SMC Corporation of America
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GR-S-010 (10 g), GR-S-020 (20 g) Technical Data 1353 MY1W Series Dimensions: 16, 20 (LL) L 4 x MM depth M 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW Q+ Stroke PG M5 x 0.8 M5 x 0.8 (Hexagon socket head plug) (Port) W CH LH RR SS NE H RR SS NH HH QQ NC M5 x 0.8 M5 x 0.8 2 x 2 x M5 x 0.8 PP TT UU (Port) This port is not available for use.

(PPE, PP glass 10%, Alumina ceramics, Carbon, EPDM, Stainless steel 303, Stainless steel 304, PE, PP, NBR) 2. Deionized water (with an electrical conductivity of approx. 1 S/cm) can be used, but may lose its electrical conductivity. 158 Series HEC-W Specific Product Precautions 2 Be sure to read this before handling.

Principal Parts Material Body C3604, PBT, PP, Stainless steel 303 Stud C3604 (Thread portion), Stainless steel 303 (Thread portion) Chuck Stainless steel 304 Guide Stainless steel 304 Release button POM Seal, O-ring NBR Gasket Stainless steel 304, NBR Made to Order (Refer to page 27 for details.) 5 A Metric Size One-touch Fittings KQ2 Series Applicable Tubing: Metric Size, Connection Thread

Profile position mode (pp) Receives an end position command from the host and executes positioning. Profile velocity mode (pv) Receives an endpoint speed command from the host and executes speed control. Profile torque mode (tq) Receives a target torque command from the host and executes torque control.

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

Stainless (Include heat exchanger brazing), SiC, Carbon, PTFE, PP, PE, POM, FKM, EPDM, PVC (No. copper used) Circulating fluid wetted materials Servieable conductivity: 0.22S/cm or more. (Resistivity: 4.5Mcm or less.)

PP: Inlet pressure PA: Outlet pressure D PP C PA PR (Atmospheric pressure) A Time ON Operation description of the soft start-up valve When the outlet side is filled with pressure supplied from the needle t, PA increases. When PA exceeds the specified pressure, the force that pushes up the valve e becomes smaller than the force that pushed down the spool w.

capacity [kW] 9, 19, 26 1 (Max. 1.5) Temperature stability [C] 0.1 0.5 Set temperature range [C] 15 to 25 20 to 40*1 *1 CH2 CH1 Space saving, Reduced wiring Dual thermo-chiller Thermo-chiller 1 unit 2 units Footprint 22% reduction To oscillator To optical system CH2 To optical system To oscillator CH1 One power supply system for 2 channels HRSH200 HRL200 HRS012 Energy saving Touch panel pp

Description Material Q'ty Note q Body PC, PP 1 w Element PP 1 Accessory Fluid Tap water Max. operating pressure 0.65 MPa Symbol Accessory Nil None H With handle e Extension piece Stainless steel 2 Conversion from NPT to Rc Operating temperature range 5 to 35C Nominal filtration accuracy 5 m r Handle 1 When -H is selected t Sealant tape PTFE 1 Installation environment Indoors e Rc1 Replacement

Model Description Material Qty Note q Body PP 1 w EJ202S-005X11 Element PP/PE 1 EJ202S-075X11 e Particle filter bracket SGCC 1 r Nipple Stainless steel 1 Conversion from R to NPT t Extension piece Stainless steel 1 Conversion from NPT to Rc y Tapping screw 4 u Handle 1 When -H is selected i Sealant tape PTFE 1 206 HRSE Series Cooling Capacity Calculation Required Cooling Capacity

Description Material Qty Note q Body PC, PP 1 w Element PP 1 e Extension piece Stainless steel 2 Conversion from NPT to Rc Fluid Tap water Accessory Max. operating pressure 0.65 MPa Operating temperature range 5 to 35C Symbol Accessory Nil None H With handle Nominal filtration accuracy 5 mm r Handle 1 When -H is selected t Sealant tape PTFE 1 Installation environment Indoors e Rc1 Replacement

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RR SS NE H RR SS QQ NH NC M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) 2 x 2-M5 x 0.8 PP TT UU This port is not available for use.

Note 2) Strong acidic chemicals, strong basic chemicals, and hydrofluoric acid are not allowed. 10 Specifications Model PA5010-04 PA5010-06 Actuation Automatically operated Main fluid suction discharge port Rc, NPT, G, Female thread 1/2 3/4" Port size Pilot air supply/exhaust port Rc, NPT, G 1/4" Female thread Body wetted areas PP Diaphragm PTFE Material Check valve PTFE, PP, PFA Liquid contact

The bolts in this product may become loose over time due to creep of the PP housing. Retighten the bolts before operation to prevent fluid or air leakage (refer to the maintenance manual for the required tightening torque). Caution 1.

,PBT,POM,PU, Wetted material PC,PVC,EPDM,NBR, Ion-exchange resin 9 CH2 : Stainless, Alumina ceramic, Carbon, Fluoropolymer,PP,PBT,POM,PU,PVC,PPS, AS,PS,EPDM,NBR, Ion-exchange resin Temperature range 5 to 35 Pressure rangfe MPa 0.3 to 0.5 Required flow L/min 25 50 Inlet-outlet pressure differential of facility water MPa 0.3 more Facility water sysmem Port size Rc1 Stainless steel, Copper

Operation of solenoid calves in the outlet side To operate solenoid valves mounted on this products outlet side (A port side), first confirm that the outlet sides pressure (PA) has increased to become equal to the inlet sides pressure (PP). 5.

56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 LA 11 12 14 Model ML2B25 ML2B32 ML2B40 10-13-14 12 Stroke Reading Rodless Cylinder with Brake Series ML2B With stroke sensor: With brake: ML2B Bore size S Stroke ML2B Bore size B Stroke N K M 9 N K M 1 RE A B O 1 H REC O H PP CX NN NN MM MM CY KK LL KK LL 2-PA J J MQQ M 2-PA (Port for operating cylinder) (Port for operating cylinder) F I F RHC (mm)

11 12 14 MB M6 x 1 M8 x 1.25 M10 x 1.5 LB 9.5 16 15 MC M5 x 0.8 M6 x 1 M8 x 1.25 LC 9.5 12 12 MD 9 11 14 LD 5.5 6.5 8.5 ND 5.6 6.8 8.6 PA Rc 1/8 Rc 1/8 Rc 1/4 PB Rc 1/16 Rc 1/16 Rc 1/8 Model ML2B25 ML2B32 ML2B40 716 Stroke Reading Rodless Cylinder with Brake ML2B Series With stroke sensor: With brake: ML2B Bore size S Stroke ML2B Bore size B Stroke CEP1 N K M 9 N K M O H 1 CE1 O 1 H CE2 PP

15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc(PT)1/8 Rc(PT)1/8 Z 194 205 250 XB 9.5 XA 11.3 W 88.5 92.5 103 TW 65 70 75 S 161 169 209 PP