Direct Operated

Values of pneumatic Kv are different from Cv because the testing method is different from each other. 3 3 2 2 Upstream pressure Saturated aqueous vapor flow rate Q0 [kg/h] (when Av = 1 x 106 [m2]) P1 = 1 MPa Water flow rate Q0 [l /min] (When < when Av = 1 x 106 [m2]) P1 = 0.8 MPa 1 0.9 0.8 0.7 0.6 1 0.9 0.8 0.7 0.6 P1 = 0.6 MPa Ex. 2 P1 = 0.5 MPa P1 = 0.4 MPa 0.5 0.5 0.4 0.4 P1 = 0.3 MPa

VFS

2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !

Vacuum

Analog Output Characteristics Hysteresia mode when the values of P1 and P2 are equal or when P1>P2 but within 3 digits, the hysteresis will be automatically set to 3 digits tor the set value ot P1. Window comparator mods The hysteresis is automatically set to 3 digits, so separate P1 trom P2 by 7 digils or more when programming.

Vacuum

Analog Output Characteristics Hysteresia mode when the values of P1 and P2 are equal or when P1>P2 but within 3 digits, the hysteresis will be automatically set to 3 digits tor the set value ot P1. Window comparator mods The hysteresis is automatically set to 3 digits, so separate P1 trom P2 by 7 digils or more when programming.

0.4

Flow characteristics: C Max. operating frequency 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m SUP side pressure (P1) VVQ1000-FPG-02 1 set VQ1000-FPG-C6M5-D 2 pcs.

SZ3000

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 +0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min(ANR)] S: Effective sectional area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

M27 x 2 30+0.5 +0.15 110 30 30 148 54 55 * Supplied with clevis pin and clevis pin bracket.

4/5 Port Solenoid Valve

= 0.7 MPa, P2 = 0.5 MPa Effective area at supply side (mm2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Note 3) P A 1.9 5.1 P B 2.1 5.8 A EA Note 3) 4.5 12.6 B EB 4.5 12.6 Back page 12 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE POLAND SMC Industrial Automation Polska Sp.z.o.o.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

1 Q=226S P(P2+0.1013) Sonic flow : P1+0.1013 1.89(P2+0.1013) Do not use in an explosive environment. 2 Q=113S(P1+0.1013) Q : Flow rate [ /min(ANR)] S : Effective area (mm2) P : Differential pressure (P1-P2) [MPa] P1 : Upstream pressure [MPa] P2 : Downstream pressure [MPa] Do not use in locations subject to heavy vibration and/or shock.

VQZ1000/2000/3000

For DIN rail model number, refer to page 2-7-54. Note 2) Applicable to VQZ2000 and 3000.

3

p8 p7 p6 p5 p4 p3 p2 p1 p0 PF3W720/520-;03 (at 16 L /min) Accuracy [% F.S.]

ZX

(Blank plate) 13-2-54 54 Vacuum Module: Vacuum Pump System Series ZX Manifold/System Circuit Example When not using individual air pressure supply When using individual air pressure supply Left Left ZX ZR Dummy spacer R16 side ZM Common exhaust Common exhaust Common air supply for vacuum valve Common air supply for vacuum valve Pilot exhaust ZH Air supply for vacuum valve Right Common vacuum

JXCx-OMY0006

Red LED is flashing EtherNet/IP connection time out Red LED is ON IP duplicated OFF BUS IN side (P1): No Link, No Activity L/A1 Link/Act Green LED is ON BUS IN side (P1): Link, No Activity Green LED is flashing BUS IN side (P1): Link, Activity OFF BUS OUT side (P2): No Link, Activity L/A2 Link/Act Green LED is ON BUS OUT side (P2): Link, No Activity Green LED is flashing BUS OUT side (P2)

Regulator

54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40-06-D 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50-D 70 75 66 11 22 113 3.2 AR60-D 70 75 66 11 22 113 3.2 The dimension of B is the length when the regulator knob is unlocked. -28- 12-2.

Filter Regulator

54 8.5 10.5 70 2.3 35.5 42.5 21 7 186.9 155.6 153.9 149.5 154 169.5 174 AW40-06-D 50 54 55.5 8.5 10.5 70 2.3 35.5 42.5 21 7 188.9 157.6 155.9 151.5 156 171.5 176 AW60-D 70 75 66 11 22 113 3.2 273.9 242.6 240.9 236.5 241 256.5 261 The dimension C is the length when the filter regulator knob is unlocked. -45- 13-2.

JXCx-OMT0023

0r/min Servo motor speed P1 + b) (200 10STM m) ON Program input 1 (PI1) Waiting for PI1 to be turned ON by SYNC (1) (a)) OFF 13 42 13.

VM

(Copper-free) VH VHS IN P1 Flow Rate and Effective Area OUT IN P2 VR1211F Model Metric size 6 3.2 4 Applicable tubing O.D. If air is only supplied only to either P1 or P2 it, does not flow to the OUT side.

SQ1000/2000

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

CEx-OMG0106

Setting of Origin Direction 54 12-2. Adjustment of Air Balance 54 Chapter 13: Error Messages & Countermeasures 13-1. Controller 5557 13-2. Brake Units Life Span 58 Chapter 14: Appendix 14-1.

60

Value is different from Kv and Cv factors for pneumatic purpose due to different test method. 3 3 Saturated steam flow rate Q0 [kg/h] (when Av = 1 x 106 [m2]) Water flow rate Q0 [l /min] (When Av = 1 x 106 [m2]) 2 Upstream pressure 2 P1 = 1 MPa P1 = 0.8 MPa 1 0.9 0.8 0.7 0.6 1 0.9 0.8 0.7 0.6 P1 = 0.6 MPa Example 2 P1 = 0.5 MPa P1 = 0.4 MPa 0.5 0.5 0.4 0.4 P1 = 0.3 MPa Example 1 0.3 0.3 P1