ZCUK

Symbol 2 to 8 10 to 16 40, 50 20 to 32 U C D B Flat Flat with ribs Deep Bellows B4 M4 x 0.7 Symbol Applicable cylinder model Female thread M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Application: Refer to Table (1). Nil ZC(D)UK 16/32 M10 x 1.25 B10 Note) -X11 Pad: 2 to 8 diameter and flat style only available.

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VVQ1000-N4-Station (1 to Max. stations) Name plate [-N4] AN103-X233 Silencer (For EXH port)

Series VQ Metal Seal/Rubber Seal Body Ported

For SUP passage block VQ0 4 ---P 1 2 0 1 VQ0 4 ---R 1 2 0 1 VQ0 4 ---PR 1 2 0 1 For EXH passage block For SUP/EXH passage block Name plate [-N4] VVQ0-N4-Station (1 to Max. stations) When ordering assemblies incorporated with a manifold, suffix N to the manifold No. It is a transparent resin plate for placing a label that indicates solenoid valve function, etc.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 CH1 CH2 CH3 CH4 SET OFF P2 P4 P1 P3 High pressure: Compound pressure type Positive pressure type High vacuum: Vacuum type SET Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON MPa Switch output 1 & 2 kPa OFF OUT1 OUT2 CH Increases the set value Decreases the set value 1 2 3 4 n2 n4

PSE530/200

the set value Decreases the set value Switch output 1 & 2 CH 1 2 3 4 For normally closed PRESSURE OFF IF SET P1 P2 P3 P4 High pressure:Compound pressure type Positive pressure type High vacuum: Vacuum type SET Data SET (For CH1) Hysteresis Hysteresis OUT2 setting (1)/CH1 only Manual mode ON Switch output 1 & 2 For normally open Displays alternately MPa OFF kPa n1 n2 n3 n4

PSE200

Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 CH1 CH2 CH3 CH4 SET OFF P2 P4 P1 P3 High pressure: Compound pressure type Positive pressure type High vacuum: Vacuum type SET Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON MPa Switch output 1 & 2 kPa OFF OUT1 OUT2 CH Increases the set value Decreases the set value 1 2 3 4 n2 n4

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the set value Decreases the set value Switch output 1 & 2 CH 1 2 3 4 For normally closed PRESSURE OFF IF SET P1 P2 P3 P4 High pressure:Compound pressure type Positive pressure type High vacuum: Vacuum type SET Data SET (For CH1) Hysteresis Hysteresis OUT2 setting (1)/CH1 only Manual mode ON Switch output 1 & 2 For normally open Displays alternately MPa OFF kPa n1 n2 n3 n4

0.4

(Except double wiring) With name plate External pilot Direct EXH outlet with built-in silencer C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow with 3.2 One-touch fitting Top ported elbow with 4 One-touch fitting Top ported elbow with 6 One-touch fitting M5 thread

VQC

Cylinder port size C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow Wtih 3.2 One-touch fitting Top ported elbow With 4 One-touch fitting Top ported elbow With 6 One-touch fitting M5 thread Bottom ported elbow With 3.2 One-touch fitting Bottom ported elbow With 4

Serial Transmission System Series EX250 Series EX500

(Fill out for I/O unit only) L5 B3 Nil PNP (+) or without SI unit/input block (SD0) NPN () N B4 Input block type (Fill out for I/O unit only) B6 B5 LM Nil Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3-pin) 1 2 3 Ports 2, 4 size (inch) Ports 2, 4 Symbol N1 N3 N7 NM Ports 1, 3, 5 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting Mixed Top ported elbow 1

5 Port Solenoid Valve, Series VQC

Bottom ported elbow With 4 One-touch fitting B4 Bottom ported elbow With 6 One-touch fitting B6 r SI unit COM t Input block (Fill out for I/O unit only) B5 LM M5 thread Elbow port, mixed sizes EX500 EX250 DeviceNet SI unit COM Nil Without SI unit/input block (SD0) Without input block With 1 input block Nil DeviceNet PROFIBUS-DP PROFIBUS-DP Remote I/O 0 1 +COM COM N Note 1) Indicate

Series VQ Base Mounted Metal Seal/Rubber Seal

2 sets of regulator unit 3 sets of regulator unit With vacuum ejector unit B D G1 G2 G3 J K N R S (2) Series VQ1000 1 (3) Kit Manifold (3) (3) Plug-in unit 1 (4) Stations (5) Special wiring specification (Not double wiring) With name plate External pilot Built-in silencer (Direct exhaust) Cylinder ports 01 1 station Symbol Port size Symbol Port size C3 C4 C6 M5 CM L3 L4 (6) L6 L5 B3 B4

VQC

Bottom ported elbow With 4 One-touch fitting B4 Bottom ported elbow With 6 One-touch fitting B6 r SI unit COM t Input block (Fill out for I/O unit only) B5 LM M5 thread Elbow port, mixed sizes EX500 EX250 DeviceNet SI unit COM Nil DeviceNet Nil Without SI unit/input block (SD0) Without input block With 1 input block PROFIBUS-DP PROFIBUS-DP Remote I/O 0 1 +COM COM N Note 1) Indicate

Pad Diameter: 04 (ø4), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Vacuum Entry: U6 (Barb Ø6 Urethane Tubing), Mounting Thread: A5 (M5X0.8)

Pad Diameter: ø4, Pad Styles: Flat Style, Material: Conductive Silicon Rubber, Vacuum Entry: Barb Ø6 Urethane Tubing, Mounting Thread: M5X0.8

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 11 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: B4 (ø4 One-touch Fitting), Downward Elbow

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: B4 (ø4 One-touch Fitting, Downward Elbow)

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø8, Pad Styles: B (Bellows), Material: S (Silicon Rubber), Vacuum Entry: B4 (Female Thread M4X0.7)

Pad Diameter: 08 (ø8), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Vacuum Entry: B4 (Female Thread M4X0.7)

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø8, Pad Styles: U (Flat Style), Material: N (NBR), Vacuum Entry: B4 (Female Thread M4X0.7)