Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Refer to page 642 for the lead wire length of L and M plug connectors. Refer to page 645 for the connector assembly with cover for L and M plug connectors. 616 3 Port Pilot Solenoid Valve 10-SYJ500 Construction r w t q y e r w t q y e N.C. N.O.

Aluminum High Vacuum Angle Valve

A cm 2 7 Ultimate Pressure Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1 D3/L (L/sec) at an air temperature of 20C. Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s).

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Q Diode LED Coil Timer circuit How to Order Q SYJ 3 T Z 1 2 Black (--) Q 1: Starting current 2: Holding currect Q Applied voltage Q Rated voltage 24V 5 6 24VDC 12VDC 0V Q Standard Specify the same as standard 0.55W Q Power saving type 0.22W 0W Q 62ms Q Q Q Q Q Q Q Q Q Q Q Q Q 20 Q Q Q Q Drawings Series

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

SY

number L 44 16 8 Terminal no.

Hydraulic

Q: Required fluid volume for extension (l/min) Q: Required fluid volume for retraction (l/min) D: Bore size (cm) d: Piston rod diameter (cm) : Piston speed (mm/s) Q = D __ 4 6 _ 1000 Formula (1) Q = (D d) __ 4 6 _ 1000 ..

REA/REB

RS Q G RS H A Model REBH15 REBH25 REBHT25 REBHT32 Thread size M6 x 1.0 M5 x 0.8 M8 x 1.25 Bolt dimensions RZQ Dimension t l-9 l-8 l-12 Nm Tightening torque 4.4 2.65 13.2 MI W S CEP1 CE1 Square nut CE2 ML2B C J G5-S l t CV MVGQ CC RB J D-X 20Data 10-2-75 75 Series REBH Model Selection 1 Operating Conditions Pv: Maximum operating pressure for vertical operation (MPa) Wv: Allowable load weight

REA/REB

RS Q G RS H A Model REBH15 REBH25 REBHT25 REBHT32 Thread size M6 x 1.0 M5 x 0.8 M8 x 1.25 Bolt dimensions RZQ Dimension t l-9 l-8 l-12 Nm Tightening torque 4.4 2.65 13.2 MI W S CEP1 CE1 Square nut CE2 ML2B C J G5-S l t CV MVGQ CC RB J D-X 20Data 10-2-75 75 Series REBH Model Selection 1 Operating Conditions Pv: Maximum operating pressure for vertical operation (MPa) Wv: Allowable load weight

Electric Actuator/Slider Type

At this position, 2 mm at the end (size 25, 32) and 4 mm at the end (size 63). 81 Electric Actuator/Guide Rod Type Series LEYG Model Selection AC Servo Motor Moment Load Graph Selection conditions Vertical Horizontal L L L m m L Mounting position m m Max. speed [mm/s] SpeedWork Load Graph 200 or less Over 200 Graph (Sliding bearing type) q, w t, y u, i Graph (Ball bushing bearing type) e,

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Table of Contents

supply capacity Q Inlet air temperature35C 300 l/min (ANR) Therefore, corrected outlet air flow rate can be determined.

Air Slide Table

Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.

, Vacuum Switch Model: E15 (1 Output w/o Analog Output, 200° Setting), Vacuum Switch Electrical Entry: Grommet Type, Lead Wire (ZSE1: 0.6m, ZSM1: 0.5m), Release Flow Rate Adjusting Needle: L (With Lock Nut)

), Manual Override: Non-locking Push Style, Vacuum Switch Model: E15 (1 Output w/o Analog Output, 200° Setting), Vacuum Switch Electrical Entry: L (Grommet Lead Wire 3m: ZSE1, ZSM1), Release Flow Rate Adjusting Needle: L (With Lock Nut)

K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: H (Grommet Type w/0.6m Lead Wire), Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum Switch Model: E14 (1 Output w/o Analog Output, 3 Rotation), Vacuum Switch Electrical Entry: Grommet Type, Lead Wire (ZSE1: 0.6m, ZSM1: 0.5m), Release Flow Rate Adjusting Needle: L

Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: G (Grommet Type w/0.3m Lead Wire), Light/Surge Voltage Suppressor: S (w/Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Vacuum Switch Model: E14 (1 Output w/o Analog Output, 3 Rotation), Vacuum Switch Electrical Entry: Grommet Type, Lead Wire (ZSE1: 0.6m, ZSM1: 0.5m), Release Flow Rate Adjusting Needle: L

Flow(l/min): 15, Body Material: Aluminum, Nozzle Diameter: 0.5mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: L-type plug connector, with 0.3‑m lead wire, Light/surge voltage suppressor: With light/surge voltage suppressor, Manual: Non-locking push type, Vacuum switch type: Single output, without analog, 200° setting (ZSE1)

Nozzle Diameter: ø0.5, Body Style: Single Unit w/Valve + Standard Silencer, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: Rc, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum Switch Model

Nozzle Diameter: ø0.5, Body Style: Single Unit w/Valve + Standard Silencer, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: Rc, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: Grommet Type w/0.6m Lead Wire, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style, Vacuum