Clamp Cylinder Series CK1

N Speed controller valve Top width across flats 3 45 W 30 17 10 10 45 M16 x 1.5 14 3 45 Hs 30 IA IB 40 35 4 x M6 Thread depth 2 20 38 Width across flats 17 R15 F Shaft: 12 Hole: 12 0.050 d90.093 +0.027 H8 0 97 80 + Stroke 192 + Stroke Unit: mm Clevis width CKG1A: 16.5 CKG1B: 19.5 +0.3 0 +0.4 0 Symbol F IA IB N S W Hs Bore size 40 40 50 63 44 52 47 52 55 5 45.5 55 60 58 49 58 5.5 51 57 69

Air Slide Table Series MXQ

F A F Lr 6 6 6 Lr = 40mm MXQ6-30 0.015 0.03 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 Table displacement mm Table displacement mm Table displacement mm MXQ6-50 0.04 MXQ6-20 MXQ6-40 0.010 0.02 MXQ6-20 MXQ6-40 0.03 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 40 80 120 10 20 30 10 20 30 0 Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf

Rotary Table

Replacement parts (With external shock absorber type) Description Size 10 20 30 50 P891010-10 P891020-10 P891030-10 P891040-10 Seal kit No. Description Qty. No. Description Qty. No. Description Qty. No. Description Qty.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

10 units.

Compact Cylinder with Air Cushion Series RQ

B + Stroke 4-FD L FT FX FZ A + Stroke Rod end male threads Rear flange type Double clevis type Applicable L1 Double clevis type Rod end nut mm Bore size (mm) Stroke range (mm) Double clevis type/RQD, RDQD A B CL CD CT CU 4-N Cap bolt CT 20 to 100 32 37 64 10 5 14 74 20 to 100 40 44 73 10 6 14 83 CD hole H10 Shaft d9 30 to 100 50 49.5 85.5 14 7 20 99.5 mm Bore size (mm) CW CX CZ L L1 N RR

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

10 units.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

A B N E J B (F) T 2-U PB PA A B Pilot port threaded type With flow rate adjustment (Max.

IZx-OMR0035

Air flow SW:1 10 10 Air flow SW:10 5 5 Air flow SW:10 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance mm Installation distance mm 28 Doc.

ZSE30A(F)/ISE30A

A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = | (A-B)/2| n-1 Min. B Released Work 1 Work 2 Work n D Peak/Bottom value indication Atmosphere This function constantly detects and updates the maximum (minimum) value and allows to hold the maximum (minimum) pressure value.

PFxx-OMX0007

(Page 47) 7100 0x1BBC 0 R Analogue output value U16 N 0x0 to 0x0BB8 (0 to 3000) Analogue output type only Refer to "Inclination and intercept to the unit specification" (Page 38) Inclination of flow rate PD a F32 N 8000 0x1F40 0 R Measurement related Refer to "Inclination and intercept to the unit specification" (Page 38) 8010 0x1F4A 0 R Flow rate PD intercept b F32 N 8020 0x1F54 0 R Flow

VM

VH Twist selector (3 position) VM230-02-35R/B/G/Y VM250-02-35R/B/G/Y Panel mounting hole VHS JIS Symbol 2 port EXH port 5 port EXH port (5 port only) (5 port only) 0.5 MPa supply 40 N F.O.F. 45 T.T.

3 Port Solenoid Valve Series SYJ300/500/700

1) (Station n) (Light/surge voltage suppressor) + + + + + 48.5 [55.5] + + + + + 33.1 20 A A 20 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" A A 5 5 (Pitch) P=10.5 15.5 M5 x 0.8 (A port) (Pitch) P=10.5 15.5 Station n L1 L2 3 52 44 Station 20 230.5 222.5 6 83.5 75.5 8 104.5 96.5 10 125.5 117.5 Station 2 41.5 33.5 4 62.5 54.5 5 73 65 7 94 86 9 115 107 11 136 128 12 146.5 138.5

VQ

VQZ Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17

1.1

Specify the quantity of units necessary for use with your piping system. 29 Series HRG Dimensions [Dustproof filter set] HRG-FL001 HRG-FL005 A A (10) (25) (25) B (25) (25) (10) B Surface fastener HRG-FL010 A (10) (25) (25) B (390) (390) HRG-FL015 A (10) A (10) (25) (25) (25) (25) B (Large) (Small) B (390) (390) (mm) A B C Part no.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter

FQ1

sealing method Options Flat gasket (D.O.E) 1 N/A Bracket Quick plug Nil B P Note) Specity seal material in place of "" (N for NBR or V for FPM). 4.

CEx-OMP0016

Please execute calibration of the device on customers own responsibility. 22 Chapter 7: How to Order 7-1 Cylinder (Hyrodless Monosashi-kun) Mounting No. of autoswitch B Standard None 2 Bore size s 1 25 25mm n n 32 32mm 40 40mm Type of autoswitch (See catalog) Control method None With brake and scale No. of adjustment unit S With scale only None 2 B With brake only S 1 Stroke adjustment unit

17

Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

CEx-OMQ0011

Nm N M1 M M3 W W2 W W4 ML2B25 10.0 1.2 3.0 200.0 58.0 65.0 100.0 ML2B32 20.0 2.4 6.0 300.0 80.0 96.0 150.0 ML2B40 40.0 4.8 12.0 500.0 106.0 140.0 250.0 ML2B25 ML2B32 ML2B40 J 0.43 0.68 1.21 18 ML2B/M1 ML2B/W1 ML2B/W1 0 0 0 Nm 0 0 0 N N 0 m/s m/s m/s ML2B/M2 ML2B/W2 ML2B/W2 N m N N m/s ML2B/M3 m/s m/s 20 ML2B/W3 ML2B/W3 10 Nm 5 3 2 1 N N m/s m/s m/s ML2B/W4 500 N 00 N

Rotary Table: High Precision Type

Find the moment of inertia I for the rotation of shaft (B). B 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teeth=b 5.