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Example 3 Example 4 Example 5 2-port, Nozzle ON/OFF 3-port, Reducing load to pump 3-port, Switching nozzles SGH SGH SGH 12(P1) 12(P1) 12(P1) Nozzle Nozzle 2(A) 2(A) 1(P) 1(P) Nozzle 1(P) 2(A) 3(B) Stop valve Tank Coolant pump 3(B) Tank Coolant pump Tank Coolant pump For reducing load to pump, coolant liquid is returned from B port to tank each time.

ZR

x 0.4 x 13 2 2 2 2 2 2 2 4 4 M2 x 0.4 x 23 M2 x 0.4 x 48 M2 x 0.4 x 53 M2.5 x 0.45 x 41 M2.5 x 0.45 x 17 M2.5 x 0.45 x 21 M2.5 x 0.45 x 66 M2.5 x 0.45 x 70 w Common and port exhaust style for nozzle size 18, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20

Refrigerated Thermo-chiller

Contact Input/Output Function Specifications Item P1 (Refer to the next page for connector location) Connector no.

Compact and Lightweight

P1 12 C L4 M2 9.7 2 The release button of 6 One-touch fitting is oval as shown above. The button can be rotated freely. L1 L21 L3 M1 d2 M3 Q1 D22 2 x F VAC.

Table of Contents

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

Table of Contents

state (AMH) Element saturated state (AFM, AFD) Element initial state (AFM, AFD) P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.12 0.12 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.10 0.10 0.08 0.08 0.06 0.06 0.04 0.04 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.02 0.02 100 200 300 400 0 400 800 1200 1600 0 Inlet air flow rate

Table of Contents

IFW550 0.10 P1 = 0.6 MPa P1 = 0.5 MPa P1 = 0.4 MPa P1 = 0.3 MPa 0.08 Pressure drop (MPa) P1 = 0.2 MPa 0.06 P1 = 0.1 MPa Component Parts 0.04 No. Description Material Description Material No.

Booster Regulator/Air Tank

Flow-rate Characteristics Flow-rate Characteristics VBAT05A 2 1.6 0.1 1.4 Outlet pressure (MPa) Outlet pressure (MPa) P1 = 1.0 MPa 1.2 Max. pulsation range (MPa) P1 = 0.8 MPa 0.08 P1 = 0.75 MPa P1 = 0.7 MPa 1 P1 = 0.6 MPa P1 = 0.5 MPa P1 = 0.5 MPa 1 0.8 P1 = 0.4 MPa 0.06 P1 = 0.3 MPa P1 = P2 0.6 P1 = P2 0.04 0.4 0.2 0.02 VBAT05A 0 500 1000 1500 2000 2500 3000 0 100 150 50 Outlet air flow

Table of Contents

hexagon socket head cap screws with 3.3 top diameter, or JISB1101 type M2 round head screws.

SMC Electronic Switch Series Variations

Example: The figure below is based on the condition of set values as P1 = 40[kPa] and P2 = 20[kPa].

1

Example: The figure below is based on the condition of set values as P1 = 40 [kPa] and P2 = 20 [kPa].

VNB

Pilot port P1 and P2 piping Please arrange P1 and P2 piping as follows according to the model.

ZSM1-115/121

ISG Supply pressure normal Supply pressure drop Supply pressure increase ZSM P1 Set value Vacuum P1 P2 Normal filled pressure Insufficient filled pressure Excessive filled pressure P1 P2 n1 n2 n1 n2 P2 Filled pressure Set value Reverse mode AUTO-SHIFT input n1 n2 Time Normal mode Operating normally Operating normally Operating normally ON OFF Time Time ON When the Auto Shift Function is used

VNC

N.C. 12 (P2) 12 (P1) 12 (P1) 12 (P1) VX2 VX (1) (2) (1) (2) (1) (2) (1) (2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN LVC Wide selection of port size and variations LVA LVH Threaded type (6A to 50A) Flange type (32F to 80F) LVD LVQ LQ LVN Low water

70pvvna

) 12 (P1) 10 (P2) PB Power consumption DC Holding Inrush Apparent power AC Air operated 2 (B) 1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 10 (P2) Manual override VNA11 VNA12 12 (P1) 12 (P1) External pilot solenoid 1 (A) 2 (B) 2 (B) 1 (A) 17-4-7 4 Series VNA Port size 6A, 8A, 10A Applicable cable O.D. 6 to 8 (D.T) 125 (Conduit terminal: T DIN terminal: D) 108.2 (Grommet terminal: E) 106.7 (Grommet: G) 63

CEx-OMQ0011

UPDOWN PRG STEP P1 " 1000.0 " " " 1 READ " " P1 " UP DOWN P1 P2 P3 P4 P5 P6 P7 P8 48 11-2 11-2-1 PROGRAM STEP 0 End PRG 1 UPDOWN No.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Gasket Mounting screw (M2) For the manifold with pressure sensor/vacuum pressure switch, order the (a) (b) manifold base (a) for the required number (c) of stations.

5 Port Solenoid Valve

Plug lead Mounting screw (M2) Lever Connector Lever pawl Groove Cover Note) In order not to damage the connector and cover, do not pull the lead wire excessively (with a force of 2.25 lbf (10 N) or more). 92 Series S0700 Specific Product Precautions 2 Be sure to read before handling.

Electric Actuator/Slider Type

Note 2) Check the clearance and play of the guide separately. 26 Electric Actuator/Slider Type Belt Drive Series LEFB LEFS25, 32, 40 AC Servo Motor RoHS How to Order 300 S V7 S B 3 M2 LEFB 32 q w e r y t u i o !

Process Pump

Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Viscosity and dynamic viscosity are obtained by the formulas below. Dynamic viscosity [cSt] Viscosity [mPas] Density [g/cm3] 1 [mPas1 [cP] 14 Working Principle 1. When air is supplied to P1 port, it enters drive chamber A. 2. Diaphragm A moves to the left, and at the same time diaphragm B also moves to the left. 3.