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12 V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161 Sine Rodless Cylinder/Direct Mount Type Series REAR 10, 15 Replacement Procedure is P.316 Construction @2 @3 @6 @7 !

V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) Terminal conduit 5 V, 12 V 40 to 100 40 to 160 Relay, PLC 12 V 2-wire 3-wire (NPN) 5 V 12 V IC circuit Diagnostic indication (2-color indication) 24 V 3-wire (PNP) 40 to 100 12 V Grommet 2-wire Water resistant (2-color indication) 40 to 160 With diagnostic output (2-color indication

A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc(PT)1/8 Rc(PT)1/8 Z 194 205 250 XB 9.5 XA 11.3 W 88.5 92.5

CP VVQZ2000 (For P, J kits) SSQ1000 4 B P 1 150 For station 1

P It ;~ j \! Width across flats 8 Wid th across flats 8 "1 WiJ :~coss f'ats 12 J~lross flats 1 0 If\ Ifl Wid w "' 'r ~ Miniature tube fitting(Series M5) \ Miniature tube fitting(Series M5) ", .,; ", w ~( Width across flats 7 C\J ~ Width across flats 7 ul>-I ;C 'J. f~ I~ ~ ~ c&.

: 16, 20 2 x P (Rc, NPT, M thread) E F Q 2 x N through 4 x O depth of counterbore Stroke Y 0 0.1 D E T M V B + Stroke H + Stroke A + 2 stroke 32 40 50 RSQB Bore size: 32, 40, 50 2 x P (Rc, NPT, G) Q Z F Stroke J I 0 0.1 D M E T V B + Stroke H + Stroke M 4 x N through A + 2 stroke E 8 x O depth of counterbore Built-in One-touch fittings (20 to 50) Tubing O.D.

Rubber stopper (P. 8-5-40) Metal stopper (P. 8-5-43) Basic style 2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8 3 11 Max. 12 (Retraction end adjuster) 12 I J 5.5 11 5.5 11 Adjuster at extension end N-M5 x 0.8 thread depth 6 36.5 (Adjuster at extension end) 11 5.5 5H9 depth 5 +0.030 0 Retraction end adjuster 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Series VQ1000 Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P

(for Heavy-duty) Buffer assembly model Applicable pad model Series ZP Page ZP40H ZP50H ZP40HB ZP50HB P. 80 P. 81 ZPB-T1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 80 P. 81 ZPB-T2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB P. 80 P. 81 ZPB-T3 (J/JB/JF)01 ZP40H ZP50H ZP40HB ZP50HB P. 82 P. 83 ZPB-X1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 82 P. 83 ZPB-X2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB

V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) Terminal conduit 5 V, 12 V 40 to 100 40 to 160 Relay, PLC 12 V 2-wire 3-wire (NPN) 5 V 12 V IC circuit Diagnostic indication (2-color indication) 24 V 3-wire (PNP) 40 to 100 12 V Grommet 2-wire Water resistant (2-color indication) 40 to 160 With diagnostic output (2-color indication

: 15, 20, 25 Single axis type: REAH PA L LL 4 x M thread depth MM Guide central axis ZZ PB XB 2 x P S + Stroke LW EA EB HC HP HB NT HA H HT NL HG PP W A N 8 Z + Stroke Square nut for body mounting J TW Square nut for body mounting insertion REA HP HT MM J L LL LW M HB HC HG HA EA EB H Model A REAH15 REAH20 REAH25 42 8 19 M5 x 0.8 71.5 44 17 106 M5 x 0.8 45 46 33.5 33.5 21 97 26.5 REB 50 23.5

x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 10-20-36 37 Solid State Switch Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) For details about certified products conforming to international standards, visit us at www.smcworld.com.

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

Axial piping type (8) MXS8-P 15.5 Max 6.5 Operating port 2 x M5 x 0.8 (mm) J 39 44 55 73 91 141 Model MXS8-10R MXS8-20R MXS8-30R MXS8-40R MXS8-50R MXS8-75R 32.2 15 D6.5 Other dimensions are the same as the basic style.

(Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

IC circuit A56 5 V Reed switch Solid state switch A53 12 V Grommet Yes Relay, PLC 24 V A54 2-wire 100 V, 200 V Diagnosis indication (2-color) A59 W F59 3-wire (NPN) 5 V, 12 V IC circuit F5P 24 V 3-wire (PNP) J59 12 V 2-wire J51 100 V, 200 V Relay, PLC Yes Grommet F59 W 3-wire (NPN) 5 V, 12 V IC circuit Diagnosis indication (2-color) F5PW 3-wire (PNP) J59 W 24 V 2-wire F5BA

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Mass: 0.8 [kg] (1.76 [lb]) Terminal signal layout Approx. 40 For 3-phase 200 to 230VAC and 1-phase 230VAC For 1-phase 100 to 120VAC PE terminal 6 L1 L1 L2 L2 L3 CNP1 CNP1 2-M5 screw Screw size: M4 Tightening torque: 1.2 [N m] (10.6 [lb in]) N N P1 P1 P2 P2 P P C C CNP2 CNP2 D D L11 L11 L21 L21 U U Mounting hole process drawing CNP3 CNP3 V V Mounting screw Screw size: M5 Tightening torque:

(Rc, NPT, G) GA 2-P PB (Rc, NPT, G) J K PA + Stroke GB Q (Plug) FA FB C + Stroke G S B + Stroke A + Stroke E For bore sizes 12 and 16, M5 x 0.8 is only available.