Modular Type Regulator Series AR

MPa 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa AR30 AR60 0.25 0.25 Outlet pressure MPa Outlet pressure MPa Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa 38 AR10 to 60 Construction AR10 AR20, 25 t t

Process Pump <Fluororesin Type> Series PA3000

50 4 0.1 0.3MPa 2 0.2MPa 00 5 10 00 5 10 00 50 100 Flow rate (l/min) Air consumption (l/min [ANR]) Operating cycle (Hz) PAP3313-T11: Flow rate characteristics (5Hz)* PAP3313-T11: Flow rate characteristics (2.5Hz)* PAP3310-T11: Flow rate characteristics 0.5 0.5 0.5 Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.5MPa Discharge pressure (MPa) 0.4 0.4 0.4 SUP = 0.5MPa SUP = 0.5MPa

SY

(U Side Mount Type) SY9000-70Direct mount type: ASY9000-71Direct mount type: ASY9000-72DIN rail mount type: ASY9000-73DIN rail mount type: AP/R port P/R port Plug C12 00 Specification Plug C12 00 12 One-touch fitting 12 One-touch fitting Specification 1 3 4 5 Internal pilot type 1 3 4 5 Internal pilot type External pilot type External pilot type Internal pilot with built-in silencer type

Process Valve Series VNA

Note 2) Vacuum pilot type pilot solenoid valves will become VO301V-00.

E-P HYREG

VVEX2-2-5-02 VY1200-00-G 4 pcs.

JXCx-OMT0023

PA02 0 Selection of regenerative option 00:Regenerative option is not used For driver of 100W, regenerative resistor is not used. For driver of 200W to 400W, regenerative resistor is not used. 02:LEC-MR-RB-032 03:LEC-MR-RB-12 Selection of regenerative option 00: Regenerative option is not used. For servo amplifier of 100W, regenerative resistor is not used.

V100

VO325-00 VQZ VT325-T Specifications VZ Type of actuation Direct operated type 2 position single solenoid VS Air Fluid Operating pressure range 0 to 1.0 MPa 10 to 50C (No freezing. Refer to page 4-18-4.)

Electric Slide Tables

00 3 6 9 00 2 4 6 00 0.5 1.0 1.5 2.0 Work load m [kg] Work load m [kg] Work load m [kg] 2,000 2,000 1,500 1,250 1,500 1,500 Pitching Mep 1,000 L4 [mm] L4 [mm] L4 [mm] 1,000 750 1,000 500 500 500 250 Mep m 00 0.1 0.2 0.3 0.4 0.5 00 1 2 3 4 5 00 0.5 1.0 1.5 2.0 L4 Vertical Work load m [kg] Work load m [kg] Work load m [kg] 2,000 2,000 1,500 1,250 1,500 1,500 1,000 L5 [mm] L5 [mm] L5 [mm] 750

E-P HYREG ® Series VY1

M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 E-P HYREG Series

AC Servo Motor Driver (CC-Link Type ）

. ## denotes any of numerals 00 to 16 and what it means is listed below. ## Description 00 Set to the test operation mode. 01 Station number 1 02 Station number 2 03 Station number 3 : : : : 62 Station number 62 63 Station number 63 64 Station number 64 Note 2. $$$ indicates numbers from 0 to 255, and the number indicates the executing point table number. 3. indicates the warning/alarm No

Modular F.R.L. Units

[MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] AR50(K)-B AR60(K)-B 0.25 0.25 Outlet pressure [MPa] Outlet pressure [MPa] Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 71 Regulator AR10-A Series Regulator AR20

AC Servo Motor Driver (Pulse input type/Positioning type ）

Setting "00" will assign NP/NP2 (reverse rotation pulse/manual pulse generator). _ _ x x Torque control mode Device selection 00h Refer to table 5.10 in [Pr.

VQ4000

Note 5) Dust tight/Low jetproof enclosure (IP65) is not available with interface regulator. 0.4 0.3 0.2 0.1 0 0 200 400 600 800 1000 1200 1400 1600 Flow rate (l/min(ANR)) ARBQ4000-00-P (P A) How to Order 0.7 Outlet pressure (MPa) 0.6 0.5 Regulating port Solenoid Valve Interface regulator 0.4 A ARBQ4000-00-A-1 0.3 VQ40 (Plug-in type) B ARBQ4000-00-B-1 0.2 P ARBQ4000-00-P-1 0.1 A ARBQ4000-

AC Servo Motor Driver (CC-Link Type ）

. ## denotes any of numerals 00 to 16 and what it means is listed below. ## Description 00 Set to the test operation mode. 01 Station number 1 02 Station number 2 03 Station number 3 : : : : 62 Station number 62 63 Station number 63 64 Station number 64 Note 2. $$$ indicates numbers from 0 to 255, and the number indicates the executing point table number. 3. indicates the warning/alarm No

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

Series SV

L dimension Weight (g) 985.5 973 960.5 948 935.5 923 910.5 898 885.5 249.3 246.2 243 239.8 236.7 233.5 230.4 227.2 224 85 Series SV Valve Manifold Specifications Manifold Option I Interface regulator How to order interface regulator Series SV1000 Series SV2000, 3000, 4000 05 00 P SV 2 000 P SV1 0 00 Series Applicable valve Regulator port SV2000 SV3000 SV4000 2 3 4 For single and double For

Check Valve Series AK

M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 5/32 1/4 5/16 3/8 1/2 3 6 10 17 24 2.8 6.5 14 24 34 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Metric Size Male connector type: AKH H (Hexagon width across flats) Connection thread R Applicable tubing O.D.

/

(mm) Max. operating pressure differential (MPa) Flow characteristics Note) Value for V and M options (Non-leak/Medium vacuum) Model C[dm3/(sbar)] b Cv 1.5 0.6 1.5 3.0 0.2 0.35 0.9 0.15 0.35 2 0.59 0.18 0.48 VXE2111-00 VXE2121-00 VXE2221-00 VXE2321-00 VXE2131-00 VXE2231-00 VXE2331-00 VXE2241-00 VXE2341-00 3 1.2 0.33 0.45 3.0 4.5 2.3 0.61 0.46 6 4.1 1.10 0.30 Refer to Glossary on page 44 for

Vacuum Ejector Series ZM

-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 ZSM1-015 ZSM1-021 Model Sensor type Switch Set pressure range Hysteresis Repeatability Diaphragm Solid state Electronic circuit Solid state Reed 27 to 80 kPa 0 to 101 kPa Max. 15 kPa Max. 20 kPa 3% full span or less (Fixed) 1 to 10% of the set pressure (Changeable) 1 to 10% of the set pressure (Changeable) 1% full span