SMC Corporation of America
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Air or fluid leakage Check if air or fluid are leaking from the piping. 11 After energizing, the display and output can drift. For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time. Insufficient warm-up time Product failure Replace the product.

Fittings & Tubing Air Cylinders Rotary Actuators 10 9+ST 4 x M3 x 0.5 thread depth 3.5 8 2.7 6.7 2 x M3 x 0.5 thread depth 3 (Piping port) Steel ball 4.5 15 M3 x 0.5 thread depth 3.5 Vacuum suction port 24.5 25 Note) 11-, 22-: Vacuum suction port 12-, 21-: Relief port ST 13.4 47+ST 11 1.2 37+ST 5.5 4.5 10+ST 3.8 3.8 11 2.75 M3 x 0.5 x 3 L M8 x 1.25 x 8 L (Bolt holder) (Hexagon socket set

Configuration Minimum equipment and wiring requirements to get started 1 Provided by customer Ex) 1-Phase 200 VAC (*1) 7 Provided 6 1 by customer 8 2 3 N PC 3 4 5 9 C D 11 21 10 4 (*2) U 2 Electric Actuators Ex) LEF V W Provided by customer 3 PLC (CC-Link master unit) 11 (*1) Refer to LECSC2-T Operation Manual, Chapter 4 for further details if the power supply voltage is 3-Phase 200VAC.

Settable range : 10...988 (1.0 kPa...98.8 kPa) Combination conditions with other parameters : 10 H1 P1-1 (50) ... ... ... ... ... 16 2 R/W 0x0032 Vacuum confirmation hysteresis (H1) of CH15 (50) 3.4.3. Pressure P2 (Index 66) Table 3-11.

6 x M5 x 0.8 thread depth 10 (A, B, C common view) 50 +0.02 0 (A, B, C common view) 3 x 5 depth 10 16h9 0 0.043 2 10 38.5 22 (76) 70 11 25 2 12 0 0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed: 19 2 x M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 502 Series MHR2/MDHR2 Rotary Actuated Air Gripper 2-Finger Type With auto switch (Built-in magnet) : MDHR2-30R 76 73

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

21.6 70.4 Fitting size VAC/SET Straight R Elbow S Elbow T Elbow U 8 8.5 11 14 Elbow V 26.5 6 1/4" 8, 5/16" 10, 3/8" 10.5 10.5 10.5 11 21 21 21 21 27.5 27.5 28.5 30.5 1 1.5 4 7 65 26.6 40.5 5.2 7 Options One-touch Fittings for Vacuum Regulator Bracket Assembly Bracket For IRV10(A) P601010-17 For IRV20(A) P601020-17 One-touch fitting for IRV10(A) 51A C6 VVQ1000 Bracket Fitting type Fitting

(For the part number of the dew point indicator, refer to pages 10 and 11.) 3.

C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed: 19 2-M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 12-5-16 17 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 With auto switch (Built-in magnet): MDHR2-30R 76 73 B 3-M5 x 0.8 thread depth 10 MDHR2-30E Port Location P .C.D.43 (Mounting thread) MHZ 80 MHF 120 MHL MHR

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

ZFB300-10 10 (N)ZFB101-05 53 24 17.5 316" 48 26 22.5 12.5 15 50 15.5 14.4 12.8 8.5 (N)ZFB101-07 54 24.2 17.7 14" APPLICATION T O E J E C T O R S Y S T E M Inch size (N)ZFB201-07 52 28 65 24.5 13.5 27.2 19.7 16 61 17.5 16.6 15.2 14" 9.5 (N)ZFB301-11 57 30 70 27 14.5 30.2 21.7 17 65 21.5 8 18.5 38" 11 (N)ZFB401-13 64.5 34 87.5 30.5 16.5 34 24 21.5 81 25.6 23 21.7 12" 13.5 H O W T O O R D E

Hyrodless Monosashi-kun (with Stroke Adjustment Unit, X417) 31 Chapter 9: Construction / Parts List 32 Chapter 10: Cushion Capacity 10-1. Cushion Selection 33 10-2. Absorbing Capacity of Air Cushion, Stroke Adjustment Unit 34 10-3. Adjusting Method 35 Chapter 11: Stopping Operation 11-1. Over run 36 11-2.

Model (Standard) Model Pressure range (1) VY1 Indication unit Connection thread Note MPa GP46-10-01 to 02 GP46-10-01 to 02L2 GP46-10-01 to 02L5 0 to 1.0 G 1 8 R MPa 1 4 R PPA Note 1) Do not apply pressure more than the maximum display pressure. This will cause a malfunction. Be sure to read the precautions in page 14-11-15 for selection and installation.

No.EX-OMS0014-A PRODUCT NAME EtherNet/IPTM Compatible Fieldbus System MODEL / Series / Product Number EX500-GEN2 EX500-S103 EX500-DXP# Table of Contents Safety Instructions 3 Product Overview 9 System construction 9 EX500 GW unit Model Indication and How to Order 10 Summary of Product parts 10 Mounting and Installation 11 Installation 11 Wiring 12 LED Display 17 Setting of EtherNet/IPTM using

A 4 A 4 81 (Closed center) 14.4 3.5 2n x V2, V3, V4, M3 <4(A), 2(B) port> V2: 2 Barb fitting V3: 3.2 Barb fitting V4: 4 Barb fitting M3: M3 thread Indicator light 36.2 With plug connector/light Formula L1 = 7.5n + 8.9, L2 = 7.5n + 17.9 n: Station (Maximum 20 stations) Dimensions n L 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 23.9 31.4 38.9 46.4 53.9 61.4 68.9 76.4 83.9 91.4 98.9

Rc1/8 62 9 10 40 40 60 101 111 M32 x 2 Rc1/8 67 10 11 53 53 77 114.5 125 Use a thin wrench when tightening the piston rod.

Operating Parameters Status Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Vacuum to 250 psig (1.7 MPa) Vacuum to 125 psig (0.9 MPa) 1000 psig (6.9 MPa) 8000 psig (55.2 MPa) 14 to 160F (10 to 71C) (No freezing) 1) 0.29 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .