1.63

12.5 13 15 16 20 A 11 10.5 12 14 13.5 16.5 B 7 8.5 9 11 12 16 A 6 7.5 9.5 9 12 B 8 8.5 10.5 11.5 15.5 Hs 24.5 26 29 33 38.5 45.5 Hs Hs 22 24 26.5 30.5 36 43 A 7 6.5 8 10 9.5 12.5 20 25 32 40 50 63 20 25 32 40 50 63 32.5 35.5 39 44.5 51.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting. 514 Auto Switch Mounting MGPW Series Minimum Stroke for

3

With arm Port side CK1 Rotary direction: L During unclamping (Extension end) Rotary direction: R During unclamping (Extension end) M CLK2 N With Arm Model (mm) I N O P U V 4 5 8 11 29 36 20 25 8 11 M3 x 0.5 M4 x 0.7 MKB12-Z MKB16-Z CLKG CKQ CLKQ 10 mm Clamp stroke M O I P Model Rod state CK CLK 20 mm 30 mm Retracted Extended Retracted Extended 28.5 46 31.5 49 38.5 66 41.5 69 48.5 86 51.5

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

AIR CYLINDER

Inspection Follow the procedure of the table 11 for inspection after assembly. Table 11. Inspection items Items to be inspected Criteria and test method Criteria Remarks 1 Dimension Measure dimensions of main parts As per drawing, catalog and specifications. 1.Finish of each part should be No defect shall be observed by view. good.

E-P HYREG ® Series VY1 1

4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4

HRX-OM-R039

Check of the accumulated operation time 11. Press the [SEL] key once. The accumulated operation time is displayed on the digital display. PV SV Displays the accumulated operation time. Refer to Table 5.4-2 for the display.

10

[mm] Adjustment bolt (Mountable on either right or left) A Model A B C D E F MM MHL2-10DZ-X28 22 15.5 2.5 7 4 2 Max. when adjusted: E M5 x 0.8 MHL2-10D1Z-X28 11 16 MHL2-10D2Z-X28 11 16 MHL2-16DZ-X28 27.5 18.5 3 8 B 9.5 9 M6 x 1 MHL2-16D1Z-X28 13.5 20 MHL2-16D2Z-X28 13.5 20 MHL2-20DZ-X28 32.5 21 4 12 MM 7.5 7 M8 x 1 MHL2-20D1Z-X28 8.5 9 MHL2-20D2Z-X28 8.5 9 MHL2-25DZ-X28 38 26 5 Closing stroke

MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB

V

R A I R S U C T I O N F I LT E R S E R I E S (N)ZFB ACCESSORIES A I R S U C T I O N F I LT E R S E R I E S (N)ZF1B (N)ZFB E L E M E N T I-34S-A (N)ZFB100, 101 I-35S-A (N)ZFB200, 201 I-36S-A (N)ZFB300, 301 I-395-A (N)ZFB401 B O D Y S I Z E T U B E S I Z E OD M M 04 4 06 6 08 8 10 10 05 3/16 07 1/4 11 3/8 13 1/2 100 Max 20 ln/min 200 Max 50 ln/min 300 Max 75 ln/min 101 Max 20 ln/min 201 Max

3 Port Solenoid Valve

Replacement Parts Plug connector assembly (for plug lead) Sub-plate Lead wire length S07014A Port size S070S M3 M3 M5 M3 female thread M5 female thread 150 mm 300 mm 600 mm 1000 mm Nil 3 6 10 Gasket Mounting screw Valve model S070A S070B S070M Gasket No. S070A-80A-1 S070B-80A-1 S070M-80A-1 Valve model S070B S070C Mounting screw No.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Nil S n Rc NPT Nil TN TF 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25,

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Nil S n Rc NPT Nil TN TF 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25,

Digital Flow Switch (Integrated display type)

Otherwise, chattering will occur. 9: This function is available when the model includes an analogue output. 10: When selecting 0 to 10 V, refer to the analogue output graph for the allowable load current. 11: Standard condition (STD): 20 [oC], 101.3 [kPa] (Absolute pressure), 65 [%R.H.]

Activated Carbon Filter

Bowl assembly specifications 11 to 13 7. Assembly of Optional parts 14 8. Troubleshooting 15 9. Replacement work procedure 16 to 22 1) Element assembly (AMK20) 16 to 17 2) Bowl assembly (AMK20) 18 1) Element assembly (AMK30/AMK40) 19 to 20 2) Bowl assembly (AMK30/AMK40) 21 to 22 10. Exploded Drawing 23 11.

Escapements Series MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB

•

-m;;:r~t 1~ 2M6 Screw depth 11 1 5 2-M6 Screw depth 11 ' ~ Lsii S ~ 60 L 4L.I Applicable clamp Part No. A cylinder , Maleual :Casl iron Malerial: Carbon steel I Matefial : Cast lIon . Part No.

Clean Regulator/Fluororesin Type

SRF 1 07 11 0 S S 1 With nut Body size 1 3 5 Fitting type Pilot port thread type Made to Order (Refer to page 887 for details.)

MGQ

For details, refer to page 8-30-32. 8-20-11

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)