ZP

ZP3-Y13UM: -04 ZP3-Y16UM: -04 Buffer Applicable Pad List 7 19 A B Width across flat 8 Width across flat 7 Square 8 M5 x 0.8 2.5 1.8 (17.8) (12.5) Mounting Adapter Part No.

Vacuum Pad

ZP3-Y13UM: -04 ZP3-Y16UM: -04 Buffer Applicable Pad List 7 19 A B Width across flat 8 Width across flat 7 Square 8 M5 x 0.8 2.5 1.8 (17.8) (12.5) Mounting Adapter Part No.

Vacuum Pad

ZP3-Y13UM: -04 ZP3-Y16UM: -04 Buffer Applicable Pad List 7 19 A B Width across flat 8 Width across flat 7 Square 8 M5 x 0.8 2.5 1.8 (17.8) (12.5) Mounting Adapter Part No.

Vacuum Pad

ZP3-Y13UM: -04 ZP3-Y16UM: -04 Buffer Applicable Pad List 7 19 A B Width across flat 8 Width across flat 7 Square 8 M5 x 0.8 2.5 1.8 (17.8) (12.5) Mounting Adapter Part No.

AS

AS22;1F-01-23(S)A 3.2 7.2 9 (9) AS22;1F-01-04(S)A 4 8.2 19.1 26.1 (26) 13.3 13 AS22;1F-01-06(S)A 19.1 6 1/8 10.4 11.6 30.6 29.2 27.5 26.1 10 (9) (12.7) AS22;1F-01-08(S)A 8 13.2 22.4 29.4 (29.3) 14.2 11 (10) AS22;1F-01-10(S)A 10 15.9 25.3 32.3 (32.2) 15.6 12 (11) AS22;1F-02-23(S)A 3.2 7.2 20.9 30 (30.3) AS22;1F-02-04(S)A 4 8.2 13.3 18 (19) 17 AS22;1F-02-06(S)A 22.6 6 1/4 10.4 12.6 23.4 32.5

Table of Contents

(mm) Model D1 Weight (g) 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 D2 L1 L2 L3 P A Q1 Q2 M1 M2 Port B Min. port size H a b (Width across flats) 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 68 71.5 73.5 13 14 17 18 13 10.4 38.2 16 9.9 17 64 65.5 67.5 H D 8 4 KM14-04-08-01S-3 30 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 38 6 KM14-04-08-02S-3 15.2 10.4 KM14

KJ

(mm) Model D1 Weight (g) 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 D2 L1 L2 L3 P A Q1 Q2 M1 M2 Port B Min. port size H a b (Width across flats) 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 68 71.5 73.5 13 14 17 18 13 10.4 38.2 16 9.9 17 64 65.5 67.5 H D 8 4 KM14-04-08-01S-3 30 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 38 6 KM14-04-08-02S-3 15.2 10.4 KM14

Table of Contents

P port regulation ARBF5050-00-P-1 (Plug-in type) ARBF5050-00-P-2 (Non plug-in type) Individual SUP spacer VVFS5000-P-04-1 (Plug-in type) VVFS5000-P-04-2 (Non plug-in type) Interface regulator Individual SUP spacer Rc 1/2 Individual EXH spacer VVFS5000-R-04-1 (Plug-in type) VVFS5000-R-04-2 (Non plug-in type) Interface regulator/A port regulation ARBF5050-00-A-1 (Plug-in type) ARBF5050-00-A

ZP3

w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Table of Contents

Symbol A R P Symbol 2 Body class 2 Orifice dia. LVQ Metric sizes 4 04 06 4 6 N.C.

Table of Contents

To connect a drain discharge pipe, use a pipe with a minimum bore of 10, and a maximum length of 5 m. Avoid using a riser pipe.

Hydraulic Filters

When using a differential pressure indication switch and if a filter clogged signal is incorporated into the sequence circuit of the machine, make sure to design the system so the filter clogged signal does not operate until normal operation starts. 10 Pressure drop (kPa) -04/06/08 -10/12/16 -20/24 COM. N.O. N.C.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

A A A A SS5Y5-45S1UStations D.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

10 stations A, B P , EA, EB Symbol 04 06 Thread type Symbol 1 2 Nil Rc 3 4 3 4 Passage Porting specifications (A, B) EA, EB P G F Symbol M Mixed N NPT For bottom ported: 1/2 only.

Speed Controller with Indicator

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Proposals for Energy Saving

Note 2) Changing from an internal pilot to an external pilot or vice versa is not possible. 04 4 5 1 VP3 A G 1 04 4 5 1 VP3 A G 1 Pilot option VP 3 port solenoid valve Standard (Internal pilot) External pilot 1 Nil 1 Type of actuation 1 No. of solenoids Single A B N.C. (Normally closed) N.O.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

A A A A 24V 0V +24V 24G DA DB DG FG R4.5 129 STATION NO.

M-E05-1-LQ1

B side Tubing Extension Union Elbow LQ1E-T A side Metric size A side B side Part no.

CG5-S

Mineral oil A A A C A A 18 Sodium hypochlorite (2%, Room temperature) A C D A D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B D A A B 23 Unless noted otherwise, the solution concentration is in a saturated state.

CG5-S

Mineral oil A C A A A A 18 Sodium hypochlorite (2%, Room temperature) A C A D D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B A D A B 23 Unless noted otherwise, the solution concentration is in a saturated state.