Vacuum

-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!

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Without arm Q R M MK MK 20 MK2T 8 19 CK1 17 0.1 0.2 Q (mm) CLK2 Q (mm) Rod state Clamp stroke 10 mm Model Q 10 mm 20 mm Clamp stroke CLKG Rod state Bore size 50 mm 20 mm 30 mm 50 mm Retracted 146.5 175.5 166.5 205.5 186.5 235.5 226.5 295.5 R M Q 82 82 83 83 91.5 91.5 85 85 96.5 96.5 100 100 R 33.5 63 35.5 65 50 85 57.5 92.5 65.5 104.5 65 104 M Q 126.5 126.5 130 130 R 95.5 164.5 95 164 M MK63

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

Clean Regulator/Fluororesin Type

i r u i !

Compact

cable S Standard cable R Robotic cable (Flexible cable)*2 LEPY LEPS 1 1.5 m A 10 m* 3 3 m B 15 m* LER 5 5 m C 20 m* 2N LECP2* Programless type (With stroke study) *1 The standard cable should be used on fixed parts.

ZSE20C is vacuum rated, while the ZSE20CF is rated for both vacuum and a low positive pressure range.  Each model in the ZSE20 family offers a 3-screen, 3-color display.  The main screen shows the curent measured value in red or green, while two sub-screens can display the setting label and its numeric value in orange. 

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

1, @2 and @6 each. 12 MXY12-PS 8-9-11 11 Series MXY Dimensions 2-M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M-5P) 2-M5 x 0.8 (Plug: M-5P) 2-M5 x 0.8 Piping port FL 21 21 FH 2-M thread depth MM +0.03 0 Width across flats MB (lock plate fixing bolt) R 4-M thread depth MM PR RL PR +0.03 0 MA (Stroke

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

0.1 x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

5 2r2 = m 4 r2 CRQ2 = m 12 a2 + b2 MSQ MRQ 10.

CY1F

m P 0.1 x mcos + msin P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m mv P Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 29) 1 Review of operating conditions Determination of load factor () = Load mass (m) Maximum allowable load (m max) + Static moment (M) Allowable static moment (Mmax)+ Dynamic moment (ME) Allowable dynamic moment

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

A1 D1 L5 D1 AS-D A2 AS-T T ASP T ASN AQ Metric Size ASV L4 (1) L5 (1) A1 (2) A2 (2) M1 Weight (g) Max.

Rotary Table/

to the plate (also the same in case of a thicker plate) = m 2 r2 = m 5 2r2 = m 4 r2 = m 12 a2 + b2 !

ZSE F/ISE

ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Nil Left R Right D Both left and right LEC LEC S *5 Select D for the vacuum port for suction of 50 L/min (ANR) or more. LEC SS-T R: Right !1 I/O cable length [m]*10 o Cable length [m]*6, *9 LEC Y Nil Without cable H Without cable (Connector only) 1 1.5 *9 The length of the encoder, motor and lock cables are the same.

Rotary Cylinder Series MRQ Size: 32, 40 1

F: Angle adjustment range 5 m u im ax 0 M 7 M 1 in e i gl m n u a m 0 nt a e M dj m us t 19 ax e im gl Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u an m t ad en ju m st Friction fittings Note) The diagram shows the rotation angle with a reference position set

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www.stevenengineering.com I 2.65 SOLENOID VALVES SERIES (N)VZ500 H O W T O O R D E R M A N I F O L D T Y P E 41 B O T T O M P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 41 B O T T O M P O R T E D G R O M M E T T Y P E (N)VV3Z5 41 01T 2 N U M B E R O F S TAT I O N S T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT T NPTF F O R A L L O T H E R D E TA I L S, R E F E R T O T

F/ISE

ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

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L M L Max.