Modular Design with Uniform Body Style

min (ANR) 450 L/min (ANR) 1100 L/min (ANR) [AFD] 120 L/min (ANR) 240 L/min (ANR) 600 L/min (ANR) Nominal filtration rating*2 [AFM] 0.3 m (99.9% filtered particle size) [AFD] 0.01 m (99.9% filtered particle size) Outlet side oil mist concentration*3, *4 [AFM] Max. 1.0 mg/m3 ( 0.8 ppm) [AFD] Max. 0.1 mg/m3 (Before saturated with oil 0.01 mg/m3 or less 0.008 ppm) Compressed air purity class

Valve Single Unit

SX (Mounting hole) A: Orange B: Green M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) L plug connector (L): SX3240(R)-L-01 M plug connector (M): SX3240(R)-M-01 Manual override (Press and turn for the locking type.)

CG5-S

t l m L (mm) Part no.

SQ1000/2000

L RUN SERIAL UNIT L ERR.

JXCx-OMX0009

The basic parameter is not correct for the following condition: (Settable range) (1) Stroke(-) < Stroke (+) (2) W-Area 1 < W-Area 2 ( If both W-Area1 and W-Area2 is 0, the alarm will not be activated.) Parameter value is wrong Parameter ALM B RESET (3) Maximum pushing force < Maximum pushing force of actuator (01-049) Modify the basic parameter setting.

Base Mounted Metal Seal/Rubber Seal Series VQ

(Values at the initial period) Value for high voltage type (1.5 W) Value for low voltage type (0.5 W) Dusttight/Low jetproof type (IP65) is available on T, L, S and M kits of VQ2000.

Table of Contents

t l m L Part no.

KJ

A VMG M-5ALN-4 M-5ALN-6 M-5ALU-3 M-5ALU-4 M-5ALU-6 1.4 2.4 1.1 1.4 2.4 1.8 2.5 1.6 1.8 2.5 5 7 4.5 5 7 9 11 8.5 9.3 11.3 13 15 12.5 13.3 15.3 4.0 4.4 4.0 4.1 4.5 M5 x 0.8 M-5ALN-6 M-5ALU-6 M5 x 0.8 Barb Elbow for Nylon Tubing: M-5ALHN-4/-6 Barb Elbow for Soft Tubing: M-5ALHU-3/-4/-6 Effective area (mm2) Weight (g) Width across flats 7 M-5ALHN-4 M-5ALHU-3/-4 Model A B C D M-5ALHN-4 M-5ALHN

0.

(Metal seal type only) (0.9 W) p K Note 1) p p R Note 1, 2) External pilot type Electrical entry High speed response/External pilot type BR Note 1, 2) (0.9 W) p G: Grommet (DC specification) L: L-type plug connector with lead wire LO: L-type plug connector without connector M: M-type plug connector with lead wire MO: M-type plug connector without connector High pressure/External pilot

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Air Fittings & Tubing

L M Nylon Urethane M5 X 0.8 Tube O.D.

VZ100/300/500

: 600 mm Bracket (Mounting hole) (Mounting hole) (Mounting screw) (P , A, R port) (PE port) L plug connector (L) VZ52-L-01 M plug connector (M) VZ52-M-01 DIN terminal (D) VZ52-D-01 Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-32 33 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 Base Mounted

Valve Single Unit

A: Orange B: Green SX M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 3 4 5 3 4 5 L plug connector (L): SX5 40(R)-L 02 M plug connector (M): SX5 40(R)-M-02 Manual override (Press and turn for the locking type.)

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

•

PLe " ~,I I' : II jNo 2OOVm 'M A64 I-I. 24 V 12 V A33 1 '~ '" V. 200 VI--_ --+-=--t-t I-t I-j-1 ~~~! c--t-1=Relay. 'W ~~~ -=L= I,PLC I ! I. ' ~ Lead wire length symbols: 0.5 m . Nil (Example) M9NW 1 m . M (Example) M9NWM 3 m . L (Example) M9NWL 5 m . .

Modular/F.R.L. Units Series AC

G46-2-02-L G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Pressure gauge Note 1) Round type (with color zone) Square embedded type Note 2) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)]

modular-press-e

G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type G27-10-R1 Pressure gauge Note 1) Attachments Note 3) G27-10-R1 Round type (with color zone) Square Note 2) embedded type GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] Note 4) ISE35-R-25-MLA [ISE35-R-25-M

Modular F.R.L. Pressure Control Equipment

G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type G27-10-R1 Pressure gauge Note 1) Attachments Note 3) G27-10-R1 Round type (with color zone) Square Note 2) embedded type GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] Note 4) ISE35-R-25-MLA [ISE35-R-25-M

HRX-OM-X071

Applicable model HRR050-A/W-40-T1 HRR050-A/W-40-T2 Rated flow50/60Hz common*1 L/min 16 24 Maximum pump head 50/60Hz common*2 m 50 Pump Output W 400 750 Circuit protector A 10 Recommended earth leakage breaker capacity A 10 Due to an increase in heat generation of the pump. The cooling reduces about 400W from the value in the catalog.

VZ5000

Closed Center/Exhaust Center/Pressure Center VZ5320 Grommet (G), (H) VZ5 20-01 G H (Mounting hole for manifold) 3 4 5 Manual override (Non-locking) VZ5420 VK VZ VF (Lead wire length) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire