ZP

(26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

ZP

(mm) Female thread One-touch fitting AMJ 4 tube 6 tube 8 tube M5 x 0.8 Rc 1/8 Misc. 33 30 32 10 to 16 133 139 128 20 to 32 159 167 158 40, 50 Weight by Stroke (g) Pad dia.

C85

0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40) 60 29 37 0.5 76 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) (40) 50 34 23 30 0.7 63

CY1

CY1HT25-PS CY1HT32-PS Above Nos. 28, 29, 30, 31, 32, 33 Seal kits are sets consisting of items 28 through 33, and can be ordered using the order number for each bore size. 52 Series CY1H Magnetic Rodless Cylinder High Precision Guide Type Dimensions Single axis type/10 CY1H10 4-M4 x 0.7 thread depth 6 46 39.5 23 1 CY1H10-B Guide central axis 15 1.3 46 Piping port surface 95 + Stroke 54 2-

Compact Manifold Regulator Series ARM5

Direct mount VEA DIN rail mount VY2 Mounting position Direct mount Mounting position Symbol L R VBA VBAT Left DIN rail mount Right AP100 L side end block R side end block L side end block R side end block 33 33 50 50 50 50 SMC SMC SMC SMC 3.5 33 3.5 10 3.5 33 10 3.5 12.6 10 10 12.6 Direct mount DIN rail mount 481 Series ARM5A/B DIN Rail VVQ1000 90 7 L dimension Enter the No. for the desired

Basic type / Direct mount type Series CY3B/CY3R

C Q + Stroke Shock absorber Shock absorber Side plate Section IF (CY1L6) (mm) A d D J HP G EB FA EA C B Model HT HS HO HI HG HB H GP FB JK HA CY1L6 CY1L10 7 8 7.6 26 6 3 6.5 M4 x 0.7 16 14 25 9 11 10 27 36 6.5 6 8.5 10 12 33 7.5 12 3 6 4 8 M5 x 0.8 18 21.5 33 13.5 14.5 17.5 34 50 5 9.5 6 PA (NB) (NA) (N) Q RW L M NN MM PB T ta tb W Z LD QW Model CY1L6 CY1L10 PW TT 54 12 40 6 24 19 M8 x 1.0

C85

0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40) 60 29 37 0.5 76 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke (mm) (40) 50 34 23 30 0.7 63

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Type SS5YJ3-20,SS5YJ3-21P The 3 way valve can be used on the 4 way manifold by simply sealing off the unused "R" port with plug VJ3000-33-1.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion With air cushion type is not available for 21-/22-CJ2.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion Air cushion type is not available for 21-/22-CJ2.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Keyway dimensions l b Model Port size Rc A B C F H J K S U W BA BB CA CB SA SB SC SD SE DD (h9) D (g6) CDRA1BS50 CDRA1BS63 CDRA1BS80 CDRA1BS100 5 5 5 5 36 41 50 60 2.5 2.5 3 4 25 30 35 40 8.5 10 12 12.5 25 30 40 45 15 17 20 25 8.5 10 12 12.5 34 34 34 34 46 57 70 85 17 20 23.5 25 33 33 33 33 14 21 29 39 62 76 92 112 48 60 72 85 M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 M12 x

ZP

44 50 60 11 14.5 20.5 13.8 15.1 17.5 26.5 29 33 44 50 60 11 14.5 20.5 14.0 15.3 17.7 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Keyway dimensions l b Model Port size Rc A B C F H J K S U W BA BB CA CB SA SB SC SD SE DD (h9) D (g6) CDRA1BS50 CDRA1BS63 CDRA1BS80 CDRA1BS100 5 5 5 5 36 41 50 60 2.5 2.5 3 4 25 30 35 40 8.5 10 12 12.5 25 30 40 45 15 17 20 25 8.5 10 12 12.5 34 34 34 34 46 57 70 85 17 20 23.5 25 33 33 33 33 14 21 29 39 62 76 92 112 48 60 72 85 M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 M12 x

HEC-OM-S008

31 0D 02 31 32 35 30 30 03 3F 38 0D Answer 25.0 deg.C. 31 Temperature setting (without writing FRAM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02

7ND9071en

6.4 Diaphragms.33 6.5 Communication board.33 7 ERROR MESSAGES.34 7.1 Failsafe errors.34 7.2 Alarms.34 7.3 Errors.34 7.4 Warnings .35 7.5 Notifications.36 8 TROUBLE SHOOTING.36 9 ND9000 WITH LIMIT SWITCHES.37 9.1 Introduction .37 9.2 Installation on a valve controller .40 9.3 Electrical connections.41 9.4 Adjustment.41 9.5 Removal of the limit switches for accessing the valve controller.41

CG5-S

+ Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA Piping port 2-M5 x 0.8 Clevis pin ( ) GB MM CA CB D NA A CX +

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Applicable solenoid valve SYJ314, SYJ314M SYJ324, SYJ324M VQD Plug (VJ3000-33-1) Plug (VJ3000-33-1) Seal the unused "R" port at the end of the manifold. Seal the unused "R" port at the end of the manifold. VZS VFS VS eSS5YJ3-41, -S41 The 3 port valve can be used on the 4 port manifold by simply sealing off the unused "R" port with plug VJ3000-33-1.

ZR

Individual spacer (ZR1-R1-2) PV V X X PD X X 110.5 105.5 X PV V 70.5 SMC 16.5 X PD 12 V V 35.5 (Pitch) 33 (Pitch) 33 35.5 PV PD EXH PS Rc 1/8 V port Vacuum port 13-3-33 33 Large Size Vacuum Module: Vacuum Pump System Series ZR How to Order Combination of vacuum switch valve and release valve Refer to Table (1).

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Instantaneous flow: L/min cfm Accumulated flow: L ft3 L3 IO-Link/ NPN/PNP Analog 1 to 5 V Analog 0 to 10 V*3 ZS-33-D ZS-33-F L4 IO-Link/ NPN/PNP Analog 4 to 20 mA + ZS-33-D *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

Metal Seal/Rubber Seal Series VQ Body Ported

or less 47 or less VQ1430 Metal seal 0.74 0.14 0.17 0.84 0.16 0.20 20 or less 26 or less 40 or less Exhaust center 105 VQ1431 Rubber seal 0.78 0.28 0.19 1.0 0.21 0.24 25 or less 33 or less 47 or less VQ1530 Metal seal 0.74 0.14 0.17 0.82 0.16 0.20 20 or less 26 or less 40 or less Pressure center VQ1531 Rubber seal 0.78 0.28 0.19 0.84 0.21 0.22 25 or less 33 or less 47 or less Note 1) Cylinder