Modular F.R.L. Units

Port size Center of F.R.L. body E F F E E B C Cross spacer E D A F: Without thread Model 1 E (Port size) A B C D Applicable model Y14-M5-A M5 23 16 14 25 AC10l-A Y24-l01-A 1/8 40 40 22 40 AC20l-B Y24-l02-A 1/4 Y34-l01-A 1/8 49 43 28 48 AC25l-B, AC30l-B Y34-l02-A 1/4 Y44-l02-A 1/4 60 48 36 54 AC40l-B Y44-l03-A 3/8 Y54-l03-A 3/8 72 62 40 62 AC40l-06-B Y54-l04-A 1/2 Caution on Mounting 1.

0.4

q w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3

MY1

taper plug) P (Port) VV 2-ZZ (Hexagon socket head taper plug) 2-ZZ (Hexagon socket head taper plug) VV MY1BG MY1BG (mm) NH A B C G GB H K J LD L LL LW M MM N NC Model E JJ KK NE NW 110 9 5.5 16 24.5 54 9.5 M6 x 1 5.6 110 55 42 9 M5 x 0.8 30 20 MY1B25 40.5 2 M5 x 0.8 9 39 53 140 11 6.6 19 30 68 16 M8 x 1.25 6.8 140 70 52 12 M6 x 1 37 25 MY1B32 50 2 M5 x 0.8 10 49 64 170 14 8.5 23 36.5 84

Air Cylinder

With air cushion GA WA GB WB 2 x P (Rc, NPT, G) Cushion valve, Width across flats WH W 10 With rod boot 8 8 8 IJ IJ e e JH f f l l JW ZZ + l + Stroke ZZ + l + Stroke h + l h + l 80, 100 (mm) Bore size Stroke range Rc, NPT port G port A AL B B1 C D E F FD FT FX H H1 I J K Standard Long stroke GA GB P GA GB P 20 Up to 200 201 to 1500 12 10 (12) 1/8 12 10 (12) M5 x 0.8 18 15.5 40 13 14 8 12

Table of Contents

360 around the stud axis For reducing R 1/8 female to M5. 1 8 For nylon tubing 1 8 R x M5 female M-5B 6/4 x R 6/4 x M5 M-01AN-6 P. 56 M-5HL-6 P. 58 P. 59 1 8 Plug Use to plug unused M5 port.

Modular F.R.L. Unit

F E E F B C Cross interface E: 4-Rc E A F: Without thread D Model Port size A B C D Applicable model Y14-M5 M5 23 16 14 25 AC10 Y24-01 1/8 40 40 22 40 AC20 Y24-02 1/4 Y34-01 1/8 49 43 28 48 AC25, AC30 Y34-02 1/4 Y44-02 1/4 60 48 36 54 AC40 Y44-03 3/8 Cautions in Mounting When mounting a cross interface directly on the IN side of the lubricator, be sure to use a series AKM check valve between

Proposals for Energy Saving

(P .E.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

Hydraulic

Material: Cast iron 2-P keeper plate mounting screw Rod series Bore size (mm) Part no. l J P H A B C D d K L E 32 40 50 63 80 100 40 50 63 80 100 YH2-03B YH2-04B YH2-05B YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M20 x 1.5 16 l +0.084 0 M5 x 0.8 M6 x 1.0

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

5

V V V V V V V MB 20 V V V V V V Tie-rod V CA2 25 V V V V V V V CS2 32 V V V V V V V Compact V V V CQS 40 V V V V V V V V V V CQ2 Free mount V V CU 50 V V V V V 63 V V V V V v: Standard 80 V V V V V 100 V V V V V 125 V 140 V D160 V P. 141 P. 155 P. 172 P. 198 P. 212 P. 183 P. 225 P. 233 P. 251 P. 265 P. 285 P. 294 P. 309 -X 137 Smooth/Low Speed Cylinders CQlY/CQlX Series Added compact foot

•

Q I>A F ' F Flat "" ,,"OD with rib G :M5 xO.8 G:M6Xl y " p Q I>A ~ . F Fiat A. ,,"OD withn b Modol M I>B e 0 E Modol M ',B . e 0 ' El ZPY4Ol! 40 43 1 8.5 :!as .as 6.5 3.3 itt,ion' ZPY1Ol! 10 12 12 22 38 3 1.7 H4{~1 14.5 5 1.8 ZPYSOl! 50 53 19.5 29.5 <7.5 6 8 7.5 3.8 N6 (~,1 16.5 7 2.5 ., 1~ 15 12 22 38 5 6 3 1.8 ZPY~ 16 18 12.\ 22.5 :!

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators L1 44 L2 (M5 port) 4 Manual override 12.5 P = 12.5 (Pitch) (A, B port) M5 x 0.8 18.5 + + (For mounting) 4 x 4.5 (P, EA, EB port) 1/8 39.3 45.7 30.8 7.2 EA EB P EA EB P 15.5 1.3 18.4 10.2 23.5 B B B B 16.5 16.5 16 49 77.8 A A A A 86.3 + + + + 6, 1/4" Applicable tubing O.D.: 4, 5/32" (A, B port) One-touch fitting Output no.

Table of Contents

Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

smcmaintenancepartslist

P.287 P.289 P.290 P.290 P.290 P.290 P.290 P.297 P.297 P.301 P.304 P.306 P.306 P.306 P.310 P.311 P.311 P.312 P.312 P.312 P.315 P.316 P.316 P.316 P.317 P.318 P.319 P.319 P.319 P.324 P.325 P.326 P.329 P.333 P.333 P.333 P.337 P.339 P.340 P.343 P.348 P.351 P.351 P.356 P.358 P.361 P.362 P.364 P.367 P.371 P.371 P.374 P.385 P.385 P.387 P.387 P.390 P.392 P.393 P.394 P.395 P.396 CJP2 MGPW Pin Cylinder

SYJ3000/5000/7000

-www.stevenengineering.com 20 20 stations R port 1/8 Applicable individual EXH spacer assembly A, B port M5 x 0.8 M5 M5 x 0.8 A, B port size Applicable individual SUP spacer assembly ARBYJ5000-00-P How to Order Type 41 (5 Port/Base mounted) SS5YJ5 41 05 M5 Stations 02 2 stations P, R port thread type -+ -+ R port 1/8 : : R P Nil F N T Rc G NPT NPTF 20 20 stations A, B port M5 x 0.8 M5 M5

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Nil M5 x 0.8 R1, R2 port 20 20 stations + + + + + + + Nil Rc Applicable solenoid valve 10-SYJ343-(-Q) Single solenoid pilot valve is on same side as the A, B port. P P P S F G A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A A, B port size B B B A, B port M5 x 0.8, C4 A N NPT Applicable blanking plate assembly M5 M5 x 0.8 T NPTF C4 4 One-touch fitting Refer to page 302.

Air Fittings & Tubing

<M5, M6> D P M Part No.