30

(mm) a b Note 2) Effective area (mm2) Applicable tube b Q Weight (g) Note 1) D2 Note 1) D1 D1 L1 L2 L3 M1 M2 N O Model 3.2 4 6 8 10 12 4 6 8 10 12 16 KQB2T23-04 KQB2T04-06 KQB2T06-08 KQB2T08-10 KQB2T10-12 KQB2T12-16 3.8 7.1 16.4 36 56 108.5 8.5 11 20 29.8 41.3 58 3.2 3.2 4.2 4.2 4.2 4.2 5.6 5.6 8 8 8 8 4.1 4.4 6.4 7.1 8.1 9.1 9.1 11.4 13.7 16.6 18.7 24.6 8.3 9.1 11.4 13.7 16.6 18.7 14.2 15.6

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 0.5 25 Air N2 Thermal type Argon (MEMS) CO2 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal New New type Air N2 (MEMS) 1 L/min 5 500 Bypass flow type 10 1000 PF2A 0.1 L/min 1 10 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal Air N2 type (Thermistor) 5 L/min 50 500 5 L/min 150 3000 300 6000 10 L/min 12000 600 Features

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

JXCx-OMY0008

External Connections 20 5.1 PWR: Power supply connector 20 5.2 MOT: Motor connector, ENC: Encoder connector 20 5.3 SI: Serial I/O Connector 20 (1) Connecting the teaching box 20 (2) Connection with a PC 21 5.4 IN, OUT: EtherCAT communication connector 21 6.

PFxx-OMX0002

Input of set value Use the or buttons to set the flow value that will output 5 V (10 V) or 20 mA. The entered flow value can be in the range: 10% of the max. rated flow, to the upper display limit. Return to function selection mode. Press the S button to set.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

auto switch model No. of auto switches mounted D-M9V D-M9WV D-M9AVL D-M9 D-M9W D-M9AL D-Y7WV D-Z7 D-Z8 D-Y69 D-Y7PV D-Y59 D-Y7P D-Y7W D-Y7BAL 5 10 15 20 10 5 10 15 20 1 pc. 10 10 20 25 15 10 10 15 20 2 pcs.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 835 MXP/MXPJ6 1122Air Slide Table Dimensions: MXP12 1122Z 3 Metal stopper V K Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers

7.4

stations 76 10 Rc1/8 SS0752-C Manifold pitch: 8.5 mm Page 750 C Kit: Connector Max. 20 stations 115 20 M5 thread C2 (2) C3 (3.2) C4 (4) N1 (1/8") N3 (5/32") Rc1/8 Note 2) 115 20 S Kit: Serial transmission (EX510) Max. 16 stations Base Mounted SS0755-CC Manifold pitch: 7.5 mm Page 750 M3 (M3 thread) V2 (2 Barb fitting) V3 (3.2 Barb fitting) V4 (5 Barb fitting) C Kit: Connector Max. 20 stations

2/3 Port Valve for Various

Dimensions (Orifice Size: 10 mm) Normally Closed: VXP2130 Grommet: G Conduit: C (67) (52) 20 23 (67) (52) 20 39 270 10 290 10 G 1/2 VC (5.5) (2.3) (2.3) (5.5) VDW 80 86 63 69 66.5 73.5 80 86 71 77 (33) 36 (33) 36 (27) 30 VQ (7.5) (27) 30 (7.5) Bracket 11 14 11 14 VX2 IN OUT IN OUT Bracket 24 26 50 2-Rc 1/4, 3/8, 1/2 (28) (28) 24 26 50 2-Rc 1/4, 3/8, 1/2 VX 22 28 40 22 28 40 VX3 DIN terminal

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

80 P1 60 15 60 40 10 40 Air consumption Q1 Qmax 20 5 20 Suction flow Maximum suction flow Flow characteristics are expressed in ejector vacuum pressure and suction flow.

Digital Flow Switch (Integrated display type)

I max. 92% 8% 90% 10% PFM710 80% 20% 0.2 to 7.0 L/min 0.2 to 7.4 L/min 0 to 7.4 L/min 3.80 V 15.2 mA 70% 30% 60% 40% 92% 8% 0.5 to 25.0 L/min 0.5 to 26.3 L/min 0 to 26.3 L/min 5.00 V 20.0 mA 90% 10% PFM725 80% 20% 0.5 to 20.0 L/min 0.5 to 21.0 L/min 0 to 21.0 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 1.0 to 50.0 L/min 1.0 to 52.5 L/min 0 to 52.5 L/min 5.00 V 20.0 mA 90% 10% PFM750 80% 20%

PFxx-OMY0005

L/min 20 to 2000 L/min Instantaneous flow 10 to 1050 L/min 20 to 2100 L/min Set flow rate range 2 Flow specifications Accumulated flow 0 to 9,999,999,990 L Instantaneous flow 1 L/min 2 L/min Lowest configurable increment Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.)

DOC1023125

Speed[mm/s] Stroke Range 701 to 800 20 to 550 12 to 330 6 to 180 3 to 90 24 to 750 16 to 500 8 to 250 4 to 125 30 to 1140 20 to 760 10 to 350 5 to 175 801 to 900 24 to 610 16 to 410 8 to 200 4 to 100 30 to 930 20 to 620 10 to 280 5 to 140 Actuator specification 901 to 1000 24 to 500 16 to 340 8 to 170 4 to 85 30 to 780 20 to 520 10 to 250 5 to 125 1001 to 1100 30 to 660 20 to 440 10 to 220

Lubrication Equipment

-l06 to 10 ALD900-l12 to 20 D.P.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

20 10 10 1.

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

to +60 (4 to +140) 5 to +50 (+23 to +122) 8-6: 20; 8-8: 15, 8-10: 10 8-6: 5; 8-8: 5, 8-10: 5 Max. operating frequency (cycle/sec) 8-6: 10; 8-8: 10, 8-10: 20 8-6: 3; 8-8: 3, 8-10: 2 Lubrication Not required Manual override Non-locking push type Enclosure Dusttight Coil rated voltage 100 VAC, 110 VAC, 200 VAC, 220 VAC, 24 VDC Allowable voltage range (%) 15 to +10% of rated voltage Coil insulation

KA

(mm) Applicable fitting size d 3.2 L Weight (g) D A M Model Urethane Soft nylon Applicable tubing KAR23-04 9.6 4 33.5 34.5 36.5 18.5 18.5 17.5 18 15.5 3.4 2.9 2.0 1.8 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 KAR04-10 39.5 37 39.5 10 3.3 2.5 KAR06-08 8 18.5 KAR06-10 6 12.8 KAR06-12 42 4.7 12 20 17 10 3.0 13.1 13.1 Applicable fitting size d 8 KAR08-10 41 4.0 18.0 18.0 10 20 18.5 15.2