Table of Contents

B 19.5 25 29.5 C 6.5 7 14.5 A 8 8 8 8 10 10 Model MGQ32 MGQ40 MGQ50 MGQ63 MGQ80 MGQ100 Detailed figure of a section Detailed figure of b section a a a b MGQ32 to 50 MGQ63 to 100 8-20-10 11 Compact Guide Cylinder Series MGQ Proper Auto Switch Mounting Position (Detection at stroke end) Minimum Stroke for Auto Switch D-Z7/Z80 D-Y5/Y6/Y7(V) D-Y7W(V) 1 pc. 2 pcs. 5 10 5 5 10 15 Auto switch D-Z7

AC Servo Motor Driver (Pulse input type/Positioning type ）

frame 10 A 20 Note 1.

AC Servo Motor Driver (Network card type ）

10 8.

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

4/5 Port Solenoid Valve

Ported/SS5YJ3-41Stations -M5, [ ]: AC (Lead wire length) 91.7 [96.1] Approx. 300 C4 N3 For (Built-in one-touch fitting) Grommet (G) For M5 (Pitch) P = 10.5 16 1/8 (P port) 10 Manual override 1/8 (P port) 36.4 10 10 61.7 [63.9] 60.9 [63.1] 21.4 78.8 [83.2] R R B B B B B 7.8 39.5 38.7 36.5 11.5 18 4.3 21.5 (4.4) P A A A A A 3 1/8 (R port) (Station n) (Station 1) 2-4.5 (For mounting) L1 L2

NCQ2/CQ2

13.5 19 21.5 20.5 26.5 31.5 B 10.5 11 13 13.5 14 19.5 22 21 27 32 B 15.5 16 18 18.5 19 24.5 27 26 32 37 B 7.5 8 10 10.5 11 16.5 19 18 24 29 B 7 12.5 14.5 13.5 19.5 25 A 2 5 5 A 6 9 9 9.5 12 16 14 16.5 19.5 24 A 4.5 7.5 7.5 8 9 13 11 13.5 16.5 21 A 5 8 8 8.5 9.5 13.5 11.5 14 17 21.5 A 10 13 13 13.5 14.5 18.5 16.5 19 22 26.5 A 2 5 5 5.5 6.5 10.5 8.5 11 14 18.5 A 2.5 6.5 4.5 7 10 14.5 Bore

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Table of Contents

size ISO size 2 Series VQ7-8 ISO size 2 0.96n + 0.77 (n: Stations) Max. 10 stations 3/8 1/2 1/2 3/4 3-10-27 28 Series VQ7-8 DIN Terminal Type VV72-2n-3/8, 1/2 118 142 67 9 118 142 9 34 20 2-1/8 14 Indicator light P , R1, R2 port for Rc 3/4 only U side U side 18 R4.5 60(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA Courtesy

Compact Cylinder

(mm) Bore size (mm) Stroke (mm) Without auto switch With auto switch C D E H J K L M N O W Z A B F P A B F P 35 5 28 5.5 M5 x 0.8 45 38 32 9 depth 7 34 7 M8 x 1.25 14 45 4.5 13 16 5.5 49.5 14 1/8 7.5 40 10 33 7.5 1/8 50 43 41.5 5 34.5 8 51.5 44.5 40 9 depth 7 1/8 7 40 14 52 M8 x 1.25 5 13 16 5.5 57 15 1/8 8 46.5 10 39.5 8 56.5 49.5 48.5 10 40.5 10.5 58.5 50.5 50 11 depth 8 1/4 8 17 50 64

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

L (10) 8 Dimensions (24) (35) Applicable fittings size d 4 Model A L D 10-KQ2P-04 16 32 6 6 10-KQ2P-06 18 35 8 8 10-KQ2P-08 20.5 39 10 10 10-KQ2P-10 22 43 12 12 10-KQ2P-12 24 44.5 14 10-KQ2P-01 16 31.5 5 10-KQ2P-03 16 32 6 10-KQ2P-07 18 35 8.5 10-KQ2P-09 20.5 39 10 10-KQ2P-11 22 43 11.5 5.5 Rail mounting pitch 12.5 0 1 2 3 4 5 6 7 8 9 No.

Fluoropolymer Piping Equipment

Port size 1 2 1 2 1 2 3 4 5 6 8 1 2 3 4 1 2 3 1 2 3 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7 A A B A B C D A B C D A B C A B C A 1/8" 1/8" 1/8" 1/4" x 5/32" 1/8" 1/4" 1/4" 6 x 4 1/8" 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 1/4" 3/8" x 1/4" 1/8" 3/8" 1/2" 1/4" 1/4" 3/8" 1/2" x 3/8" 3/8" 1/2" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 3/8"

Electric Actuators

Mep 2000 a = 1000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer

Table of Contents

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Table of Contents

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

V100

P and R port Type 40R Applicable solenoid valve SYJ514RSYJ524RHow to Order SS3YJ5 40R 05 01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8 Note) For

Air Cylinder Series CM2

9 9 8 CZ 19 19 19 30 F 13 13 13 16 GL 6 9 9 11 GK 3.5 4 4 4 GA 73.5 83.5 83.5 90.5 D 8 10 12 14 CX 10 10 10 15 BN 80 90 90 CD 9 9 9 10 BC 38 45 45 52 B1 13 17 17 22 A 18 22 22 24 AL 15.5 19.5 19.5 21 BP BQ BZ 57.5 69 69 76 GB 8 8 8 11 Bore (mm) 20 25 32 40 Stroke range 1 8 1 8 1 8 1 8 1 8 1 8 1 8 1 8 20 26 26 32 Up to 300 Up to 300 Up to 300 Up to 300 100.5 DMM M8 x 1.25 ZZ 207 221 223 267

Table of Contents

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

Smooth Cylinder/Low Speed Cylinder

B A B A B A B A B A B A B A B A B A B A B Bore size 40 50 63 80 100 6 4 3.5 1.5 6 3 1 0 0.5 6.5 2 4 11.5 10 3 0 0 4.5 0 2 9.5 8 3.5 1.5 5.5 3 1 0 0.5 6.5 2 4 11.5 10 3.5 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 3 5.5 4 2.5 3 9 4.5 6.5 14 12.5 1.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 9 7 6 6.5 4.5 8 10 17.5 16 4.5 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 8 10.5 9 7.5 8 14 9.5 11.5 19 17.5 6.5 6.5

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L A L D Applicable fitting size d Model 10-KQP-04 16 32 6 4 10-KQP-06 18 35 8 6 10-KQP-08 20.5 39 10 8 10-KQP-10 22 43 12 10 10-KQP-12 24 44.5 14 12 10-KQP-01 16 31.5 5 1/8" 10-KQP-03 16 32 6 5/32" 10-KQP-07 18 35 8.5 1/4" 10-KQP-09 20.5 39 10 5/16" 10-KQP-11 22 43 11.5 3/8" Type 16, Cassette base Type 10, Tie-rod base Series Manifold type SUP block disk EXH block disk 10 SV1000-59-1A SV1000

KJ

Model Port A size Port B size No. of Port A Porting Port A Port B Model 6 8 4 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R 8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 One-touch fitting One-touch fitting 6, 10 1 4 3 8 KM12 One-touch fitting Rc female thread 6, 10 KM13 One-touch fitting One-touch fitting 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main