Pad Diameter: Flat Style, Pad Styles: Flat Style, Material: NBR, Vacuum Entry: Barb Ø4 Nylon Tubing, Mounting Thread: M6X1

Pad Diameter: Flat Style, Pad Styles: Flat Style, Material: Silicon Rubber, Vacuum Entry: Barb Ø4 Nylon Tubing, Mounting Thread: M6X1

Pad Diameter: Flat Style, Pad Styles: Flat Style, Material: Urethane Rubber, Vacuum Entry: Barb Ø4 Nylon Tubing, Mounting Thread: M6X1

Pad Diameter: Flat + Bellows, Pad Styles: Bellows, Material: Urethane Rubber, Vacuum Entry: Barb Ø4 Nylon Tubing, Mounting Thread: M6X1

Pad Diameter: Flat + Bellows, Pad Styles: Flat Style, Material: Urethane Rubber, Vacuum Entry: Barb Ø4 Nylon Tubing, Mounting Thread: M6X1

Pad Diameter: Flat Style, Pad Styles: Flat Style, Material: Silicon Rubber, Vacuum Entry: Barb Ø4 Nylon Tubing, Mounting Thread: M6X1

Pad Shape: Bellows, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] NBR, Environment: Standard, Vacuum Outlet Port: Barbed Couplers, Pad diameter(ø): 6, Vacuum entry port thread diameter: ø4 nylon tube, Mounting connection screw: M6 × 1 (male thread)

Pad Shape: [Other Shape] Flat Type, Pad Type: Ribbed, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Silicone Rubber, Environment: Standard, Vacuum Outlet Port: Barbed Couplers, Pad diameter(ø): 25, Vacuum entry port thread diameter: ø4 nylon tube, Mounting connection screw: M6 × 1 (male thread)

Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] NBR, Environment: Standard, Vacuum Outlet Port: Barbed Couplers, Pad diameter(ø): 25, Vacuum entry port thread diameter: ø4 nylon tube, Mounting connection screw: M6 × 1 (male thread)

Pad Diameter: ø8, Pad Styles: Flat Style, Material: Conductive NBR, Vacuum Entry: Barb Ø4 Nylon Tubing, Mounting Thread: M6X1

Pad Diameter: ø13, Pad Styles: Flat Style, Material: Conductive NBR, Vacuum Entry: Barb Ø4 Nylon Tubing, Mounting Thread: M6X1

V

-KM8 (VVQ2000) S I L E N C E R (EXH P O R T) KQPB L A N K I N G P L U G P R PR VVQ2000-N4 station (1-Max. station.)

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VVQ1000-N4-Station (1 to Max. stations) Name plate [-N4] AN103-X233 Silencer (For EXH port)

Series VQ Metal Seal/Rubber Seal Body Ported

For SUP passage block VQ0 4 ---P 1 2 0 1 VQ0 4 ---R 1 2 0 1 VQ0 4 ---PR 1 2 0 1 For EXH passage block For SUP/EXH passage block Name plate [-N4] VVQ0-N4-Station (1 to Max. stations) When ordering assemblies incorporated with a manifold, suffix N to the manifold No. It is a transparent resin plate for placing a label that indicates solenoid valve function, etc.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 CH1 CH2 CH3 CH4 SET OFF P2 P4 P1 P3 High pressure: Compound pressure type Positive pressure type High vacuum: Vacuum type SET Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON MPa Switch output 1 & 2 kPa OFF OUT1 OUT2 CH Increases the set value Decreases the set value 1 2 3 4 n2 n4

PSE530/200

the set value Decreases the set value Switch output 1 & 2 CH 1 2 3 4 For normally closed PRESSURE OFF IF SET P1 P2 P3 P4 High pressure:Compound pressure type Positive pressure type High vacuum: Vacuum type SET Data SET (For CH1) Hysteresis Hysteresis OUT2 setting (1)/CH1 only Manual mode ON Switch output 1 & 2 For normally open Displays alternately MPa OFF kPa n1 n2 n3 n4

PSE200

Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 CH1 CH2 CH3 CH4 SET OFF P2 P4 P1 P3 High pressure: Compound pressure type Positive pressure type High vacuum: Vacuum type SET Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON MPa Switch output 1 & 2 kPa OFF OUT1 OUT2 CH Increases the set value Decreases the set value 1 2 3 4 n2 n4

Table of Contents

the set value Decreases the set value Switch output 1 & 2 CH 1 2 3 4 For normally closed PRESSURE OFF IF SET P1 P2 P3 P4 High pressure:Compound pressure type Positive pressure type High vacuum: Vacuum type SET Data SET (For CH1) Hysteresis Hysteresis OUT2 setting (1)/CH1 only Manual mode ON Switch output 1 & 2 For normally open Displays alternately MPa OFF kPa n1 n2 n3 n4

ZP

Width across flat 5 Width across flat 5 Width across flat 5 15 15 15 3 2 3 2 0.3 0.3 0.3 0.8 0.8 0.8 2 1.5 3.5 2.5 2 4 Vacuum Inlet Dimensions ZP3-T015U;-A6-U4 ZP3-T02U;-A6-U4 ZP3-T035U;-A6-U4 ZP3-T015U;-A6-04 ZP3-T02U;-A6-04 ZP3-T035U;-A6-04 ZP3-T015U;-A6-U2 ZP3-T02U;-A6-U2 ZP3-T035U;-A6-U2 ZP3-T015U;-A6-02 ZP3-T02U;-A6-02 ZP3-T035U;-A6-02 Buffer Applicable Pad List 1.2 One-touch fitting

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Parallel I/O Connector: CN5 Wiring diagram LEC6N(NPN) LEC6P(PNP) Power supply 24 VDC for I/O signal CN5 Power supply 24 VDC for I/O signal CN5 A1 A1 COM+ COM+ COM COM A2 A2 A3 A3 IN0 IN0 A4 A4 IN1 IN1 A5 A5 IN2 IN2 A6 A6 IN3 IN3 A7 A7 IN4 IN4 A8 A8 IN5 IN5 A9 A9 SETUP SETUP A10 A10 HOLD HOLD A11 A11 DRIVE DRIVE A12 A12 RESET RESET A13 A13 SVON SVON Load Load B1 B1 OUT0 OUT0 Load Load B2 B2