Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

0.4

Note 2) L kit: Nil F P PC J Nil S F kit P kit (26P) P kit (20P) J kit (20P) L kit S kit q w Note) L kit: Nil F e r kit SE SSQ1000 No.

Basic type / Direct mount type Series CY3B/CY3R

Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t N m 4.4 1.37 2.65 13.2 Tightening torque Square nut l t Service Life and Replacement Period of Shock Absorber Caution 1.

Aluminum High Vacuum Angle Valve

port) Q K L M Port P (Pressure port) In case of single solenoid valve (mm) P K L M N Q R Model XLCV-16 XLCV-25 XLCV-40 36 14.3 9.2 6.4 3.5 2.7 17.3 41 15.8 9.2 6.4 3.5 2.7 15.8 51 29 9.2 6.4 3.5 2.7 2.6 Other dimensions are the same as the XLC.

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

•

'" ~ ~j,. >1 ~ 'K ~ .:!A.. ,8 ~ ,-B,! 'L (mm) ,L (mm) . G :M5XO.B G:Milx :~xl2!i y --:l . Model M .8 C 0 E F F F .K .L 'ZPY258 '25 27 .24 a4. 54 5 6 8 fS.6 ' 28' to. 5 ZPY32B 32 34 29 39 59 18.9 37 14 Model .K "L Y ZPY20B 20 22 23.5 33.5 53.5 12.4 25 10.5 -H;+~ 2 . 5 4 5 4 Applicable tube Abolic

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M M5 6 1 / 3 8 / 1 S 1 0 5 0 L 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 8 3 0 4 5 . 6 1 5 . 3 9 1 4 / 1 S 2 0 5 0 L 2 Q K 4 1 4 4 5 . 3 4 1 4 8 / 1 S 1 0 7 0 L 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 0 4 3 4 7 1 6 . 4 0 2 4 / 1 4 / 1 S 2 0 7 0 L 2 Q K 4 1 5 . 6 4 7 4 5 4 8 / 3

Compact Rotary Actuator Series CRQ2

(Example) For M5: L2 = 10 Applicable shaft types: K, T, X Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5,

Rotary Actuator

$Applicable shaft type: J, K, T $Applicable shaft type: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 + (3 x P) K axis (T axis) J axis Shaft Shaft J K T J K T type type Q1 = M Size Size L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 L2 = Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 The long shaft can be further shortened

Series VQ Base Mounted Metal Seal/Rubber Seal

P.1.10-140 P.1.10-144 VFS C C3 (3.2) C4 (4) M5 (M5 thread) VS C6 (6) kit VS7 N1 (1/8) N3 (5/32) N7 (1/4) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) kit N1 (1/8) N3 (5/32) N7 (1/4) N9 (5/16) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block 1.10-115 Cylinder Speed Chart Series VQ0 Cylinder

Air Slide Table Series MXQ

D-X Individual -X 123 Series MXQ External Dimensions of Adjuster With Shock Absorber (BS/BT) Extension End Body mounting section Table mounting section Q P A D J M H K B F G G E E1 L C MXQ-BS20 (L) MXQ-BS25 (L) MXQ-BS 8 (L) MXQ-BS12 (L) MXQ-BS16 (L) Body mounting section Table mounting section A Stroke adjustment range (mm) Applicable size Model D H J K Q 1) B C F G M E L E1 P *1) M3 x 12

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

1

584 C85 CXWM20-275 119.5 289 20 90 620 277 329 606 634 CXWM20-300 132 314 20 90 670 302 354 656 684 C95 CXS 10 M L CXS 15 M L CXS 20 M L CXS 25 M L CXS 32 M L Model Stroke SS ZZ Z Model F L K P Q S SS Z ZZ CP95 175 257 287 200 282 312 125 207 237 150 232 262 110 192 222 120 202 232 80 135 152 50 150 210 229 75 120 175 192 70 150 205 222 80 90 145 162 60 80 100 100 155 172 110 165 182 125

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Model CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 CY1H10 Thread size M6 x 1.0 l-9 M4 x 0.7 l-7 M5 x 0.8 l-8 M8 x 1.25 l-12 Bolt dimensions l-8 Dimension t Nm 4.4 1.37 2.65 13.2 Tightening torque Square nut l t 4.

Rotary Actuator/Vane Style Series CRB2

Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2+(3 x P) L2+(3 x P) Size K axis (T axis) J axis Shaft type Shaft type T T J K J K Q1=M Size L1= L1+(3 x P) L2= 10 10 Not available Not available M3 M3 15 15 M3, M4 M3, M4 20 20 M3, M4, M5 M3, M4, M5 30 30 L2= Q2=M Q2=M M3, M4, M5 M3, M4, M5 40 40 Symbol: A37 The long shaft can be further shortened by machining it into a stepped round shaft

Electric Actuator

Max. tightening torque (lbfft) M4 x 0.7 M5 x 0.8 M5 x 0.8 Length: L (mm) 1.1 2.2 2.2 Model Bolt LEYG16M L LEYG25M L LEYG32M L 32 40.5 50.5 L Body fixed/Bottom mounting Max. tightening torque (lbfft) M5 x 0.8 M6 x 1.0 M6 x 1.0 Max. screw-in depth (mm) 2.2 3.8 3.8 Model Bolt Workpiece fixed/Rod end female thread LEYG16M L LEYG25M L LEYG32M L 10 12 12 Max. tightening torque (lbfft

MY1

Q + Stroke PG 1 2-P 1 H NE NG HG NC G 2-P (Hexagon socket head taper plug) Cushion needle A GB N Z + Stroke A 80 100 110 140 170 B 6 7.5 9 11 14 C 3.5 4.5 5.5 6.6 8.5 G 9 12.5 16 19 23 GB 17 20.5 24.5 30 36.5 H 40 46 54 68 84 J M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 K 10 12 9.5 16 15 L 80 100 114 140 170 LD 3.5 4.5 5.6 6.8 8.6 HG 13.5 17.5 21 26 33.5 MM M4 x 0.7 M5 x 0.8 M5

V100

: (800) 258-9200-www.stevenengineering.com G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6 [50.8] VT VP (Light/Surge voltage suppressor) VG 41.5 [48.5] + M5 x 0.8 (X port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead

LX

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 12 LXP M6 x 1 7.4 10 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.