotokanda

Vacuum gripper

-60 3.0 4.7 8.0 12 18 29 48 -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -12No.

Suction cups with flange

4.7 8.0 12 18 29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -6No.

IDX-OM-W026

14 14-1 / IDF Series 14-1 A2021/5 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

Rotary Cylinder Series MRQ Size: 32, 40 1

(Clamp lock) MA12 x 26 ETP-K-12 CLH-12 x 18 MA14 x 28 ETP-K-14 CLH-14 x 23 Please consult with manufacturers concerning further information on specifications. Backlash Precautions The rotary motion part has a double-rack construction. The pinion gear has a hexagonal hole, and a slight clearance exists between this hole and the hexagonal flats of the piston rod.

CQM

bracket Switch mounting nut Hexagon socket head cap bolt (M3 x 0.5 x 14 spring wasdher 2 pcs.)

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

If a product different from the one ordered is installed, injury or damage can result. -14- 2.5 Operating Environment Warning 1.

Digital Flow Switch

The straight piping length shall be 8 cm or longer in order to maintain 3%F.S. of the specification. -70No.PF-OMS0002-B Dimensions PFMC7501/7102/7202 Symbol Model Piping port size A B D E F H K L N PFMC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Bracket dimensions

2-Color Display

10 14 14 10.85 10.85 10.85 C4L C6L N7L One-touch fitting 4 mm 5/32 inch elbow One-touch fitting 6 mm elbow One-touch fitting 1/4 inch elbow 20.7 22.85 23.45 15.6 16.1 16.1 9.3 11.6 12 10.85 10.85 10.85 6 Series ZSE30A(F)/ISE30A 2-Color Display High-Precision Digital Pressure Switch With bracket Z/ISE30A(F) Option 2 A1 30 42.5 Bracket A (Option unit part no.: ZS-38-A1) 25 20 20 45 30 2 30

SYJ300-OMU0003

No.SYJ300-OMU0003 SYJ Series EX510 Assy (SY3000-37-81A--N) SY3000-44-3A1 8 SYJ300 (SY3000-37-81A--) Assy 8 SY3000-37-81A-2-N 14 SY3000-37-81A-2-5 3 14 21,32SA SS5YJ3SY3000-37-81A-1-N 58 SYJ300 M1.7 0.12N.m SY3000-37-81A-1-4 3 58 SYJ500 M2.5 0.45N.m 42,43SA SY3000-37-81A-2-N 18 20,40, SS5YJ5SYJ700 M3 0.8N.m SY3000-37-81A-2-5 3 18 SY3000-37-81A-3-N 18 21,41SA SS5YJ7SY3000-37-81A

3 Port Solenoid Valve SYJ300/500/700 Series

-3 Manifold gasket DXT201-14-2 Manifold gasket DXT201-14-1 Applicable base sub-plate SS3YJ7-40 SS3YJ7-41 SS3YJ7-42 SS3YJ7-41R SS3YJ7-42R Manifold base Applicable base SS3YJ7-20 SS3YJ7-21 SS3YJ7-21R Manifold base 18 18

Dedicated Controller

F H L 6mm 10mm 20mm Note) The following options are necessary for operating and setting the controller. LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Micro-Mist Separator with Prefilter Series AMH

---Ht-t---t-+-H I--i IN o I w c.

XMD/XYD Series

Dimensions C D L1 L2 Fd Fc C Fn (Fc) (KF Flange) (K Flange) (CF Flange) K B J H A G A Unit: mm Model A B C D Fn Fd Fc G H J KK P.C.D.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

-- NCM seies

o 0.62 322 1.28 14 oaa {4) 250 u-24 0.50 .621 .621 0.25 0.93 0.38 1t-1E .251 .250 0.75 0.25 0.34 0.75 o.75 o.1a cts16 0.75 120 o.62 3.19 3.8:t 343 t06 {17-l _312 6t-21 0.50 .621 .621 0.38 1 . 1 2 0.38 5t-i E .25r .250 0.75 0.25 o.3a 3.97 o.8a o_aao.24 qi-14 o.75 1.30 0.62 334 1.25 125 t 2 5 t 1 k ) 375 \-24 o.aE .749 .749 o.11 r.32 0.50 .251 o.25 0.41 rt.4 1.06 r.06 0.25 sa-l6 0.46 r.62 0.78