Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

5 V Grommet (NPN equivalent) Yes Yes 100 V 12 V 24 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire IC circuit 5 V, 12 V 3-wire (PNP) Relay, PLC 12 V 2-wire Grommet 24 V IC circuit 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) 5 V, 12 V 12 V 2-wire Solid state switches marked with are produced upon receipt of order.

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

Rotary Actuator/Vane Style Series CRB1

(Example) For M3: L2 = 6 Applicable shaft types: J, X, Z L2 + (3 x P) L2 = L2 + (3 x P) L2 = (mm) (mm) X axis J, Z axis L1 + (3 x P) Q1 = M Q1 Q2 Shaft type Shaft type X Z X J Z Size Size L1 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 Q2 = M 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A37

MY1

needle NW Z + Stroke 2-P (Hexagon socket head taper plug) MW (mm) Bore size (mm) B 6 C 3.5 CH 25 G 8.5 GB 16.2 H 52 HG 13.5 J M5 x 0.8 K 10 L 110 LD 3.6 LH 38 LL 35 LW 84 M 6 MM M4 x 0.7 MW N 20 NC 13.5 NE 49.5 NG A 90 16 20 25 32 40 13.5 110 7.5 4.5 26 10.5 20 58 17 M6 x 1 12 130 4.8 39 45 88 7.5 M5 x 0.8 25 17 55.5 17 120 9 5.5 25.7 16 24.5 66 22 M6 x 1 9.5 142 5.6 38.7 49 100 10 M5

Free Mount Cylinder

F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16

Free Mount Cylinder Series CU

switch Reed switch Relay, PLC 12 V Grommet 24 V Yes 5 V, 12 V Diagnostic indication (2-color indication) 12 V IC circuit IC circuit 3-wire A96 A96V (NPN equivalent) 5 V 12 V Yes 24 V Grommet Relay, PLC A93 A90 A93V A90V 100 V 2-wire No 100 V or less Solid state auto switches marked with are produced upon receipt of order.

CQ2

Standard Bore (mm) Stroke range (mm) (mm) A B C D E F G H I J K1 K2 L M N p Q S U V Z Th9 0 0.052 44.4 6 6 10.5 M3 X 0.5 3.5 M5 X 0.8 15.5 37.4 35.5 1.5 5.2 32 5 22 3.5 25 19.5 5 to 30 12 15 0 0.052 48 41 10 15 8 8 M4 X 0.7 3.5 M5 X 0.8 41.5 1.5 6 38 6 28 3.5 29 22.5 5 to 30 16 20 0 0.052 10.5 18.5 48 55 46 7 10 M5 X 0.8 4.5 M5 X 0.8 2 8 47 8 36 5.5 36 24.5 5 to 50 20 13 0 0.052

Electric Actuator

to 120 V 200 V to 230 V 100 V to 120 V 200 V to 230 V LECSA1 LECSA2 LECSB1 LECSB2 Feature(s) AC servo motor (Incremental encoder) S2, S3 AC servo motor (Adsolute encoder) S6, S7 Compatible motor !

Electric Slide Tables

Lead 5: LES16K 3 Work load [kg] T1 = V/a1 = 220/5000 = 0.04 [s], Lead 10: LES16J 2 T3 = V/a2 = 220/5000 = 0.04 [s] T = T1 + T2 + T3 + T4 [s] T2 = L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. 1 0 = 50 0.5 220 (0.04 + 0.04) 220 0 100 200 300 400 500 T1 = V/a1 [s] T3 = V/a2 [s] Speed [mm/s] = 0.19 [s]

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-Y2A(J/K)3-B5 ZP3B-Y2A(J/K)6-B5 ZP3B-Y2A(J/K)10-B5 ZP3B-Y2A(JB/K)15-B5 ZP3B-Y2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-Y2A(J/K)3-B5 ZP3B-Y2A(J/K)6-B5 ZP3B-Y2A(J/K)10-B5 ZP3B-Y2A(JB/K)15-B5 ZP3B-Y2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-Y2A(J/K)3-B5 ZP3B-Y2A(J/K)6-B5 ZP3B-Y2A(J/K)10-B5 ZP3B-Y2A(JB/K)15-B5 ZP3B-Y2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-Y2A(J/K)3-B5 ZP3B-Y2A(J/K)6-B5 ZP3B-Y2A(J/K)10-B5 ZP3B-Y2A(JB/K)15-B5 ZP3B-Y2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

24

V V V Standard v 12-, 13v v v v v v v 25AV V *3 V *3 v v v v 20v v v R/V v v v MGPlM v MGPMlG v v v v v v v MGPlF -XAl MGJ v v v -XB6 JMGP v v v v v v v -XB10 v v v v v v v -XB13 MGP MGP v v v v -XB22 MGPW v v v v v v v -XC4 MGQ v v v v v -XC6 MGG v -XC8 MGC v -XC9 -XC19 MGF v v v -XC22 MGZ v v v v v v v -XC35 MGT v -XC69 v -XC79 v v v -XC82 -XC85 v v v v v v v -XC88 v

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

5 V,12 V 3-wire (NPN equivalent) A96V A96 IC circuit 5V 12 V Grommet A72H A72 200 V 100 V A93V A90V A93 A90 IC circuit 5 V,12 V 12 V 100 V or less Relay, PLC 2-wire A73C A80C A79W 24 V Connector IC circuit 5 V,12 V 24 V or less DDiagnostic indication (2-color indication) Grommet Solid state auto switches marked with are produced upon receipt of order.

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Table of Contents

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 46 76 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

Air Slide Table Series MXQ

L1 L2+A5 L3 Kinetic Energy 2 1 V 2 E = W () 2 1000 Collision speed V = 1.4 Va 1 420 2 E = x 1 () = 0.088 2 1000 Find the kinetic energy E (J) of the load. ) Correction factor (Reference values) V = 1.4 x 300 = 420 Ea = K E max Find the allowable kinetic energy Ea (J). Confirm that the kinetic energy of the load does not exceed the allowable kinetic energy.

MG

Standard equipped with shock absorber -X 75 100 125 150 200 250 300 20 25 32 40 50 63 80 100 20 25 32 40 50 20Series MGC P . 8-21-6 Data Series MGG V V V V V V V V V V V V V V Guide Cylinder Guide Table Cylinder with Turntable Series MGC Long stroke Bore size (mm) Standard stroke (mm) Compact type of series MGG Lightweight, space-saving 250 300 350 400 450 500 600 700 800 900 1000 1100 1200

Air Slide Table

L1 L2+A5 L3 2 1 V 2 E = W () 2 1000 Collision speed V = 1.4 Va 1 420 2 E = 1 () = 0.088 2 1000 Find the kinetic energy E (J) of the load. ) Correction factor (Reference values) V = 1.4 x 300 = 420 Ea = K E max Find the allowable kinetic energy Ea (J). Confirm that the kinetic energy of the load does not exceed the allowable kinetic energy.