100

pressure detection port Branch Dimensions ZL6mmm-m (Without supply valve or release valve) ZL6 Without valve Branch Vacuum (2/V) port1 2(V) 2(V) 2 x Rc1/2, G1/25, NPT1/2 (Recommended tightening torque: 28 to 30 Nm) 2(V) 1(P) With vacuum With pressure Branch Silencer exhaust EXH With vacuum pressure switch pressure detection port gauge EXH. port exhaust G 121 32 P Vacuum pressure detection

Compact Manifold Regulator Series ARM5

V L4=50+T+X 50 SMC H H L L O O S S U U C C P P K K 8 U 57 (at handle locked) DIN rail part no.

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

Digital Pressure Switch

Connector pin numbers -18No.PS-OMM0005-J Internal circuit and wiring example Z/ISE10(F)Output specification -A NPN open collector 2 outputs Max. 28 V, 80 mA Residual voltage 2 V or less -B PNP open collector 2 outputs Max. 80 mA Residual voltage 2 V or less -C NPN open collector 1 output Max. 28 V, 80 mA Residual voltage 2 V or less Analogue voltage output Output impedance approx. 1 k -E

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5 23.3 26.5 23.3 26.5 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 14.3 13.5 20.4 27.5 11.6 6 5/32" 14.2 31.1 36.1 12 32.1 27.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 12.7 14.3 23.1 30.2 19 18.5 25.3 32.4 15.2 11.4 36.1 8 3/16" 31.1 32.1 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31 15 21 21 33.1 40.2 18.5 13.2 10 1/4" 18.5 19 AS221FG-02-04 AS221FG-N01-09 15

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

-01ST AS221F-01-04ST 1/8" 8.4 4 20.4 27.5 9.3 5/32" 9.3 20.4 27.5 12.7 14.3 AS221F-N01-03ST AS221F-01-06ST 13.5 12 R 1/8 14.2 7 35.6 1.5 31.6 6 11.6 3/16" 11.4 23.1 30.2 14.3 16.5 AS221F-N01-05ST AS221F-01-08ST NPT 1/8 12.7 14.2 7 35.6 1.5 31.6 25.3 32.4 18.5 8 15.2 AS221F-N01-07ST AS221F-01-10ST 1/4" 13.2 23.9 31 18.5 33.1 40.2 15 21 10 18.5 AS221F-N01-09ST AS221F-02-04ST 15 5/16" 15.2 25.3

•

I"P.1/4, .. . , ASP530F-N03-11 S 3/S' ~ 25.9 1 51Jtr 11 / 16" 28.6 ~6~5 ~ 61 ;a.: ~:B-.9 :2D.S 220 tU6' /36,3 . 34:7 .26~ 21.7 . . ~ A efertlllCe dll'l'lerlSlons 1 01 NPT Ihmads aller installalion 3 Speed Controller 5 . ASP w"" P;lo' Ch.,k V,'v. efles Construction Parts list .QesCr;plian ' ''' fi1t~lal , . . .

Pressure Sensor for General Fluids

(Example: If the Pressure switch with output impedance of 1k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5(V) 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V.) Output impedance R The pressure range in which the Pressure switch satisfies the specifications.

Pressure Sensor

(Example: If the Pressure switch with output impedance of 1k is connected to the A/D converter to detect the analog output of 5 V, the detected voltage by the A/D converter becomes 5(V) 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V.) Output impedance R The pressure range in which the Pressure switch satisfies the specifications.

How to Order Series ZSE40A(F)/ISE40A 2-Color Display High Precision Digital Pressure Switch ®

Piping 01/N01 A B D ZS-24-A ZS-24-B ZS-24-D ZS-35-C ZS-35-D ZS-35-F ZS-35-G Bracket A Bracket B Bracket D E E Panel mount adapter Panel mount adapter + Front protective cover F W1/WF1/M5/C4/C6 Output specifications R T S V X Y NPN open collector 2 outputs + Analog voltage/Auto-shift switching PNP open collector 2 outputs + Analog voltage/Auto-shift switching NPN open collector 2 outputs +

IR1000/2000/3000

SMC 50 35 5 SMC 6 28 (R) P P K U K C S U O C H L S O H L 38 AV AU Panel cut Panel thickness: Max. 4 Panel cut Panel thickness: Max. 3 34 AF 40 15.4 x 5.4 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR 8 x 6.5 79 13 45.5 VEX Atmosphere 106 G SET SET Pad side

VM

-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Dual pressure is available only on external pilot. 5-6-3 Mechanical Valves Series VM Precautions Be sure to read before handling.

1

V V V V V V V V V V Standard CM2 V V V V V V V V V V V D CG1 v CJ2l-lA MB V v v v Note 8) 10-, 11CA2 CQ2 CQS v v v v v v v v v v v 25ALuberetainer 20JA v v v v v v v v v XB6 MXH v v v v v v v v XB7 MXQ v XB9 MGP XB13 CY CX v v v v XC3 CK1 C(L)K v v v v v v v XC8 C(L)KU v v v Note 9) XC9 CKQ v v v v v v v v v XC10 CKZ2N v v v Note 9) XC11 WRF v v v v v v v v

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

SMC Electronic Switch Series Variations

Reversed output mode Refer to the "Hysteresis mode" and "Window comparator mode" in Technical Information on p.3.14-8. U Ripple A small AC voltage superimposed on top of a DC voltage. In case of Fig.4, ripple 10% means V' V" V'/V X 100 = 10% When no pulsation is happened, ripple is 0%. Unit conversion Refer to the Technical Information on p.3.14-13.

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.