AW20-B to AW60-B

Example) AW30K-03BE-1N-B B AW 30 03 BE K q w e r t y q Body size 20 30 40 60 Symbol Description w With backflow function Nil Without backflow function K Note 1) With backflow function + e Pipe thread type Nil Rc N Note 2) NPT F Note 3) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 r Port size 10 1 + a Mounting Nil Without mounting option B Note 5) With bracket H With set nut (for panel mount

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

E C Padlock mounting position C D D SUP SUP. A OUT IN A OUT IN 1 2 3 B B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

S

U side Base mounted plug-in 3 1 2 Stations D side 9

Digital Flow Switch Series PFMB7 2-Color Display ® (200 L type only)

Option 1 W Nil DIN Rail Mounting Bracket (Order Separately) With lead wire with connector (2 m) Connector cover (Silicone rubber) ZS 33 R With lead wire with connector (2 m) ZS-33-F S Stations ZS-33-D ZS-33-D S 1 2 3 4 5 1 station 2 stations 3 stations 4 stations 5 stations IN IN N Note) If an accessory is required, order separately using ZS part numbers.

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + H Mounting Without mounting option With bracket With set nut a Nil B Note 4) + Without auto drain Float type auto drain (N.C.)

Series AL modular style lubricator provides accurate lubrication of downstream equipment. The oil drop rate is adjustable depending on equipment requirements. The AL modular design allows connection with other SMC air preparation equipment. Atomizes lubricant into fine particles at uniform rate, Drip rate easily monitored with sight dome, Can be refilled under pressure, High-response time

4-channel Flow Monitor ( compatible)

Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.

IDX-OM-Y002

1-3 1.3 Waste Disposal . 1-5 1.4 Limited Warranty and Disclaimer/ Compliance Requirements . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Name and Function of Parts . 2-1 Chapter 3 Transportation and installation . 3-1 3.1 Transportation . 3-1 3.2 Installation . 3-2 3.2.1 Environment . 3-2 3.2.2 Installation . 3-2 3.2.3 Air piping . 3-3 3.2.4 Replacement of auto drain . 3-4 3.2.5 Electrical

EXxx-OMK0006

Slave1 Mapping (1600h RPDO Mapping Parameter) 1600h_sub0 = 2 1600h_sub1 = 6320 01 20 (Object 6320h Sub-Index 1, length 32-bit) 1600h_sub2 = 6320 02 20 (Object 6320h Sub-Index 2, length 32-bit) Slave2 Mapping (1600h RPDO Mapping Parameter) 1600h_sub0 = 2 1600h_sub1 = 0007 00 20(Object 0007h (Unsigned 32) Sub-Index 0, length 32-bit) 1600h_sub2 = 6320 01 20(Object 6320h Sub-Index 1, length 32

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

ATX-OM-F003E

Outer dimensions and descriptions of each part 4Outer dimensions and descriptions of each part 1) Outer dimensions HAW2/7 HAW22 to 110 2VHAW110-30 Flange (mm) Model A B C D E F G H J K L M N P Q R S T U V W Y Z ZA HAW2-04 360 190 83 35 270 35 130 203 159 159 182 209 60 60 94 4.5 10 1/2 1/2 1/2 HAW7-06 570 390 83 35 480 35 130 203 159 159 182 209 60 60 94 4.5 10 3/4 1/2 1/2 HAW22-14 948 575

VEX-OMV0001

VK300-82-2-07 DC6V 6V VK300-82-4-51 () VEX1300-03 DC12V 12V VK300-82-4-06 G36-4-01 DC24V 24VD VK300-82-3-05 DC48V 48VD VK300-82-3-53 2 AC DC24V DC12V VEX1-11-2 DIN LED NL: LED (VEX110112011301 ) D R R R () (3.57) IP65() 7 VEX-OMV0001 VEX1 Series DIN (VEX110112011301 ) (VEX150117011901 ) 1) (G) DIN (D) () 2) 3) 4) 1) 2) 1)0.5Nm15% 2)68mm 3)Y (+) 1) (-) () 2) 3) 1)0.5Nm20%

Process Pump

PAB-OM-H007-D PRODUCT NAME Process Pump MODEL / Series / Product Number PAF3410 Contents Safety Instructions P.2 to 3 1. Precautions for handling P.4 2. Precautions for installation -P.5 3. Description and function of individual port -P.5 4. How to use -P.5 to 6 5. Maintenance and check -P.6 6. Specification and how to order P.7 to 8 7. Discharge capability -P.9 to 10 8.

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: S (All Single Wiring), Valve Stations: 2 Stations, P, E Port Location: D (D Side), A, B Port Size: 02 (1/4), Thread: N (NPT), Mounting: D (Din Rail Mounting w/DIN Rail)

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Valve Stations: 2 Stations, P, E Port Location: D (D Side), A, B Port Size: 02 (1/4), Thread: T (NPTF), Mounting: D (Din Rail Mounting w/DIN Rail)

Information

LED for power supply, LED for alarm 5 to 40C Parameter setting Indication LED Operating temperature Dimensions LC6C220AD Dedicated teaching box LC51T1 02 TEACH 42 97 POWER ALM PARA AL-RES MON JOG I/O TEST 38 130 STOP SMC LC5-1-T1 TEACHING BOX 96 35 RET ESC/ $MODE 50 21 2

AME

Model AME250 AME350 AME450 AME550 AME650 AME850 AME150 12000 (1) 12000 Rated flow (l/min (ANR)) 500 1000 2000 3500 6000 200 Port size (Nominal size B) 1 8 1 4 3 8 , , , , , , , , , , 1 4 3 8 1 2 3 8 1 2 3 4 1 2 3 4 1 1 3 4 1 1, 1 2 1 2 1 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa. It varies depending on operating pressure.

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi